JP2006133101A - 光電式エンコーダ - Google Patents
光電式エンコーダ Download PDFInfo
- Publication number
- JP2006133101A JP2006133101A JP2004323206A JP2004323206A JP2006133101A JP 2006133101 A JP2006133101 A JP 2006133101A JP 2004323206 A JP2004323206 A JP 2004323206A JP 2004323206 A JP2004323206 A JP 2004323206A JP 2006133101 A JP2006133101 A JP 2006133101A
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- Prior art keywords
- light source
- light
- semiconductor light
- grating
- photoelectric encoder
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000004065 semiconductor Substances 0.000 claims abstract description 18
- 238000000295 emission spectrum Methods 0.000 claims abstract description 10
- 230000003993 interaction Effects 0.000 claims description 3
- 238000004020 luminiscence type Methods 0.000 claims description 2
- 230000000694 effects Effects 0.000 abstract description 3
- 230000003287 optical effect Effects 0.000 description 10
- 238000009792 diffusion process Methods 0.000 description 7
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 230000001681 protective effect Effects 0.000 description 4
- 238000001228 spectrum Methods 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 239000003086 colorant Substances 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 241000668842 Lepidosaphes gloverii Species 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005549 size reduction Methods 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
- G01D5/34715—Scale reading or illumination devices
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
Abstract
【解決手段】光源からの光を、互いに相対移動するメインスケール20とインデックススケール30に照射して、その相互作用により受光信号を得るようにした光電式エンコーダにおいて、前記光源として、発光スペクトルの半値幅が単色半導体光源よりも広い、インコヒーレントな半導体光源(白色LED40)を用いる。
【選択図】図3
Description
4…光源部
8…コリメートレンズ
11…第1(光学)格子
20…メインスケール
21…スケール格子(第2(光学)格子)
30…インデックススケール
31、31A、31B…インデックス格子(第3(光学)格子)
32、32A、32B…受光素子
34…受光部
40…白色発光ダイオード(LED)
42B…青色LED
42G…緑色LED
42R…赤色LED
42UV…紫外(UV)LED
44RGB…RGB蛍光体
44Y…黄色蛍光体
50…レンズ
52…アパーチャ
60…拡散部
Claims (7)
- 光源からの光を、互いに相対移動するメインスケールとインデックススケールに照射して、その相互作用により受光信号を得るようにした光電式エンコーダにおいて、
前記光源として、発光スペクトルの半値幅が単色半導体光源よりも広い、インコヒーレントな半導体光源を用いることを特徴とする光電式エンコーダ。 - 前記インコヒーレントな半導体光源に、更に、拡散手段を組合せたことを特徴とする請求項1に記載の光電式エンコーダ。
- 前記インコヒーレントな半導体光源が、白色発光ダイオードであることを特徴とする請求項1又は2に記載の光電式エンコーダ。
- 前記インコヒーレントな半導体光源が、中心波長の異なる複数の単色発光ダイオードを組合せたものであることを特徴とする請求項1又は2に記載の光電式エンコーダ。
- 前記インコヒーレントな半導体光源が、中心波長の異なる複数の単色レーザダイオードを組合せたものであることを特徴とする請求項1又は2に記載の光電式エンコーダ。
- 前記インコヒーレントな半導体光源が、スーパールミネセンスダイオードであることを特徴とする請求項1又は2に記載の光電式エンコーダ。
- 前記インコヒーレントな半導体光源が、中心波長の異なる複数のスーパールミネセンスダイオードを組み合わせたものであることを特徴とする請求項1又は2に記載の光電式エンコーダ。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004323206A JP4880893B2 (ja) | 2004-11-08 | 2004-11-08 | 光電式エンコーダ |
EP05256502A EP1657528B1 (en) | 2004-11-08 | 2005-10-20 | Photoelectric encoder with broadband light source and protection film on light receiving element |
DE602005003539T DE602005003539T2 (de) | 2004-11-08 | 2005-10-20 | Photoelektrischer Lagegeber mit breitbandiger Lichtquelle und Schutzfilm auf Lichtempfangselement |
US11/257,895 US7265338B2 (en) | 2004-11-08 | 2005-10-25 | Photoelectric encoder using an incoherent semiconductor light source |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004323206A JP4880893B2 (ja) | 2004-11-08 | 2004-11-08 | 光電式エンコーダ |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2006133101A true JP2006133101A (ja) | 2006-05-25 |
JP2006133101A5 JP2006133101A5 (ja) | 2007-10-25 |
JP4880893B2 JP4880893B2 (ja) | 2012-02-22 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004323206A Active JP4880893B2 (ja) | 2004-11-08 | 2004-11-08 | 光電式エンコーダ |
Country Status (4)
Country | Link |
---|---|
US (1) | US7265338B2 (ja) |
EP (1) | EP1657528B1 (ja) |
JP (1) | JP4880893B2 (ja) |
DE (1) | DE602005003539T2 (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010181181A (ja) * | 2009-02-03 | 2010-08-19 | Canon Inc | スケール、それを有する変位検出装置、及びそれを有する撮像装置 |
JP2011013093A (ja) * | 2009-07-01 | 2011-01-20 | Mitsutoyo Corp | 光電式エンコーダ |
JP2012225681A (ja) * | 2011-04-15 | 2012-11-15 | Mori Seiki Co Ltd | 光学式変位測定装置 |
KR20160056350A (ko) * | 2014-11-10 | 2016-05-20 | (주)금강오토텍 | 리니어 스케일 방식을 이용한 드롭 리프트 |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7435946B2 (en) * | 2005-10-17 | 2008-10-14 | Ricoh Company, Ltd. | Mark detector using multiple light beams for use in a displacement detector and an image forming apparatus |
US7462815B2 (en) * | 2005-12-13 | 2008-12-09 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Absolute encoder utilizing a code pattern carrier having a varying mixture of phosphors deposited thereon |
JP5087239B2 (ja) * | 2006-06-26 | 2012-12-05 | 株式会社ミツトヨ | 光電式エンコーダ |
JP4863803B2 (ja) | 2006-07-28 | 2012-01-25 | 株式会社ミツトヨ | 光学式エンコーダ |
JP4912801B2 (ja) * | 2006-09-11 | 2012-04-11 | オリンパス株式会社 | 光学式エンコーダ |
JP4976823B2 (ja) * | 2006-11-15 | 2012-07-18 | 株式会社ミツトヨ | 光学式エンコーダ |
WO2008089246A2 (en) * | 2007-01-17 | 2008-07-24 | University Of Florida Research Foundation, Inc. | Surface micromachined optical force sensor enhancement via compliant mechanisms |
US8783887B2 (en) | 2007-10-01 | 2014-07-22 | Intematix Corporation | Color tunable light emitting device |
DE102014112459B4 (de) * | 2014-08-29 | 2017-02-16 | Ic-Haus Gmbh | Optischer Positionsencoder |
TWI585372B (zh) * | 2016-02-05 | 2017-06-01 | 曾信得 | 光學掃描式導光編碼器 |
TWI633282B (zh) * | 2016-04-15 | 2018-08-21 | 曾信得 | 正向對焦掃描式導光編碼器 |
KR102041890B1 (ko) * | 2018-02-13 | 2019-11-27 | 한국표준과학연구원 | 절대 위치 측정 방법, 절대 위치 장치, 및 컬러 스케일 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10253395A (ja) * | 1997-03-06 | 1998-09-25 | Mitsutoyo Corp | 光電式エンコーダ |
JP2000018973A (ja) * | 1998-07-03 | 2000-01-21 | Mitsutoyo Corp | 光電式エンコーダ |
JP2002182546A (ja) * | 2000-12-15 | 2002-06-26 | Victor Co Of Japan Ltd | 光情報記録体、光情報記録体の情報記録方法、容器 |
WO2003048869A2 (en) * | 2001-11-30 | 2003-06-12 | Zebra Imaging Inc. | Pulsed-laser systems and methods for producing holographic stereograms |
JP2004271271A (ja) * | 2003-03-06 | 2004-09-30 | Harmonic Drive Syst Ind Co Ltd | 投影型ロータリエンコーダ |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2120880B (en) * | 1982-05-11 | 1985-11-06 | Barr & Stroud Ltd | Optical transducers |
GB8706317D0 (en) * | 1987-03-17 | 1987-04-23 | Bicc Plc | Optical sensor |
JPH07888Y2 (ja) * | 1988-02-22 | 1995-01-11 | 株式会社ミツトヨ | 光学式変位検出器 |
DE4337005C2 (de) * | 1993-10-29 | 2000-11-02 | Heidenhain Gmbh Dr Johannes | Längen- oder Winkelmeßeinrichtung |
ATE189057T1 (de) * | 1994-02-23 | 2000-02-15 | Heidenhain Gmbh Dr Johannes | Vorrichtung zum erzeugen von positionsabhängigen signalen |
GB9425907D0 (en) * | 1994-12-22 | 1995-02-22 | Renishaw Plc | Opto-electronic scale reading apparatus |
EP1046196B9 (en) * | 1998-09-28 | 2013-01-09 | Koninklijke Philips Electronics N.V. | Lighting system |
US6597006B1 (en) * | 2001-10-09 | 2003-07-22 | Kla-Tencor Technologies Corp. | Dual beam symmetric height systems and methods |
-
2004
- 2004-11-08 JP JP2004323206A patent/JP4880893B2/ja active Active
-
2005
- 2005-10-20 DE DE602005003539T patent/DE602005003539T2/de active Active
- 2005-10-20 EP EP05256502A patent/EP1657528B1/en active Active
- 2005-10-25 US US11/257,895 patent/US7265338B2/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10253395A (ja) * | 1997-03-06 | 1998-09-25 | Mitsutoyo Corp | 光電式エンコーダ |
JP2000018973A (ja) * | 1998-07-03 | 2000-01-21 | Mitsutoyo Corp | 光電式エンコーダ |
JP2002182546A (ja) * | 2000-12-15 | 2002-06-26 | Victor Co Of Japan Ltd | 光情報記録体、光情報記録体の情報記録方法、容器 |
WO2003048869A2 (en) * | 2001-11-30 | 2003-06-12 | Zebra Imaging Inc. | Pulsed-laser systems and methods for producing holographic stereograms |
JP2004271271A (ja) * | 2003-03-06 | 2004-09-30 | Harmonic Drive Syst Ind Co Ltd | 投影型ロータリエンコーダ |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010181181A (ja) * | 2009-02-03 | 2010-08-19 | Canon Inc | スケール、それを有する変位検出装置、及びそれを有する撮像装置 |
US8488131B2 (en) | 2009-02-03 | 2013-07-16 | Canon Kabushiki Kaisha | Scale, displacement detection apparatus provided with the same, and imaging apparatus provided with the same |
JP2011013093A (ja) * | 2009-07-01 | 2011-01-20 | Mitsutoyo Corp | 光電式エンコーダ |
JP2012225681A (ja) * | 2011-04-15 | 2012-11-15 | Mori Seiki Co Ltd | 光学式変位測定装置 |
KR20160056350A (ko) * | 2014-11-10 | 2016-05-20 | (주)금강오토텍 | 리니어 스케일 방식을 이용한 드롭 리프트 |
KR101667367B1 (ko) * | 2014-11-10 | 2016-10-20 | (주)금강오토텍 | 리니어 스케일 방식을 이용한 드롭 리프트 |
Also Published As
Publication number | Publication date |
---|---|
US7265338B2 (en) | 2007-09-04 |
EP1657528A1 (en) | 2006-05-17 |
DE602005003539D1 (de) | 2008-01-10 |
DE602005003539T2 (de) | 2008-04-17 |
JP4880893B2 (ja) | 2012-02-22 |
EP1657528B1 (en) | 2007-11-28 |
US20060097141A1 (en) | 2006-05-11 |
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