DE602005003539D1 - Photoelektrischer Lagegeber mit breitbandiger Lichtquelle und Schutzfilm auf Lichtempfangselement - Google Patents

Photoelektrischer Lagegeber mit breitbandiger Lichtquelle und Schutzfilm auf Lichtempfangselement

Info

Publication number
DE602005003539D1
DE602005003539D1 DE602005003539T DE602005003539T DE602005003539D1 DE 602005003539 D1 DE602005003539 D1 DE 602005003539D1 DE 602005003539 T DE602005003539 T DE 602005003539T DE 602005003539 T DE602005003539 T DE 602005003539T DE 602005003539 D1 DE602005003539 D1 DE 602005003539D1
Authority
DE
Germany
Prior art keywords
protective film
receiving element
position sensor
light source
light receiving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602005003539T
Other languages
English (en)
Other versions
DE602005003539T2 (de
Inventor
Tetsuro Kiriyama
Toru Yaku
Shingo Nihommori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Publication of DE602005003539D1 publication Critical patent/DE602005003539D1/de
Application granted granted Critical
Publication of DE602005003539T2 publication Critical patent/DE602005003539T2/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
DE602005003539T 2004-11-08 2005-10-20 Photoelektrischer Lagegeber mit breitbandiger Lichtquelle und Schutzfilm auf Lichtempfangselement Active DE602005003539T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004323206A JP4880893B2 (ja) 2004-11-08 2004-11-08 光電式エンコーダ
JP2004323206 2004-11-08

Publications (2)

Publication Number Publication Date
DE602005003539D1 true DE602005003539D1 (de) 2008-01-10
DE602005003539T2 DE602005003539T2 (de) 2008-04-17

Family

ID=35871229

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005003539T Active DE602005003539T2 (de) 2004-11-08 2005-10-20 Photoelektrischer Lagegeber mit breitbandiger Lichtquelle und Schutzfilm auf Lichtempfangselement

Country Status (4)

Country Link
US (1) US7265338B2 (de)
EP (1) EP1657528B1 (de)
JP (1) JP4880893B2 (de)
DE (1) DE602005003539T2 (de)

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US7435946B2 (en) * 2005-10-17 2008-10-14 Ricoh Company, Ltd. Mark detector using multiple light beams for use in a displacement detector and an image forming apparatus
US7462815B2 (en) * 2005-12-13 2008-12-09 Avago Technologies General Ip (Singapore) Pte. Ltd. Absolute encoder utilizing a code pattern carrier having a varying mixture of phosphors deposited thereon
JP5087239B2 (ja) * 2006-06-26 2012-12-05 株式会社ミツトヨ 光電式エンコーダ
JP4863803B2 (ja) 2006-07-28 2012-01-25 株式会社ミツトヨ 光学式エンコーダ
JP4912801B2 (ja) * 2006-09-11 2012-04-11 オリンパス株式会社 光学式エンコーダ
JP4976823B2 (ja) * 2006-11-15 2012-07-18 株式会社ミツトヨ 光学式エンコーダ
WO2008089246A2 (en) * 2007-01-17 2008-07-24 University Of Florida Research Foundation, Inc. Surface micromachined optical force sensor enhancement via compliant mechanisms
US8783887B2 (en) 2007-10-01 2014-07-22 Intematix Corporation Color tunable light emitting device
JP2010181181A (ja) * 2009-02-03 2010-08-19 Canon Inc スケール、それを有する変位検出装置、及びそれを有する撮像装置
JP5457742B2 (ja) * 2009-07-01 2014-04-02 株式会社ミツトヨ 光電式エンコーダ
JP5695478B2 (ja) * 2011-04-15 2015-04-08 Dmg森精機株式会社 光学式変位測定装置
DE102014112459B4 (de) * 2014-08-29 2017-02-16 Ic-Haus Gmbh Optischer Positionsencoder
KR101667367B1 (ko) * 2014-11-10 2016-10-20 (주)금강오토텍 리니어 스케일 방식을 이용한 드롭 리프트
TWI585372B (zh) * 2016-02-05 2017-06-01 曾信得 光學掃描式導光編碼器
TWI633282B (zh) * 2016-04-15 2018-08-21 曾信得 正向對焦掃描式導光編碼器
KR102041890B1 (ko) * 2018-02-13 2019-11-27 한국표준과학연구원 절대 위치 측정 방법, 절대 위치 장치, 및 컬러 스케일

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2120880B (en) * 1982-05-11 1985-11-06 Barr & Stroud Ltd Optical transducers
GB8706317D0 (en) * 1987-03-17 1987-04-23 Bicc Plc Optical sensor
JPH07888Y2 (ja) * 1988-02-22 1995-01-11 株式会社ミツトヨ 光学式変位検出器
DE4337005C2 (de) * 1993-10-29 2000-11-02 Heidenhain Gmbh Dr Johannes Längen- oder Winkelmeßeinrichtung
EP0669518B1 (de) * 1994-02-23 2000-01-19 Dr. Johannes Heidenhain GmbH Vorrichtung zum Erzeugen von positionsabhängigen Signalen
GB9425907D0 (en) * 1994-12-22 1995-02-22 Renishaw Plc Opto-electronic scale reading apparatus
JPH10253395A (ja) * 1997-03-06 1998-09-25 Mitsutoyo Corp 光電式エンコーダ
JP2000018973A (ja) * 1998-07-03 2000-01-21 Mitsutoyo Corp 光電式エンコーダ
ES2299260T5 (es) * 1998-09-28 2011-12-20 Koninklijke Philips Electronics N.V. Sistema de iluminación.
JP2002182546A (ja) * 2000-12-15 2002-06-26 Victor Co Of Japan Ltd 光情報記録体、光情報記録体の情報記録方法、容器
US6597006B1 (en) * 2001-10-09 2003-07-22 Kla-Tencor Technologies Corp. Dual beam symmetric height systems and methods
US6806982B2 (en) * 2001-11-30 2004-10-19 Zebra Imaging, Inc. Pulsed-laser systems and methods for producing holographic stereograms
JP4315323B2 (ja) * 2003-03-06 2009-08-19 株式会社ハーモニック・ドライブ・システムズ 投影型ロータリエンコーダ

Also Published As

Publication number Publication date
EP1657528A1 (de) 2006-05-17
DE602005003539T2 (de) 2008-04-17
JP2006133101A (ja) 2006-05-25
EP1657528B1 (de) 2007-11-28
US20060097141A1 (en) 2006-05-11
US7265338B2 (en) 2007-09-04
JP4880893B2 (ja) 2012-02-22

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