JP2006128650A5 - - Google Patents

Info

Publication number

JP2006128650A5

JP2006128650A5 JP2005278118A JP2005278118A JP2006128650A5 JP 2006128650 A5 JP2006128650 A5 JP 2006128650A5 JP 2005278118 A JP2005278118 A JP 2005278118A JP 2005278118 A JP2005278118 A JP 2005278118A JP 2006128650 A5 JP2006128650 A5 JP 2006128650A5

Authority

JP

Japan

Prior art keywords

electrode

forming

insulating film

gate

semiconductor region

Prior art date

2005-09-26

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

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• 239000004065 semiconductor Substances 0.000 claims 96
• 239000010410 layer Substances 0.000 claims 80
• 238000000034 method Methods 0.000 claims 56
• 230000003197 catalytic effect Effects 0.000 claims 41
• 238000005530 etching Methods 0.000 claims 40
• 238000004519 manufacturing process Methods 0.000 claims 21
• 239000012535 impurity Substances 0.000 claims 17
• 238000002425 crystallisation Methods 0.000 claims 16
• 230000008025 crystallization Effects 0.000 claims 16
• 238000010438 heat treatment Methods 0.000 claims 16
• 230000001737 promoting effect Effects 0.000 claims 16
• 239000011241 protective layer Substances 0.000 claims 16
• 239000000126 substance Substances 0.000 claims 16
• 239000000758 substrate Substances 0.000 claims 8
• PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 4
• XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims 4
• BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims 4
• 229910052797 bismuth Inorganic materials 0.000 claims 3
• JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 claims 3
• VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims 2
• ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims 2
• QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims 2
• 229910052804 chromium Inorganic materials 0.000 claims 2
• 239000011651 chromium Substances 0.000 claims 2
• 229910017052 cobalt Inorganic materials 0.000 claims 2
• 239000010941 cobalt Substances 0.000 claims 2
• GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims 2
• 229910052735 hafnium Inorganic materials 0.000 claims 2
• VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 claims 2
• 229910052750 molybdenum Inorganic materials 0.000 claims 2
• 239000011733 molybdenum Substances 0.000 claims 2
• 229910052759 nickel Inorganic materials 0.000 claims 2
• 229910052758 niobium Inorganic materials 0.000 claims 2
• 239000010955 niobium Substances 0.000 claims 2
• GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims 2
• 229910052697 platinum Inorganic materials 0.000 claims 2
• 229910052715 tantalum Inorganic materials 0.000 claims 2
• GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims 2
• WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 2
• 229910052721 tungsten Inorganic materials 0.000 claims 2
• 239000010937 tungsten Substances 0.000 claims 2
• 239000011787 zinc oxide Substances 0.000 claims 2
• 229910052726 zirconium Inorganic materials 0.000 claims 2
• HBGPNLPABVUVKZ-POTXQNELSA-N (1r,3as,4s,5ar,5br,7r,7ar,11ar,11br,13as,13br)-4,7-dihydroxy-3a,5a,5b,8,8,11a-hexamethyl-1-prop-1-en-2-yl-2,3,4,5,6,7,7a,10,11,11b,12,13,13a,13b-tetradecahydro-1h-cyclopenta[a]chrysen-9-one Chemical compound C([C@@]12C)CC(=O)C(C)(C)[C@@H]1[C@H](O)C[C@]([C@]1(C)C[C@@H]3O)(C)[C@@H]2CC[C@H]1[C@@H]1[C@]3(C)CC[C@H]1C(=C)C HBGPNLPABVUVKZ-POTXQNELSA-N 0.000 claims 1
• PFRGGOIBYLYVKM-UHFFFAOYSA-N 15alpha-hydroxylup-20(29)-en-3-one Natural products CC(=C)C1CCC2(C)CC(O)C3(C)C(CCC4C5(C)CCC(=O)C(C)(C)C5CCC34C)C12 PFRGGOIBYLYVKM-UHFFFAOYSA-N 0.000 claims 1
• RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
• GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims 1
• OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims 1
• SOKRNBGSNZXYIO-UHFFFAOYSA-N Resinone Natural products CC(=C)C1CCC2(C)C(O)CC3(C)C(CCC4C5(C)CCC(=O)C(C)(C)C5CCC34C)C12 SOKRNBGSNZXYIO-UHFFFAOYSA-N 0.000 claims 1
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
• RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
• 229910052787 antimony Inorganic materials 0.000 claims 1
• WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 claims 1
• 229910052785 arsenic Inorganic materials 0.000 claims 1
• RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 claims 1
• 229910052802 copper Inorganic materials 0.000 claims 1
• 239000010949 copper Substances 0.000 claims 1
• 229910021419 crystalline silicon Inorganic materials 0.000 claims 1
• 229910052733 gallium Inorganic materials 0.000 claims 1
• RHZWSUVWRRXEJF-UHFFFAOYSA-N indium tin Chemical compound [In].[Sn] RHZWSUVWRRXEJF-UHFFFAOYSA-N 0.000 claims 1
• AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims 1
• 238000009413 insulation Methods 0.000 claims 1
• 230000001678 irradiating effect Effects 0.000 claims 1
• 229910052698 phosphorus Inorganic materials 0.000 claims 1
• 239000011574 phosphorus Substances 0.000 claims 1
• 229910001392 phosphorus oxide Inorganic materials 0.000 claims 1
• 239000011347 resin Substances 0.000 claims 1
• 229920005989 resin Polymers 0.000 claims 1
• 229910052814 silicon oxide Inorganic materials 0.000 claims 1
• VSAISIQCTGDGPU-UHFFFAOYSA-N tetraphosphorus hexaoxide Chemical compound O1P(O2)OP3OP1OP2O3 VSAISIQCTGDGPU-UHFFFAOYSA-N 0.000 claims 1
• 229910052719 titanium Inorganic materials 0.000 claims 1
• 239000010936 titanium Substances 0.000 claims 1
• YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 claims 1