JP2006121109A - ウエハレベルパッケージの製造方法 - Google Patents
ウエハレベルパッケージの製造方法 Download PDFInfo
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- JP2006121109A JP2006121109A JP2006002842A JP2006002842A JP2006121109A JP 2006121109 A JP2006121109 A JP 2006121109A JP 2006002842 A JP2006002842 A JP 2006002842A JP 2006002842 A JP2006002842 A JP 2006002842A JP 2006121109 A JP2006121109 A JP 2006121109A
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- JP
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- Prior art keywords
- wafer
- gasket
- bonding material
- level package
- pad
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 11
- 239000000463 material Substances 0.000 claims abstract description 68
- 235000012431 wafers Nutrition 0.000 claims description 83
- 238000000034 method Methods 0.000 claims description 25
- 229910052710 silicon Inorganic materials 0.000 claims description 10
- 239000010703 silicon Substances 0.000 claims description 10
- 239000004642 Polyimide Substances 0.000 claims description 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 5
- 239000010931 gold Substances 0.000 claims description 5
- 229910052737 gold Inorganic materials 0.000 claims description 5
- 229920001721 polyimide Polymers 0.000 claims description 5
- 239000002318 adhesion promoter Substances 0.000 claims description 4
- 239000011521 glass Substances 0.000 claims description 4
- JVPLOXQKFGYFMN-UHFFFAOYSA-N gold tin Chemical compound [Sn].[Au] JVPLOXQKFGYFMN-UHFFFAOYSA-N 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- ZMLDXWLZKKZVSS-UHFFFAOYSA-N palladium tin Chemical compound [Pd].[Sn] ZMLDXWLZKKZVSS-UHFFFAOYSA-N 0.000 claims description 2
- LQBJWKCYZGMFEV-UHFFFAOYSA-N lead tin Chemical compound [Sn].[Pb] LQBJWKCYZGMFEV-UHFFFAOYSA-N 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 238000005304 joining Methods 0.000 description 6
- 238000007789 sealing Methods 0.000 description 6
- 238000005530 etching Methods 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 229910001128 Sn alloy Inorganic materials 0.000 description 3
- 238000000708 deep reactive-ion etching Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- NFFIWVVINABMKP-UHFFFAOYSA-N methylidynetantalum Chemical compound [Ta]#C NFFIWVVINABMKP-UHFFFAOYSA-N 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 238000001020 plasma etching Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 229910003468 tantalcarbide Inorganic materials 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000012811 non-conductive material Substances 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910001174 tin-lead alloy Inorganic materials 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012536 packaging technology Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000003079 width control Methods 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/0032—Packages or encapsulation
- B81B7/0077—Other packages not provided for in groups B81B7/0035 - B81B7/0074
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/02—Containers; Seals
- H01L23/10—Containers; Seals characterised by the material or arrangement of seals between parts, e.g. between cap and base of the container or between leads and walls of the container
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01079—Gold [Au]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/095—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00 with a principal constituent of the material being a combination of two or more materials provided in the groups H01L2924/013 - H01L2924/0715
- H01L2924/097—Glass-ceramics, e.g. devitrified glass
- H01L2924/09701—Low temperature co-fired ceramic [LTCC]
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Micromachines (AREA)
Abstract
【解決手段】 第一のウエハ203及び第二のウエハ207を提供するステップと、第一のウエハ203の一部を除去することによりガスケット201を形成するステップと、第二のウエハ207にガスケット201と実質的に整合するパッド305を提供するステップと、ガスケット201とパッド305の間に接合材料301を配設するステップと、そして接合材料301によりガスケット201とパッド305を接合し第一のウエハ203及び第二のウエハ207の間に気密封止環境を形成するステップとを含む、ウエハレベルパッケージの製造方法を採用した。
【選択図】 図4
Description
203 第一のウエハ
207 第二のウエハ
209 接合材料
211 気密封止環境
301 導電性接合材料
305 パッド
401 非導電性接合材料
Claims (11)
- ウエハレベルパッケージを製造する方法であって、第一のウエハ及び第二のウエハを提供するステップと、前記第一のウエハの一部を除去することにより、ガスケットを形成するステップと、前記第二のウエハに、前記ガスケットと実質的に整合するパッドを提供するステップと、前記ガスケットと前記パッドの間に接合材料を配設するステップと、そして前記接合材料により前記ガスケットと前記パッドを接合し、前記第一及び第二のウエハ間に気密封止環境を形成するステップとを含む方法。
- 前記第一のウエハがシリコンから成ることを特徴とする請求項1に記載の方法。
- 前記ガスケットの幅が、20μm以下であることを特徴とする請求項2に記載の方法。
- 前記ガスケットの幅が、10μm以下であることを特徴とする請求項3に記載の方法。
- 前記接合材料を配設するステップが、前記接合材料を前記ガスケット上に設けることを含むことを特徴とする請求項3に記載の方法。
- 前記接合材料を挿入するステップが、前記接合材料を前記パッド上に設けることを含むことを特徴とする請求項3に記載の方法。
- 前記接合材料が、導電性接合材料を含むことを特徴とする請求項3に記載の方法。
- 前記導電性接合材料が、金、金−錫、錫−鉛、及びパラジウム−錫のグループから選択された金属であることを特徴とする請求項7に記載の方法。
- 前記接合材料が、非導電性接合材料を含むことを特徴とする請求項3に記載の方法。
- 前記非導電性接合材料が、ポリイミド、B段階ビスベンゾサイクロブタン及びガラスのグループから選択された材料であることを特徴とする請求項9に記載の方法。
- 前記接合材料を挿入するステップの後に、接着助触媒を前記ガスケットと前記パッドの間に挿入するステップを含むことを特徴とする請求項10に記載の方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/028,058 US6787897B2 (en) | 2001-12-20 | 2001-12-20 | Wafer-level package with silicon gasket |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2002366119A Division JP4768952B2 (ja) | 2001-12-20 | 2002-12-18 | シリコンガスケットを含むウエハレベルパッケージおよびその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006121109A true JP2006121109A (ja) | 2006-05-11 |
JP4567607B2 JP4567607B2 (ja) | 2010-10-20 |
Family
ID=21841336
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2002366119A Expired - Fee Related JP4768952B2 (ja) | 2001-12-20 | 2002-12-18 | シリコンガスケットを含むウエハレベルパッケージおよびその製造方法 |
JP2006002842A Expired - Fee Related JP4567607B2 (ja) | 2001-12-20 | 2006-01-10 | ウエハレベルパッケージの製造方法 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2002366119A Expired - Fee Related JP4768952B2 (ja) | 2001-12-20 | 2002-12-18 | シリコンガスケットを含むウエハレベルパッケージおよびその製造方法 |
Country Status (3)
Country | Link |
---|---|
US (2) | US6787897B2 (ja) |
JP (2) | JP4768952B2 (ja) |
DE (1) | DE10241344B4 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7679181B2 (en) | 2007-06-15 | 2010-03-16 | Mitsubishi Electric Corporation | Semiconductor device |
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- 2002-12-18 JP JP2002366119A patent/JP4768952B2/ja not_active Expired - Fee Related
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Also Published As
Publication number | Publication date |
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US20030116825A1 (en) | 2003-06-26 |
JP4768952B2 (ja) | 2011-09-07 |
JP4567607B2 (ja) | 2010-10-20 |
DE10241344B4 (de) | 2007-10-25 |
US20040029360A1 (en) | 2004-02-12 |
US6787897B2 (en) | 2004-09-07 |
DE10241344A1 (de) | 2003-07-10 |
JP2003204005A (ja) | 2003-07-18 |
US6979597B2 (en) | 2005-12-27 |
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