JP2006114498A - 有機電界発光表示装置及び有機電界発光表示装置の製造方法 - Google Patents
有機電界発光表示装置及び有機電界発光表示装置の製造方法 Download PDFInfo
- Publication number
- JP2006114498A JP2006114498A JP2005296684A JP2005296684A JP2006114498A JP 2006114498 A JP2006114498 A JP 2006114498A JP 2005296684 A JP2005296684 A JP 2005296684A JP 2005296684 A JP2005296684 A JP 2005296684A JP 2006114498 A JP2006114498 A JP 2006114498A
- Authority
- JP
- Japan
- Prior art keywords
- light emitting
- via hole
- layer
- forming
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 20
- 239000010408 film Substances 0.000 claims abstract description 94
- 239000010409 thin film Substances 0.000 claims abstract description 21
- 239000000758 substrate Substances 0.000 claims abstract description 17
- 238000000034 method Methods 0.000 claims description 16
- 238000002347 injection Methods 0.000 claims description 12
- 239000007924 injection Substances 0.000 claims description 12
- 239000004065 semiconductor Substances 0.000 claims description 12
- 238000005401 electroluminescence Methods 0.000 claims 1
- 239000010410 layer Substances 0.000 description 76
- 239000012044 organic layer Substances 0.000 description 6
- 230000001681 protective effect Effects 0.000 description 6
- 239000011347 resin Substances 0.000 description 6
- 229920005989 resin Polymers 0.000 description 6
- 238000000059 patterning Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- 230000005525 hole transport Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- UMIVXZPTRXBADB-UHFFFAOYSA-N benzocyclobutene Chemical compound C1=CC=C2CCC2=C1 UMIVXZPTRXBADB-UHFFFAOYSA-N 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 239000011229 interlayer Substances 0.000 description 2
- 238000002161 passivation Methods 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 1
- OMIHGPLIXGGMJB-UHFFFAOYSA-N 7-oxabicyclo[4.1.0]hepta-1,3,5-triene Chemical class C1=CC=C2OC2=C1 OMIHGPLIXGGMJB-UHFFFAOYSA-N 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000265 Polyparaphenylene Polymers 0.000 description 1
- 239000004734 Polyphenylene sulfide Substances 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910004205 SiNX Inorganic materials 0.000 description 1
- 229910020286 SiOxNy Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229920001568 phenolic resin Polymers 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 229920006122 polyamide resin Polymers 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 239000002952 polymeric resin Substances 0.000 description 1
- -1 polyphenylene Polymers 0.000 description 1
- 229920000069 polyphenylene sulfide Polymers 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- LZOZLBFZGFLFBV-UHFFFAOYSA-N sulfene Chemical compound C=S(=O)=O LZOZLBFZGFLFBV-UHFFFAOYSA-N 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 229920006305 unsaturated polyester Polymers 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/12—Light sources with substantially two-dimensional radiating surfaces
- H05B33/26—Light sources with substantially two-dimensional radiating surfaces characterised by the composition or arrangement of the conductive material used as an electrode
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/805—Electrodes
- H10K50/81—Anodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/805—Electrodes
- H10K50/82—Cathodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/805—Electrodes
- H10K50/82—Cathodes
- H10K50/822—Cathodes characterised by their shape
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K2102/00—Constructional details relating to the organic devices covered by this subclass
- H10K2102/301—Details of OLEDs
- H10K2102/341—Short-circuit prevention
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K2102/00—Constructional details relating to the organic devices covered by this subclass
- H10K2102/301—Details of OLEDs
- H10K2102/351—Thickness
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/122—Pixel-defining structures or layers, e.g. banks
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/80—Constructional details
- H10K59/805—Electrodes
- H10K59/8052—Cathodes
- H10K59/80521—Cathodes characterised by their shape
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/60—Forming conductive regions or layers, e.g. electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/621—Providing a shape to conductive layers, e.g. patterning or selective deposition
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Electroluminescent Light Sources (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Thin Film Transistor (AREA)
Abstract
【解決手段】 本発明による有機電界発光表示装置は,基板上に形成される薄膜トランジスタと,上記薄膜トランジスタ上に形成され,ビアホール245を有する絶縁膜と,上記絶縁膜上に形成され,上記ビアホールを介して上記薄膜トランジスタのドレイン電極に連結される画素電極と,上記画素電極上に形成される発光層と,上記発光層上に形成され,少なくとも上記ビアホールの上部領域を露出させる対向電極265パターンと,を備える。
【選択図】 図3c
Description
200 基板
210 半導体層
220 ゲート電極
230a ソース電極
230b ドレイン電極
235 保護膜
240 平坦化膜
245 ビアホール
250 画素電極
255 画素定義膜
260 発光層
265 対向電極
Claims (15)
- 基板上に形成される薄膜トランジスタと;
前記薄膜トランジスタ上に形成され,ビアホールを有する絶縁膜と;
前記絶縁膜上に形成され,前記ビアホールを介して前記薄膜トランジスタのドレイン電極に連結される画素電極と;
前記画素電極上に形成される発光層と;
前記発光層上に形成され,少なくとも前記ビアホールの上部領域を露出させる対向電極パターンと;
を備えることを特徴とする,有機電界発光表示装置。 - 前記画素電極上に形成され,前記画素電極の一部を露出させる開口部を有し且つ前記ビアホールの上部を覆う画素定義膜をさらに備えることを特徴とする,請求項1に記載の有機電界発光表示装置。
- 前記画素定義膜は,3000Å以下の厚みを有することを特徴とする,請求項2に記載の有機電界発光表示装置。
- 前記画素定義膜は,1500Å以上の厚みを有することを特徴とする,請求項3に記載の有機電界発光表示装置。
- 前記絶縁膜は,無機膜,有機膜,またはこれらの二重層であることを特徴とする,請求項1に記載の有機電界発光表示装置。
- 基板上に,半導体層,ゲート電極,ソース電極,およびドレイン電極を含む薄膜トランジスタを形成する段階と;
前記薄膜トランジスタ上に絶縁膜を形成する段階と;
前記絶縁膜に,前記ソース電極又は前記ドレイン電極の一部を露出させるビアホールを形成する段階と;
前記ビアホールを介して前記ソース電極又は前記ドレイン電極に連結されるように画素電極を形成する段階と;
前記画素電極上に発光層を形成する段階と;
前記発光層上に,前記ビアホールの上部領域を露出させる対向電極パターンを形成する段階と;
を含むことを特徴とする,有機電界発光表示装置の製造方法。 - 前記対向電極パターンを形成する段階は,ストライプ状のマスクを用いて形成することを特徴とする,請求項6に記載の有機電界発光表示装置の製造方法。
- 前記対向電極パターンを形成する段階は,スロット状のマスクを用いて形成することを特徴とする,請求項6に記載の有機電界発光表示装置の製造方法。
- 前記対向電極は,少なくとも前記ビアホールに対応する部分がパターニングされたマスクを用いて形成することを特徴とする,請求項6に記載の有機電界発光表示装置の製造方法。
- 前記発光層を形成する前に,前記画素電極上に,該画素電極の一部領域を露出させる開口部を有し且つ前記ビアホールの上部を覆う画素定義膜を形成する段階をさらに含むことを特徴とする,請求項6に記載の有機電界発光表示装置の製造方法。
- 前記画素定義膜は,3000Å以下の厚みを有するように形成することを特徴とする,請求項10に記載の有機電界発光表示装置の製造方法。
- 前記画素定義膜は,1500Å以上の厚みを有するように形成することを特徴とする,請求項11に記載の有機電界発光表示装置の製造方法。
- 前記絶縁膜を形成する段階は,無機膜,有機膜,またはこれらの二重層であることを特徴とする,請求項6に記載の有機電界発光表示装置の製造方法。
- 前記発光層は,レーザ熱転写法を用いて形成することを特徴とする,請求項6に記載の有機電界発光表示装置の製造方法。
- 前記発光層を形成する段階の前後に,電荷注入層又は電荷輸送層を形成する段階をさらに含むことを特徴とする,請求項6に記載の有機電界発光表示装置の製造方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020040081103A KR100685404B1 (ko) | 2004-10-11 | 2004-10-11 | 유기전계발광표시장치 및 그 제조방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006114498A true JP2006114498A (ja) | 2006-04-27 |
JP4461300B2 JP4461300B2 (ja) | 2010-05-12 |
Family
ID=36180073
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005296684A Active JP4461300B2 (ja) | 2004-10-11 | 2005-10-11 | 有機電界発光表示装置及び有機電界発光表示装置の製造方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US8004176B2 (ja) |
JP (1) | JP4461300B2 (ja) |
KR (1) | KR100685404B1 (ja) |
CN (1) | CN100426518C (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011233502A (ja) * | 2010-04-26 | 2011-11-17 | Samsung Mobile Display Co Ltd | 有機発光ディスプレイ装置 |
JP2014123628A (ja) * | 2012-12-20 | 2014-07-03 | Japan Display Inc | 有機エレクトロルミネッセンス表示装置及び有機エレクトロルミネッセンス表示装置の製造方法 |
US8922463B2 (en) | 2010-04-26 | 2014-12-30 | Samsung Display Co., Ltd. | Organic light-emitting display apparatus |
JP2020197725A (ja) * | 2009-12-18 | 2020-12-10 | 株式会社半導体エネルギー研究所 | 表示パネル |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20050112456A (ko) * | 2004-05-25 | 2005-11-30 | 삼성에스디아이 주식회사 | 유기전계발광표시장치 및 그의 제조방법 |
KR100669778B1 (ko) * | 2004-11-20 | 2007-01-16 | 삼성에스디아이 주식회사 | 기판 및 박막 트랜지스터를 구비한 기판 |
KR100830318B1 (ko) * | 2007-04-12 | 2008-05-16 | 삼성에스디아이 주식회사 | 발광표시장치 및 그의 제조방법 |
KR101108164B1 (ko) * | 2010-02-03 | 2012-02-06 | 삼성모바일디스플레이주식회사 | 유기 발광 표시 장치 |
KR101084198B1 (ko) * | 2010-02-24 | 2011-11-17 | 삼성모바일디스플레이주식회사 | 유기 발광 표시 장치 |
WO2013175913A1 (ja) * | 2012-05-22 | 2013-11-28 | シャープ株式会社 | 有機el装置及び有機el装置の製造方法 |
KR101939366B1 (ko) * | 2012-09-11 | 2019-01-17 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 |
US9088003B2 (en) * | 2013-03-06 | 2015-07-21 | Apple Inc. | Reducing sheet resistance for common electrode in top emission organic light emitting diode display |
KR102096887B1 (ko) * | 2013-05-30 | 2020-04-06 | 삼성디스플레이 주식회사 | 유기발광 표시장치 및 그것의 제조 방법 |
CN104952905A (zh) * | 2015-05-06 | 2015-09-30 | 京东方科技集团股份有限公司 | 有机发光显示面板及其制备方法、显示装置 |
DE102015119653A1 (de) * | 2015-11-13 | 2017-05-18 | Osram Opto Semiconductors Gmbh | Modul für eine Videowand |
CN105870197A (zh) * | 2016-04-21 | 2016-08-17 | 京东方科技集团股份有限公司 | 薄膜晶体管及制备方法、阵列基板、显示装置 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2848371B2 (ja) * | 1997-02-21 | 1999-01-20 | 日本電気株式会社 | 有機el表示装置及びその製造方法 |
JPH10239698A (ja) * | 1997-02-25 | 1998-09-11 | Sharp Corp | 液晶表示装置 |
JP2002202737A (ja) | 2000-12-28 | 2002-07-19 | Nec Corp | 発光素子の製造方法、発光素子 |
JP2002215063A (ja) * | 2001-01-19 | 2002-07-31 | Sony Corp | アクティブマトリクス型表示装置 |
JP4801278B2 (ja) * | 2001-04-23 | 2011-10-26 | 株式会社半導体エネルギー研究所 | 発光装置及びその作製方法 |
KR100656490B1 (ko) * | 2001-11-26 | 2006-12-12 | 삼성에스디아이 주식회사 | 풀칼라 유기전계 발광표시소자 및 그의 제조방법 |
KR100478522B1 (ko) * | 2001-11-28 | 2005-03-28 | 삼성에스디아이 주식회사 | 유기 화합물 유도체막층을 포함하고 있는 고분자 유기전계 발광 소자 및 그 제조 방법 |
JP4310984B2 (ja) | 2002-02-06 | 2009-08-12 | 株式会社日立製作所 | 有機発光表示装置 |
KR100469252B1 (ko) * | 2002-04-12 | 2005-02-02 | 엘지전자 주식회사 | 쉐도우 마스크 및 그를 이용한 풀칼라 유기 el 표시소자 |
US6727645B2 (en) * | 2002-05-24 | 2004-04-27 | International Business Machines Corporation | Organic LED device |
JP4640690B2 (ja) | 2002-07-24 | 2011-03-02 | 日本電気株式会社 | アクティブマトリクス有機el表示装置の製造方法 |
JP4171258B2 (ja) | 2002-07-25 | 2008-10-22 | 三洋電機株式会社 | 有機elパネル |
JP2004127719A (ja) * | 2002-10-02 | 2004-04-22 | Nippon Hoso Kyokai <Nhk> | 透明導電性フィルム及び表示装置 |
TWI228687B (en) | 2003-01-22 | 2005-03-01 | Toppoly Optoelectronics Corp | Active-type organic electroluminescent display and fabrication method thereof |
TWI298234B (en) * | 2006-02-23 | 2008-06-21 | Ind Tech Res Inst | A structure and method for improving contact resistance in an organic light emitting diode integrated with a color filter |
-
2004
- 2004-10-11 KR KR1020040081103A patent/KR100685404B1/ko active IP Right Grant
-
2005
- 2005-10-11 CN CNB2005101291880A patent/CN100426518C/zh active Active
- 2005-10-11 JP JP2005296684A patent/JP4461300B2/ja active Active
- 2005-10-11 US US11/247,991 patent/US8004176B2/en active Active
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020197725A (ja) * | 2009-12-18 | 2020-12-10 | 株式会社半導体エネルギー研究所 | 表示パネル |
JP2011233502A (ja) * | 2010-04-26 | 2011-11-17 | Samsung Mobile Display Co Ltd | 有機発光ディスプレイ装置 |
JP2013051208A (ja) * | 2010-04-26 | 2013-03-14 | Samsung Display Co Ltd | 有機発光ディスプレイ装置 |
US8922463B2 (en) | 2010-04-26 | 2014-12-30 | Samsung Display Co., Ltd. | Organic light-emitting display apparatus |
JP2015015252A (ja) * | 2010-04-26 | 2015-01-22 | 三星ディスプレイ株式會社Samsung Display Co.,Ltd. | 有機発光ディスプレイ装置 |
JP2016146351A (ja) * | 2010-04-26 | 2016-08-12 | 三星ディスプレイ株式會社Samsung Display Co.,Ltd. | 有機発光ディスプレイ装置 |
JP2014123628A (ja) * | 2012-12-20 | 2014-07-03 | Japan Display Inc | 有機エレクトロルミネッセンス表示装置及び有機エレクトロルミネッセンス表示装置の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
KR20060032090A (ko) | 2006-04-14 |
JP4461300B2 (ja) | 2010-05-12 |
KR100685404B1 (ko) | 2007-02-22 |
US20060082292A1 (en) | 2006-04-20 |
US8004176B2 (en) | 2011-08-23 |
CN1773721A (zh) | 2006-05-17 |
CN100426518C (zh) | 2008-10-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4461300B2 (ja) | 有機電界発光表示装置及び有機電界発光表示装置の製造方法 | |
JP4149991B2 (ja) | 回路測定用パッドを含む有機エレクトロルミネッセンス表示装置とその製造方法 | |
JP4396941B2 (ja) | 有機エレクトロルミネッセンス表示装置及びその製造方法 | |
JP4690187B2 (ja) | 有機電界発光表示素子及びその製造方法 | |
JP4608170B2 (ja) | アクティブ駆動型有機el表示装置およびその製造方法 | |
US20210029446A1 (en) | Organic light-emitting diode display device and method of manufacturing the same | |
JP4542659B2 (ja) | アクティブ駆動型有機el表示装置およびその製造方法 | |
KR100659765B1 (ko) | 유기전계발광표시장치 및 그 제조방법 | |
KR100833772B1 (ko) | 유기 전계 발광 표시 장치 및 그 제조 방법 | |
US8604688B2 (en) | Organic light-emitting display device and method of fabricating the same | |
US9711750B1 (en) | Method of forming a conductive pattern and method of manufacturing an organic light-emitting display including the same | |
JP5372337B2 (ja) | 有機薄膜トランジスタ基板及びその製造方法、並びに、画像表示パネル及びその製造方法 | |
KR20170074252A (ko) | 투명 표시 장치 | |
US9547252B2 (en) | Organic light emitting device | |
CN104465698A (zh) | 用于制造显示设备的方法与系统 | |
KR20160091529A (ko) | 유기 발광 표시 장치 및 그 제조 방법 | |
KR20190027985A (ko) | 표시 장치 및 이의 제조 방법 | |
JP2008130363A (ja) | 有機el素子およびその製造方法、ならびに有機elディスプレイおよびその製造方法 | |
KR100531294B1 (ko) | 유기 el 소자 및 그 제조 방법 | |
JP2004031335A (ja) | 発光装置及びその作製方法 | |
JP4918633B1 (ja) | 有機エレクトロルミネッセンスデバイスおよび有機エレクトロルミネッセンスデバイスの製造方法 | |
KR100700499B1 (ko) | 유기전계발광표시장치 및 그 제조방법 | |
KR101392162B1 (ko) | 표시 기판 및 이의 제조 방법 | |
KR100611770B1 (ko) | 유기전계발광표시장치 및 그 제조방법 | |
JP5463619B2 (ja) | 導電膜の形成方法、トランジスタ、および有機エレクトロルミネッセンス素子 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20081126 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20081202 |
|
A711 | Notification of change in applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A712 Effective date: 20081209 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20090302 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20090421 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20090821 |
|
A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20090902 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20100112 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
RD03 | Notification of appointment of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7423 Effective date: 20100201 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20100201 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130226 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 Ref document number: 4461300 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130226 Year of fee payment: 3 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313111 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130226 Year of fee payment: 3 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140226 Year of fee payment: 4 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |