JP2006099063A - 干渉変調のための方法及び支柱構造 - Google Patents
干渉変調のための方法及び支柱構造 Download PDFInfo
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
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Abstract
【解決手段】干渉変調器は、光学要素を備えた支柱構造を含む。好適な実施例では、支柱構造内の光学要素は、例えばミラーのような反射要素である。別の実施例では、支柱構造内の光学要素は、例えばダークエタロンのようなエタロンである。支柱構造内の光学要素は、支柱構造から逆反射する光の量を減少させる。種々の実施例において、支柱構造内の光学要素は、光を干渉キャビティにリダイレクトすることによって干渉変調器の明るさを増大させる。例えば、ある実施例では、支柱構造内の光学要素は、干渉変調器のバックライトニングを増加させる。
【選択図】図7A
Description
Claims (29)
- 支柱構造を備えた干渉変調器であって、前記支柱構造は光学要素を含む。
- 請求項1に記載の干渉変調器において、前記光学要素は、エタロンからなる一つのミラーを含む。
- 請求項2に記載の干渉変調器において、前記エタロンはダークエタロンである。
- 請求項1に記載の干渉変調器において、前記光学要素は、光を屈折するように構成されている。
- 請求項1に記載の干渉変調器において、前記光学要素は、光を反射するように構成されている。
- 請求項1に記載の干渉変調器において、前記光学要素は、光を散乱するように構成されている。
- 請求項1に記載の干渉変調器において、前記光学要素は、反射面を備えている。
- 請求項7に記載の干渉変調器において、前記反射面は、前記干渉変調器の干渉キャビティに光を導くように構成されている。
- 請求項8に記載の干渉変調器において、前記反射面は、前記干渉変調器のバックライトニングを増大させるように構成されている。
- 請求項8に記載の干渉変調器において、前記支柱構造は更にダークエタロンを含む。
- 請求項8に記載の干渉変調器において、前記反射面は、前記干渉変調器の明るさを増大させるように構成されている。
- 請求項1に記載の干渉変調器において更に、光学キャビティを定義する第一のミラー及び移動可能な第二のミラーを備え、前記第一及び第二のミラーのうちの少なくとも一つは前記支柱構造によって支えられる。
- 干渉変調器を作る方法であって、
反射層を基板上に堆積して第一のミラーを形成することと、
前記第一のミラーの上に犠牲層を堆積することと、
前記犠牲層の中にアパチャーを形成することと、
前記アパチャーの中に支柱材料を堆積することと、
前記支柱材料の上に光学要素を形成することと、
移動可能な第二のミラーを、前記犠牲層と前記光学要素との上に形成することと、
前記犠牲層を取り除き、もって、干渉キャビティを形成することとを備える。 - 請求項13に記載の方法において、前記光学要素を形成することは、テーパエッチングを含む。
- 請求項13に記載の方法において、前記光学要素を形成することは、反射体、エタロン、又はマイクロレンズを形成することを含む。
- 請求項13に記載の方法において更に、前記光学要素の上に追加の支柱材料を堆積することを含む。
- 請求項13乃至16のうちの何れかの方法によって作られる干渉変調器。
- 干渉変調器であって、
光を反射し、光学干渉を生成する第一及び第二の反射手段を備え、前記第二の反射手段は、前記第一の反射手段に対して移動可能であり、
前記第一及び第二の反射手段が分離するように前記第二の反射手段を支える手段を備え、
前記支える手段は、その中に、前記支える手段に入る光を操作する手段を含む。 - 請求項18に記載の干渉変調器であって、前記第一及び第二の反射手段は、少なくとも部分的に反射する面を備える。
- 請求項18又は請求項19に記載の干渉変調器であって、前記支える手段は、少なくとも一つの支柱構造を含む。
- 請求項18又は請求項19又は請求項20に記載の干渉変調器において、前記操作する手段は、光学要素を含む。
- 請求項1乃至12及び請求項17乃至21のうちの何れかの干渉変調器を備えたディスプレイ装置であって更に、
画像データを処理するように構成され、前記干渉変調器と電気的に通信するプロセッサと、
前記プロセッサと電気的に通信するメモリ装置とを備える。 - 請求項22に記載の装置において更に、
少なくとも一つの信号を前記少なくとも一つのディスプレイに送るように構成された第一のコントローラと、
前記画像データの少なくとも一部を前記第一のコントローラに送るように構成された第二のコントローラとを備える。 - 請求項23に記載の装置において更に、
前記画像データを前記プロセッサに送るように構成された画像ソースモジュールを備える。 - 請求項24に記載の装置において、
前記画像ソースモジュールは、受信機、トランシーバ、及び送信機のうちの少なくとも一つを備える。 - 請求項22に記載の装置において更に、
入力データを受信し、前記入力データを前記プロセッサに通信するように構成された入力装置を備える。 - 光を変調する方法であって、
第一及び第二の反射面へ伝播された光を反射して、光学的干渉を生成することであって、前記第二の反射面は、少なくとも一つの支柱構造によって支えられていることと、
前記支柱構造に伝播された光を操作することと、
前記第一の反射面に対して前記第二の反射面を移動させることによって、前記光学干渉に影響を与えることとを備える。 - 請求項27に記載の方法において、前記光を操作することは、前記第一及び第二の反射面のうちの少なくとも一つに前記光を導くことを含む。
- 請求項27に記載の方法において、前記光を操作することは、前記第一及び第二の反射面のうちの少なくとも一つに前記光を反射することを含む。
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US61347104P | 2004-09-27 | 2004-09-27 | |
US11/052,004 US7349141B2 (en) | 2004-09-27 | 2005-02-04 | Method and post structures for interferometric modulation |
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JP2006099063A true JP2006099063A (ja) | 2006-04-13 |
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US (2) | US7349141B2 (ja) |
EP (1) | EP1640780A3 (ja) |
JP (1) | JP2006099063A (ja) |
KR (1) | KR20060089610A (ja) |
AU (1) | AU2005203345A1 (ja) |
BR (1) | BRPI0503868A (ja) |
CA (1) | CA2517089A1 (ja) |
MX (1) | MXPA05009399A (ja) |
RU (1) | RU2005129901A (ja) |
SG (1) | SG121089A1 (ja) |
TW (1) | TW200628834A (ja) |
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KR20060089610A (ko) | 2006-08-09 |
RU2005129901A (ru) | 2007-04-10 |
US7349141B2 (en) | 2008-03-25 |
CA2517089A1 (en) | 2006-03-27 |
EP1640780A3 (en) | 2008-03-26 |
US20060077509A1 (en) | 2006-04-13 |
US7719747B2 (en) | 2010-05-18 |
US20080180777A1 (en) | 2008-07-31 |
BRPI0503868A (pt) | 2006-05-09 |
SG121089A1 (en) | 2006-04-26 |
TW200628834A (en) | 2006-08-16 |
EP1640780A2 (en) | 2006-03-29 |
MXPA05009399A (es) | 2006-03-29 |
AU2005203345A1 (en) | 2006-04-13 |
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