JP2006096977A - 研磨スラリー、情報記録媒体用ガラス基板の製造方法、及び情報記録媒体の製造方法 - Google Patents
研磨スラリー、情報記録媒体用ガラス基板の製造方法、及び情報記録媒体の製造方法 Download PDFInfo
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- JP2006096977A JP2006096977A JP2005119390A JP2005119390A JP2006096977A JP 2006096977 A JP2006096977 A JP 2006096977A JP 2005119390 A JP2005119390 A JP 2005119390A JP 2005119390 A JP2005119390 A JP 2005119390A JP 2006096977 A JP2006096977 A JP 2006096977A
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- polishing
- information recording
- recording medium
- glass substrate
- polishing slurry
- Prior art date
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- 238000005498 polishing Methods 0.000 title claims abstract description 108
- 239000000758 substrate Substances 0.000 title claims abstract description 65
- 239000011521 glass Substances 0.000 title claims abstract description 58
- 239000002002 slurry Substances 0.000 title claims abstract description 44
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 21
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 61
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 25
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 claims abstract description 23
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 claims abstract description 23
- 239000008119 colloidal silica Substances 0.000 claims abstract description 8
- 238000000034 method Methods 0.000 claims description 11
- 238000002425 crystallisation Methods 0.000 claims 2
- 230000008025 crystallization Effects 0.000 claims 2
- 230000007547 defect Effects 0.000 abstract description 19
- 239000002609 medium Substances 0.000 description 18
- 239000010410 layer Substances 0.000 description 13
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 6
- 230000003746 surface roughness Effects 0.000 description 6
- 239000002245 particle Substances 0.000 description 5
- 239000003082 abrasive agent Substances 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 238000011156 evaluation Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 3
- 229910000420 cerium oxide Inorganic materials 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 239000002612 dispersion medium Substances 0.000 description 3
- 239000005357 flat glass Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 239000004745 nonwoven fabric Substances 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 3
- 238000007517 polishing process Methods 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- 229910000531 Co alloy Inorganic materials 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000004094 surface-active agent Substances 0.000 description 2
- 229910021489 α-quartz Inorganic materials 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910000599 Cr alloy Inorganic materials 0.000 description 1
- 229910018068 Li 2 O Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 239000006061 abrasive grain Substances 0.000 description 1
- 239000002280 amphoteric surfactant Substances 0.000 description 1
- 239000003945 anionic surfactant Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000003093 cationic surfactant Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000005345 chemically strengthened glass Substances 0.000 description 1
- 239000000788 chromium alloy Substances 0.000 description 1
- WVMPCBWWBLZKPD-UHFFFAOYSA-N dilithium oxido-[oxido(oxo)silyl]oxy-oxosilane Chemical compound [Li+].[Li+].[O-][Si](=O)O[Si]([O-])=O WVMPCBWWBLZKPD-UHFFFAOYSA-N 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000007518 final polishing process Methods 0.000 description 1
- 239000006260 foam Substances 0.000 description 1
- 229910021485 fumed silica Inorganic materials 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 239000002563 ionic surfactant Substances 0.000 description 1
- 239000002649 leather substitute Substances 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000002736 nonionic surfactant Substances 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000005341 toughened glass Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3634—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer at least containing carbon, a carbide or oxycarbide
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3639—Multilayers containing at least two functional metal layers
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C19/00—Surface treatment of glass, not in the form of fibres or filaments, by mechanical means
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1454—Abrasive powders, suspensions and pastes for polishing
- C09K3/1463—Aqueous liquid suspensions
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/8404—Processes or apparatus specially adapted for manufacturing record carriers manufacturing base layers
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/152—Deposition methods from the vapour phase by cvd
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/154—Deposition methods from the vapour phase by sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Geochemistry & Mineralogy (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Surface Treatment Of Glass (AREA)
Abstract
【解決手段】 シリカ研磨材及びセリア研磨材を含有する研磨スラリーであって、研磨スラリー全体を基準として、シリカ研磨材、特にコロイダルシリカの含有量が3質量%未満であり、且つセリア研磨材の含有量が1質量%未満である、研磨スラリーとする。またこの研磨スラリーを用いる情報記録媒体用結晶化ガラス基板の製造方法とする。また更に、この情報記録媒体用結晶化ガラス基板の製造方法によって得られた情報記録媒体用結晶化ガラス基板上に記録層を形成することを含む、情報記録媒体の製造方法とする。
【選択図】 なし
Description
固形分含有率12質量%のセリア研磨材含有溶液(平均粒子径0.5μm、昭和電工製SHOROX)と及び固形分含有率40質量%のシリカ研磨材溶液(平均粒子径0.08μm、フジミ製Compol)とを水に加え、セリア含有率が0.6質量%でシリカ含有率が0.2質量%の研磨スラリーを形成し、得られた研磨スラリーを用いて研磨試験を行った。
研磨前後でのディスクの質量変化から研磨レートを求めた。尚、この研磨レートは、セリア0.6質量%を含有し、コロイダルシリカを含有しない研磨スラリー(比較例7)を用いたとき研磨レートを100として比で表している。
原子間力顕微鏡(Digital Instruments製D3000)を用いて表面粗さRa(Å)を10μm視野で評価した。
日立電子エンジニアリング製のODT(Optical Defect Tester)RZ3500を用いて、表面欠陥を評価した。この測定装置では、レーザーをディスク表面に垂直に入射させ、その反射光の位相差から欠陥を検出している。またこの測定のために使用した測定パラメータは、ディスクサイズ65mm、測定半径11〜31.5mm、スライス±0.01μmであった。
セリア及びシリカ研磨材の含有率を表1に示す含有率に変更したことを除いて、実施例1と同様に研磨試験を行った。結果は表1に示している。
セリア及びシリカ研磨材の含有率を表1に示す含有率に変更したことを除いて、実施例1と同様に研磨試験を行った。結果は表1に示している。
表1から明らかなように、シリカ研磨材が0質量%超3質量%未満であり且つセリア研磨材が0質量%超1質量%未満である実施例1〜5では、シリカ研磨材とセリア研磨材の含有率が共に高い参考例(特許文献1に相当)と同様に良好な研磨結果が得られている。
Claims (6)
- シリカ研磨材及びセリア研磨材を含有する研磨スラリーであって、研磨スラリー全体を基準として、前記シリカ研磨材の含有量が3質量%未満であり、且つ前記セリア研磨材の含有量が1質量%未満である、研磨スラリー。
- 前記シリカ研磨材がコロイダルシリカである、請求項1に記載の研磨スラリー。
- 研磨スラリー全体を基準として、前記シリカ研磨材の含有量が0.4質量%超2質量%未満である、請求項1又は2に記載の研磨スラリー。
- 少なくとも表面に非晶質相部分と結晶質相部分とを有する結晶化ガラス基板の表面と研磨部材との間に研磨スラリーを介在させ、前記ガラス基板と前記研磨部材とを相対運動させて前記ガラス基板の表面を研磨加工することを含む、情報記録媒体用結晶化ガラス基板の製造方法において、前記研磨スラリーとして請求項1〜3のいずれかに記載の研磨スラリーを用いる、情報記録媒体用結晶化ガラス基板の製造方法。
- 請求項4に記載の方法によって得た情報記録媒体用結晶化ガラス基板上に記録層を形成することを含む、情報記録媒体の製造方法。
- 前記記録層が磁性層である、請求項5に記載の情報記録媒体の製造方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005119390A JP4785406B2 (ja) | 2004-08-30 | 2005-04-18 | 研磨スラリー、情報記録媒体用ガラス基板の製造方法、及び情報記録媒体の製造方法 |
CN2005800289330A CN101010401B (zh) | 2004-08-30 | 2005-08-29 | 抛光浆料,用于信息记录介质的玻璃基材的制造方法和信息记录介质的制造方法 |
US11/661,269 US8029687B2 (en) | 2004-08-30 | 2005-08-29 | Polishing slurry, production method of glass substrate for information recording medium and production method of information recording medium |
PCT/JP2005/016154 WO2006025539A1 (en) | 2004-08-30 | 2005-08-29 | Polishing slurry, production method of glass substrate for information recording medium and production method of information recording medium |
MYPI20054044 MY151435A (en) | 2004-08-30 | 2005-08-29 | Polishing slurry, production method of glass substrate for information recording medium and production method of information recording medium |
Applications Claiming Priority (3)
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JP2004250859 | 2004-08-30 | ||
JP2004250859 | 2004-08-30 | ||
JP2005119390A JP4785406B2 (ja) | 2004-08-30 | 2005-04-18 | 研磨スラリー、情報記録媒体用ガラス基板の製造方法、及び情報記録媒体の製造方法 |
Publications (2)
Publication Number | Publication Date |
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JP2006096977A true JP2006096977A (ja) | 2006-04-13 |
JP4785406B2 JP4785406B2 (ja) | 2011-10-05 |
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Family Applications (1)
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JP2005119390A Active JP4785406B2 (ja) | 2004-08-30 | 2005-04-18 | 研磨スラリー、情報記録媒体用ガラス基板の製造方法、及び情報記録媒体の製造方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US8029687B2 (ja) |
JP (1) | JP4785406B2 (ja) |
CN (1) | CN101010401B (ja) |
MY (1) | MY151435A (ja) |
WO (1) | WO2006025539A1 (ja) |
Cited By (7)
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JP2008091411A (ja) * | 2006-09-29 | 2008-04-17 | Fujifilm Corp | 金属用研磨液 |
JP2009218555A (ja) * | 2008-02-14 | 2009-09-24 | Hitachi Chem Co Ltd | Cmp研磨液及び研磨方法 |
JP2012143845A (ja) * | 2011-01-13 | 2012-08-02 | Kao Corp | 非晶質ガラス基板用研磨液組成物 |
JP2014001251A (ja) * | 2012-06-14 | 2014-01-09 | Fujitsu Ltd | 研磨剤及び研磨剤の製造方法 |
JP2017102989A (ja) * | 2015-11-30 | 2017-06-08 | 花王株式会社 | 磁気ディスク基板用研磨液組成物 |
JP2019119776A (ja) * | 2017-12-28 | 2019-07-22 | 花王株式会社 | 研磨液組成物 |
WO2020066998A1 (ja) * | 2018-09-26 | 2020-04-02 | 株式会社バイコウスキージャパン | 研磨液、その濃縮液、研磨液を用いる研磨処理物品の製造方法及び研磨液を用いる基板の研磨方法 |
Families Citing this family (7)
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KR20090031571A (ko) * | 2006-07-18 | 2009-03-26 | 제이에스알 가부시끼가이샤 | 화학 기계 연마용 수계 분산체, 그의 제조 방법 및 화학 기계 연마 방법 |
US20100062287A1 (en) * | 2008-09-10 | 2010-03-11 | Seagate Technology Llc | Method of polishing amorphous/crystalline glass to achieve a low rq & wq |
WO2012090510A1 (ja) * | 2010-12-29 | 2012-07-05 | Hoya株式会社 | 磁気ディスク用ガラス基板の製造方法、磁気ディスクの製造方法 |
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CN111421399A (zh) * | 2020-04-26 | 2020-07-17 | 东莞南玻工程玻璃有限公司 | 一种玻璃表面除霉的抛光方法 |
CN113878504A (zh) * | 2021-10-27 | 2022-01-04 | 广东伟艺精细研磨科技有限公司 | 一种显示屏打磨清洗垫及其制备方法 |
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- 2005-08-29 CN CN2005800289330A patent/CN101010401B/zh not_active Expired - Fee Related
- 2005-08-29 US US11/661,269 patent/US8029687B2/en not_active Expired - Fee Related
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JP2008091411A (ja) * | 2006-09-29 | 2008-04-17 | Fujifilm Corp | 金属用研磨液 |
JP2009218555A (ja) * | 2008-02-14 | 2009-09-24 | Hitachi Chem Co Ltd | Cmp研磨液及び研磨方法 |
JP2012143845A (ja) * | 2011-01-13 | 2012-08-02 | Kao Corp | 非晶質ガラス基板用研磨液組成物 |
JP2014001251A (ja) * | 2012-06-14 | 2014-01-09 | Fujitsu Ltd | 研磨剤及び研磨剤の製造方法 |
JP2017102989A (ja) * | 2015-11-30 | 2017-06-08 | 花王株式会社 | 磁気ディスク基板用研磨液組成物 |
JP2019119776A (ja) * | 2017-12-28 | 2019-07-22 | 花王株式会社 | 研磨液組成物 |
WO2020066998A1 (ja) * | 2018-09-26 | 2020-04-02 | 株式会社バイコウスキージャパン | 研磨液、その濃縮液、研磨液を用いる研磨処理物品の製造方法及び研磨液を用いる基板の研磨方法 |
Also Published As
Publication number | Publication date |
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US20070256367A1 (en) | 2007-11-08 |
JP4785406B2 (ja) | 2011-10-05 |
MY151435A (en) | 2014-05-30 |
CN101010401A (zh) | 2007-08-01 |
US8029687B2 (en) | 2011-10-04 |
WO2006025539A1 (en) | 2006-03-09 |
CN101010401B (zh) | 2011-12-14 |
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