JP2006041322A5 - - Google Patents
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- Publication number
- JP2006041322A5 JP2006041322A5 JP2004221299A JP2004221299A JP2006041322A5 JP 2006041322 A5 JP2006041322 A5 JP 2006041322A5 JP 2004221299 A JP2004221299 A JP 2004221299A JP 2004221299 A JP2004221299 A JP 2004221299A JP 2006041322 A5 JP2006041322 A5 JP 2006041322A5
- Authority
- JP
- Japan
- Prior art keywords
- laser
- scribing
- groove
- photoelectric conversion
- electrode layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 claims description 68
- 239000000758 substrate Substances 0.000 claims description 60
- 238000006243 chemical reaction Methods 0.000 claims description 40
- 238000004519 manufacturing process Methods 0.000 claims description 39
- 239000004065 semiconductor Substances 0.000 claims description 31
- 239000010408 film Substances 0.000 description 62
- 230000003287 optical Effects 0.000 description 34
- 239000003550 marker Substances 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000005755 formation reaction Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- 230000001678 irradiating Effects 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 230000000875 corresponding Effects 0.000 description 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N Tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminum Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004221299A JP4713100B2 (ja) | 2004-07-29 | 2004-07-29 | 光電変換装置の製造方法及び光電変換装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004221299A JP4713100B2 (ja) | 2004-07-29 | 2004-07-29 | 光電変換装置の製造方法及び光電変換装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2006041322A JP2006041322A (ja) | 2006-02-09 |
| JP2006041322A5 true JP2006041322A5 (zh) | 2007-08-30 |
| JP4713100B2 JP4713100B2 (ja) | 2011-06-29 |
Family
ID=35905973
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004221299A Active JP4713100B2 (ja) | 2004-07-29 | 2004-07-29 | 光電変換装置の製造方法及び光電変換装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4713100B2 (zh) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2439962B (en) * | 2006-06-14 | 2008-09-24 | Exitech Ltd | Process and apparatus for laser scribing |
| DE102006051555A1 (de) | 2006-11-02 | 2008-05-08 | Manz Automation Ag | Verfahren zur Strukturierung eines Dünnschicht-Solarmoduls |
| GB0622232D0 (en) * | 2006-11-08 | 2006-12-20 | Rumsby Philip T | Method and apparatus for laser beam alignment for solar panel scribing |
| JP2008283023A (ja) * | 2007-05-11 | 2008-11-20 | Mitsubishi Heavy Ind Ltd | 光電変換装置の製造方法 |
| JP2009076714A (ja) * | 2007-09-21 | 2009-04-09 | Fuji Electric Holdings Co Ltd | 薄膜太陽電池の製造方法 |
| JP2009142872A (ja) * | 2007-12-17 | 2009-07-02 | Shiraitekku:Kk | レーザーエッチング装置 |
| DE102008014263A1 (de) * | 2008-03-13 | 2009-09-24 | Schott Solar Gmbh | Verfahren und Vorrichtung zur Bildung der Trennlinien eines fotovoltaischen Moduls mit serienverschalteten Zellen |
| TW201006598A (en) * | 2008-04-11 | 2010-02-16 | Applied Materials Inc | Laser scribe inspection methods and systems |
| DE102008032555B3 (de) * | 2008-07-10 | 2010-01-21 | Innolas Systems Gmbh | Strukturierungsvorrichtung für die Strukturierung von plattenförmigen Elementen, insbesondere von Dünnschicht-Solarmodulen, entsprechendes Strukturierungsverfahren sowie Verwendung derselben |
| DE102008059763A1 (de) | 2008-12-01 | 2010-06-02 | Lpkf Laser & Electronics Ag | Verfahren zur Laserbearbeitung |
| JP2010149146A (ja) * | 2008-12-25 | 2010-07-08 | Hitachi High-Technologies Corp | レーザ加工装置 |
| JP2010199242A (ja) * | 2009-02-24 | 2010-09-09 | Mitsuboshi Diamond Industrial Co Ltd | 集積型薄膜太陽電池の製造方法 |
| JP2010251664A (ja) * | 2009-04-20 | 2010-11-04 | Sharp Corp | 半導体装置の製造方法 |
| JP2011199142A (ja) * | 2010-03-23 | 2011-10-06 | Honda Motor Co Ltd | 薄膜太陽電池の製造方法および製造装置 |
| CN103000752A (zh) * | 2011-09-19 | 2013-03-27 | 无锡尚德太阳能电力有限公司 | 薄膜太阳电池划线机及其方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5115298A (zh) * | 1974-07-30 | 1976-02-06 | Nippon Telegraph & Telephone | |
| JPS61263172A (ja) * | 1985-05-16 | 1986-11-21 | Fuji Electric Co Ltd | 薄膜太陽電池の製造方法 |
| JPH07308788A (ja) * | 1994-05-16 | 1995-11-28 | Sanyo Electric Co Ltd | 光加工法及び光起電力装置の製造方法 |
-
2004
- 2004-07-29 JP JP2004221299A patent/JP4713100B2/ja active Active
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