JP4713100B2 - 光電変換装置の製造方法及び光電変換装置 - Google Patents

光電変換装置の製造方法及び光電変換装置 Download PDF

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JP4713100B2
JP4713100B2 JP2004221299A JP2004221299A JP4713100B2 JP 4713100 B2 JP4713100 B2 JP 4713100B2 JP 2004221299 A JP2004221299 A JP 2004221299A JP 2004221299 A JP2004221299 A JP 2004221299A JP 4713100 B2 JP4713100 B2 JP 4713100B2
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laser
scribing
groove
photoelectric conversion
electrode layer
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JP2006041322A5 (zh
JP2006041322A (ja
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信久 太田
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Kaneka Corp
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Kaneka Corp
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy

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JP2004221299A 2004-07-29 2004-07-29 光電変換装置の製造方法及び光電変換装置 Active JP4713100B2 (ja)

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JP2004221299A JP4713100B2 (ja) 2004-07-29 2004-07-29 光電変換装置の製造方法及び光電変換装置

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JP2004221299A JP4713100B2 (ja) 2004-07-29 2004-07-29 光電変換装置の製造方法及び光電変換装置

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JP2006041322A JP2006041322A (ja) 2006-02-09
JP2006041322A5 JP2006041322A5 (zh) 2007-08-30
JP4713100B2 true JP4713100B2 (ja) 2011-06-29

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Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2439962B (en) * 2006-06-14 2008-09-24 Exitech Ltd Process and apparatus for laser scribing
DE102006051555A1 (de) 2006-11-02 2008-05-08 Manz Automation Ag Verfahren zur Strukturierung eines Dünnschicht-Solarmoduls
GB0622232D0 (en) * 2006-11-08 2006-12-20 Rumsby Philip T Method and apparatus for laser beam alignment for solar panel scribing
JP2008283023A (ja) * 2007-05-11 2008-11-20 Mitsubishi Heavy Ind Ltd 光電変換装置の製造方法
JP2009076714A (ja) * 2007-09-21 2009-04-09 Fuji Electric Holdings Co Ltd 薄膜太陽電池の製造方法
JP2009142872A (ja) * 2007-12-17 2009-07-02 Shiraitekku:Kk レーザーエッチング装置
DE102008014263A1 (de) * 2008-03-13 2009-09-24 Schott Solar Gmbh Verfahren und Vorrichtung zur Bildung der Trennlinien eines fotovoltaischen Moduls mit serienverschalteten Zellen
TW201006598A (en) * 2008-04-11 2010-02-16 Applied Materials Inc Laser scribe inspection methods and systems
DE102008032555B3 (de) 2008-07-10 2010-01-21 Innolas Systems Gmbh Strukturierungsvorrichtung für die Strukturierung von plattenförmigen Elementen, insbesondere von Dünnschicht-Solarmodulen, entsprechendes Strukturierungsverfahren sowie Verwendung derselben
DE102008059763A1 (de) 2008-12-01 2010-06-02 Lpkf Laser & Electronics Ag Verfahren zur Laserbearbeitung
JP2010149146A (ja) * 2008-12-25 2010-07-08 Hitachi High-Technologies Corp レーザ加工装置
JP2010199242A (ja) * 2009-02-24 2010-09-09 Mitsuboshi Diamond Industrial Co Ltd 集積型薄膜太陽電池の製造方法
JP2010251664A (ja) * 2009-04-20 2010-11-04 Sharp Corp 半導体装置の製造方法
JP2011199142A (ja) * 2010-03-23 2011-10-06 Honda Motor Co Ltd 薄膜太陽電池の製造方法および製造装置
CN103000752A (zh) * 2011-09-19 2013-03-27 无锡尚德太阳能电力有限公司 薄膜太阳电池划线机及其方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5115298A (zh) * 1974-07-30 1976-02-06 Nippon Telegraph & Telephone
JPS61263172A (ja) * 1985-05-16 1986-11-21 Fuji Electric Co Ltd 薄膜太陽電池の製造方法
JPH07308788A (ja) * 1994-05-16 1995-11-28 Sanyo Electric Co Ltd 光加工法及び光起電力装置の製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5115298A (zh) * 1974-07-30 1976-02-06 Nippon Telegraph & Telephone
JPS61263172A (ja) * 1985-05-16 1986-11-21 Fuji Electric Co Ltd 薄膜太陽電池の製造方法
JPH07308788A (ja) * 1994-05-16 1995-11-28 Sanyo Electric Co Ltd 光加工法及び光起電力装置の製造方法

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