JP2005530170A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2005530170A5 JP2005530170A5 JP2004514960A JP2004514960A JP2005530170A5 JP 2005530170 A5 JP2005530170 A5 JP 2005530170A5 JP 2004514960 A JP2004514960 A JP 2004514960A JP 2004514960 A JP2004514960 A JP 2004514960A JP 2005530170 A5 JP2005530170 A5 JP 2005530170A5
- Authority
- JP
- Japan
- Prior art keywords
- optical assembly
- assembly according
- substrate
- rays
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims 52
- 238000000034 method Methods 0.000 claims 16
- 239000000758 substrate Substances 0.000 claims 12
- 239000011248 coating agent Substances 0.000 claims 6
- 238000000576 coating method Methods 0.000 claims 6
- 230000005855 radiation Effects 0.000 claims 6
- 239000006185 dispersion Substances 0.000 claims 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 2
- 238000005520 cutting process Methods 0.000 claims 2
- 230000004907 flux Effects 0.000 claims 2
- 239000011521 glass Substances 0.000 claims 2
- XMTQQYYKAHVGBJ-UHFFFAOYSA-N 3-(3,4-DICHLOROPHENYL)-1,1-DIMETHYLUREA Chemical compound CN(C)C(=O)NC1=CC=C(Cl)C(Cl)=C1 XMTQQYYKAHVGBJ-UHFFFAOYSA-N 0.000 claims 1
- 238000005452 bending Methods 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 claims 1
- 238000000151 deposition Methods 0.000 claims 1
- 239000005293 duran Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 229910052759 nickel Inorganic materials 0.000 claims 1
- 230000001681 protective effect Effects 0.000 claims 1
- 230000003595 spectral effect Effects 0.000 claims 1
- 230000003746 surface roughness Effects 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR0207546A FR2841371B1 (fr) | 2002-06-19 | 2002-06-19 | Ensemble optique et procede associe |
| FR0300623A FR2850171B1 (fr) | 2003-01-21 | 2003-01-21 | Dispositif optique pour applications rayons x |
| PCT/FR2003/001896 WO2004001770A1 (fr) | 2002-06-19 | 2003-06-19 | Ensemble optique et procede associe |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005530170A JP2005530170A (ja) | 2005-10-06 |
| JP2005530170A5 true JP2005530170A5 (https=) | 2006-08-03 |
Family
ID=30001927
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004514950A Pending JP2005530168A (ja) | 2002-06-19 | 2003-06-19 | Ｘ線用光学装置 |
| JP2004514960A Pending JP2005530170A (ja) | 2002-06-19 | 2003-06-19 | 光学アセンブリ及びその製造方法 |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004514950A Pending JP2005530168A (ja) | 2002-06-19 | 2003-06-19 | Ｘ線用光学装置 |
Country Status (8)
| Country | Link |
|---|---|
| US (2) | US7430277B2 (https=) |
| EP (3) | EP1514279B1 (https=) |
| JP (2) | JP2005530168A (https=) |
| CN (2) | CN1324613C (https=) |
| AT (2) | ATE341083T1 (https=) |
| AU (2) | AU2003264670A1 (https=) |
| DE (3) | DE20320792U1 (https=) |
| WO (2) | WO2004001769A1 (https=) |
Families Citing this family (37)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030199425A1 (en) * | 1997-06-27 | 2003-10-23 | Desai Neil P. | Compositions and methods for treatment of hyperplasia |
| DE10254026C5 (de) * | 2002-11-20 | 2009-01-29 | Incoatec Gmbh | Reflektor für Röntgenstrahlung |
| US20060040091A1 (en) | 2004-08-23 | 2006-02-23 | Bletsos Ioannis V | Breathable low-emissivity metalized sheets |
| DE102005057700A1 (de) * | 2005-11-25 | 2007-06-06 | Axo Dresden Gmbh | Röntgen-Optisches-Element |
| JP4278108B2 (ja) | 2006-07-07 | 2009-06-10 | 株式会社リガク | 超小角ｘ線散乱測定装置 |
| FR2918501B1 (fr) | 2007-07-02 | 2009-11-06 | Xenocs Soc Par Actions Simplif | Dispositif de delivrance d'un faisceau de rayons x a haute energie |
| US7706503B2 (en) * | 2007-11-20 | 2010-04-27 | Rigaku Innovative Technologies, Inc. | X-ray optic with varying focal points |
| EP2075569B1 (en) * | 2007-12-31 | 2012-02-15 | Xenocs S.A. | X-ray beam device |
| JP2010014418A (ja) * | 2008-07-01 | 2010-01-21 | Japan Atomic Energy Agency | 多層膜回折格子分光装置 |
| US7741626B2 (en) * | 2008-09-12 | 2010-06-22 | Cymer, Inc. | Spectral purity filters and methods therefor |
| US8050380B2 (en) * | 2009-05-05 | 2011-11-01 | Media Lario, S.R.L. | Zone-optimized mirrors and optical systems using same |
| US8249220B2 (en) * | 2009-10-14 | 2012-08-21 | Rigaku Innovative Technologies, Inc. | Multiconfiguration X-ray optical system |
| US8208602B2 (en) * | 2010-02-22 | 2012-06-26 | General Electric Company | High flux photon beams using optic devices |
| US8311184B2 (en) | 2010-08-30 | 2012-11-13 | General Electric Company | Fan-shaped X-ray beam imaging systems employing graded multilayer optic devices |
| US8488740B2 (en) * | 2010-11-18 | 2013-07-16 | Panalytical B.V. | Diffractometer |
| FR2967887B1 (fr) | 2010-11-26 | 2018-01-19 | General Electric Company | Mammographe compact, et procede de mammographie associe |
| US8744048B2 (en) | 2010-12-28 | 2014-06-03 | General Electric Company | Integrated X-ray source having a multilayer total internal reflection optic device |
| KR101332502B1 (ko) * | 2011-06-14 | 2013-11-26 | 전남대학교산학협력단 | 국부적 방사선 치료용 ｘ―선 바늘 모듈 |
| US8761346B2 (en) | 2011-07-29 | 2014-06-24 | General Electric Company | Multilayer total internal reflection optic devices and methods of making and using the same |
| CN102903413B (zh) * | 2012-10-30 | 2015-06-03 | 同济大学 | 一种在小尺寸背光下工作的四通道kb显微成像系统 |
| US20140161233A1 (en) | 2012-12-06 | 2014-06-12 | Bruker Axs Gmbh | X-ray apparatus with deflectable electron beam |
| EP2762862B1 (en) * | 2013-01-30 | 2017-03-08 | Bruker AXS GmbH | XRF measurement apparatus for detecting contaminations on the bevel of a wafer |
| CN115241731A (zh) * | 2013-11-07 | 2022-10-25 | 镁可微波技术有限公司 | 具有光束形状和光束方向修改的激光器 |
| EP2896960B1 (en) * | 2014-01-15 | 2017-07-26 | PANalytical B.V. | X-ray apparatus for SAXS and Bragg-Brentano measurements |
| JP6202684B2 (ja) * | 2014-06-05 | 2017-09-27 | 株式会社リガク | Ｘ線回折装置 |
| JP6069609B2 (ja) * | 2015-03-26 | 2017-02-01 | 株式会社リガク | 二重湾曲ｘ線集光素子およびその構成体、二重湾曲ｘ線分光素子およびその構成体の製造方法 |
| CN105092618A (zh) * | 2015-09-18 | 2015-11-25 | 北京师范大学 | 一种微束能量色散的x射线衍射仪及其使用方法 |
| CN105873344A (zh) * | 2016-03-22 | 2016-08-17 | 中国工程物理研究院流体物理研究所 | 一种基于横向梯度多层膜反射元件的x射线单能成像方法 |
| US10677744B1 (en) * | 2016-06-03 | 2020-06-09 | U.S. Department Of Energy | Multi-cone x-ray imaging Bragg crystal spectrometer |
| FR3059434B1 (fr) * | 2016-11-29 | 2019-05-17 | Centre National De La Recherche Scientifique - Cnrs | Composant de selection spectrale pour radiations xuv |
| CN106706157B (zh) * | 2017-01-11 | 2023-06-13 | 中国工程物理研究院激光聚变研究中心 | 一种基于准同视轴的icf热斑电子温度探测设备 |
| KR102621750B1 (ko) * | 2019-06-24 | 2024-01-05 | 에스엠에스 그룹 게엠베하 | 다결정 제품의 소재 특성 측정 장치 및 방법 |
| JP7637878B2 (ja) * | 2021-01-12 | 2025-03-03 | 国立大学法人 東京大学 | ミラーの設計方法、および該設計方法における設計式が成り立つ反射面を備えた非点収差制御ミラー |
| JP7564522B2 (ja) | 2021-01-12 | 2024-10-09 | 国立大学法人 東京大学 | ミラーの設計方法、および該設計方法における設計式が成り立つ反射面を備えた非点収差制御ミラー |
| JP7637879B2 (ja) * | 2021-01-12 | 2025-03-03 | 国立大学法人 東京大学 | ミラーの設計方法、および該設計方法における設計式が成り立つ反射面を備えた非点収差制御ミラー |
| CN115389537A (zh) * | 2022-08-26 | 2022-11-25 | 同济大学 | 一种具有高通量的小焦斑中子聚焦系统 |
| CN119688594B (zh) * | 2025-02-24 | 2025-06-20 | 泸州市镀膜科技有限公司 | 一种用于电容器金属化薄膜加工的缺陷检测系统 |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL8300421A (nl) | 1983-02-04 | 1984-09-03 | Philips Nv | Roentgen onderzoek apparaat met dubbel focusserend kristal. |
| US4599741A (en) * | 1983-11-04 | 1986-07-08 | USC--Dept. of Materials Science | System for local X-ray excitation by monochromatic X-rays |
| US4562583A (en) | 1984-01-17 | 1985-12-31 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Spectral slicing X-ray telescope with variable magnification |
| DE68922306T2 (de) * | 1988-03-11 | 1995-11-02 | British Tech Group | Optische vorrichtungen und methoden für ihre herstellung. |
| US5127028A (en) | 1990-08-01 | 1992-06-30 | Wittry David B | Diffractord with doubly curved surface steps |
| US5142561A (en) * | 1991-05-28 | 1992-08-25 | Grumman Aerospace Corporation | X-ray lithography scanning mirror |
| US5373544A (en) * | 1992-08-12 | 1994-12-13 | Siemens Aktiengesellschaft | X-ray diffractometer |
| US5646976A (en) * | 1994-08-01 | 1997-07-08 | Osmic, Inc. | Optical element of multilayered thin film for X-rays and neutrons |
| US5619548A (en) * | 1995-08-11 | 1997-04-08 | Oryx Instruments And Materials Corp. | X-ray thickness gauge |
| DE19615366B4 (de) | 1996-04-19 | 2006-02-09 | Carl Zeiss Jena Gmbh | Verfahren und Einrichtung zum Nachweis physikalischer, chemischer, biologischer oder biochemischer Reaktionen und Wechselwirkungen |
| US6041099A (en) | 1998-02-19 | 2000-03-21 | Osmic, Inc. | Single corner kirkpatrick-baez beam conditioning optic assembly |
| DE19833524B4 (de) | 1998-07-25 | 2004-09-23 | Bruker Axs Gmbh | Röntgen-Analysegerät mit Gradienten-Vielfachschicht-Spiegel |
| US6285506B1 (en) * | 1999-01-21 | 2001-09-04 | X-Ray Optical Systems, Inc. | Curved optical device and method of fabrication |
| US6278764B1 (en) | 1999-07-22 | 2001-08-21 | The Regents Of The Unviersity Of California | High efficiency replicated x-ray optics and fabrication method |
| US6317483B1 (en) * | 1999-11-29 | 2001-11-13 | X-Ray Optical Systems, Inc. | Doubly curved optical device with graded atomic planes |
| US6829327B1 (en) * | 2000-09-22 | 2004-12-07 | X-Ray Optical Systems, Inc. | Total-reflection x-ray fluorescence apparatus and method using a doubly-curved optic |
| RU2339974C2 (ru) | 2001-06-19 | 2008-11-27 | Икс-Рэй Оптикал Системз, Инк. | Волновая дисперсивная рентгенофлуоресцентная система с использованием фокусирующей оптики для возбуждения и фокусирующий монохроматор для собирания |
| DE10254026C5 (de) * | 2002-11-20 | 2009-01-29 | Incoatec Gmbh | Reflektor für Röntgenstrahlung |
-
2003
- 2003-06-19 DE DE20320792U patent/DE20320792U1/de not_active Expired - Lifetime
- 2003-06-19 CN CNB038195275A patent/CN1324613C/zh not_active Expired - Lifetime
- 2003-06-19 DE DE60308645T patent/DE60308645T2/de not_active Expired - Lifetime
- 2003-06-19 AT AT03760756T patent/ATE341083T1/de active
- 2003-06-19 US US10/518,284 patent/US7430277B2/en not_active Expired - Fee Related
- 2003-06-19 JP JP2004514950A patent/JP2005530168A/ja active Pending
- 2003-06-19 AU AU2003264670A patent/AU2003264670A1/en not_active Abandoned
- 2003-06-19 AU AU2003260613A patent/AU2003260613A1/en not_active Abandoned
- 2003-06-19 DE DE60325853T patent/DE60325853D1/de not_active Expired - Lifetime
- 2003-06-19 EP EP03760747A patent/EP1514279B1/fr not_active Expired - Lifetime
- 2003-06-19 CN CNB038145081A patent/CN1332399C/zh not_active Expired - Fee Related
- 2003-06-19 EP EP03760756A patent/EP1468428B1/fr not_active Expired - Lifetime
- 2003-06-19 AT AT03760747T patent/ATE421152T1/de not_active IP Right Cessation
- 2003-06-19 US US10/506,716 patent/US7248670B2/en not_active Expired - Lifetime
- 2003-06-19 WO PCT/FR2003/001879 patent/WO2004001769A1/fr not_active Ceased
- 2003-06-19 JP JP2004514960A patent/JP2005530170A/ja active Pending
- 2003-06-19 EP EP06120020A patent/EP1732087A3/fr not_active Ceased
- 2003-06-19 WO PCT/FR2003/001896 patent/WO2004001770A1/fr not_active Ceased
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2005530170A5 (https=) | ||
| US7248670B2 (en) | Optical unit and associated method | |
| EP0596004B1 (en) | Non-imaging optical illumination system | |
| EP1169713B1 (en) | X-ray lens system | |
| EP0557162B1 (fr) | Filtre holographique de protection contre des rayonnements,notamment laser | |
| JP2005530168A5 (https=) | ||
| WO2013183302A1 (ja) | 音響光学撮像装置 | |
| JP2003515779A (ja) | 放射状のエネルギーを集中するまたは平行にするための装置 | |
| JPH10504104A (ja) | 放射検出装置 | |
| JP2002519715A (ja) | 孔部連動レーザー走査装置 | |
| US4483007A (en) | Energy transmission with respect to convex sources and receivers | |
| CN103645523B (zh) | 一种反射式椭球面光栏 | |
| CN105068369A (zh) | 多波段投影光学系统 | |
| US6339393B1 (en) | Rolled edge compact range reflectors | |
| US5764783A (en) | Variable beamwidth transducer | |
| JP2003124741A (ja) | 可変焦点距離電磁波集束装置 | |
| US2579140A (en) | Wave projector | |
| JP3604265B2 (ja) | Ｘ線回折要素及びその製造方法 | |
| CN106641813B (zh) | 真空紫外光管照明装置 | |
| EP2304739B1 (en) | High intensity x-ray beam system | |
| US7311677B1 (en) | Energy concentrator system and method | |
| US6282259B1 (en) | X-ray mirror system providing enhanced signal concentration | |
| CN112284538A (zh) | 一种棱栅光谱仪光学系统及设计方法 | |
| CN102269832A (zh) | 一种太赫兹波正向聚焦反射镜 | |
| CN120652590A (zh) | 一种宽谱电磁调制结构及其加工系统、加工方法 |