JPH10504104A - 放射検出装置 - Google Patents
放射検出装置Info
- Publication number
- JPH10504104A JPH10504104A JP8507126A JP50712696A JPH10504104A JP H10504104 A JPH10504104 A JP H10504104A JP 8507126 A JP8507126 A JP 8507126A JP 50712696 A JP50712696 A JP 50712696A JP H10504104 A JPH10504104 A JP H10504104A
- Authority
- JP
- Japan
- Prior art keywords
- radiation
- detection system
- flat
- radiation detection
- diffraction grating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 230000005855 radiation Effects 0.000 title claims abstract description 135
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 37
- 238000001228 spectrum Methods 0.000 claims abstract description 25
- 230000003595 spectral effect Effects 0.000 claims abstract description 17
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 13
- 238000001514 detection method Methods 0.000 claims description 59
- 238000000576 coating method Methods 0.000 claims description 16
- 239000011248 coating agent Substances 0.000 claims description 15
- 239000000463 material Substances 0.000 claims description 5
- 238000005520 cutting process Methods 0.000 claims description 3
- 238000003754 machining Methods 0.000 claims description 3
- 238000005498 polishing Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 description 11
- 230000001419 dependent effect Effects 0.000 description 8
- 238000005259 measurement Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 7
- 239000011521 glass Substances 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 5
- 230000003321 amplification Effects 0.000 description 4
- 239000000835 fiber Substances 0.000 description 4
- 239000005350 fused silica glass Substances 0.000 description 4
- 238000003199 nucleic acid amplification method Methods 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000007935 neutral effect Effects 0.000 description 3
- 238000011045 prefiltration Methods 0.000 description 3
- 238000000825 ultraviolet detection Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000036541 health Effects 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 238000002310 reflectometry Methods 0.000 description 2
- 241000255925 Diptera Species 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- SBEQWOXEGHQIMW-UHFFFAOYSA-N silicon Chemical compound [Si].[Si] SBEQWOXEGHQIMW-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/429—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to measurement of ultraviolet light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0256—Compact construction
- G01J3/0259—Monolithic
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2803—Investigating the spectrum using photoelectric array detector
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0262—Constructional arrangements for removing stray light
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29304—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by diffraction, e.g. grating
- G02B6/29316—Light guides comprising a diffractive element, e.g. grating in or on the light guide such that diffracted light is confined in the light guide
- G02B6/29325—Light guides comprising a diffractive element, e.g. grating in or on the light guide such that diffracted light is confined in the light guide of the slab or planar or plate like form, i.e. confinement in a single transverse dimension only
- G02B6/29328—Diffractive elements operating in reflection
Abstract
Description
Claims (1)
- 【特許請求の範囲】 1.放射検出システムであって、放射を通すウェーブガイド(10)を備え、 このウェーブガイドは、これの1つの面上にあって放射を受取する入口孔装備( 18)、及び付属の放射検出器装備(24)をもった第1の平らな面(23)を 有する放射検出システムにおいて、前記入口孔装備(18)からの放射(36) を受取する位置に設けられる湾曲反射面(20,22)、および、この湾曲反射 面(20,22)からの放射(38)を受取する位置に設けられ、そして付属の 平らな回折格子(28)をもった第2の平らな面(26)を有し、そこで、前記 湾曲反射面(20,22)と平らな回折格子(28)とが前記入口孔装備(18 )から発散してくる放射(36,38)を焦点合わせするように構成され、所要 のスペクトル帯域とスペクトル・オーダとが前記放射検出器装備(24)上に焦 点合わせされることを特徴とする放射検出システム。 2.前記湾曲反射面(20,22)が放射を収束していくビームとして前記平 らな回折格子(28)へ向けることを特徴とする請求の範囲第1項の放射検出シ ステム。 3.収束ビーム(38)の中心光線(38A)が前記平らな回折格子(28) に対する法線(N)に対し小さな角度(α)を以ってその回折格子に入射するこ とを特徴とする請求の範囲第2項の放射検出システム。 4.第1オーダ・スペクトルが前記放射検出器装備(24)上へ焦点合わせさ れることを特徴とする請求の範囲第1項の放射検出システム。 5.前記第1オーダ・スペクトルが前記格子(28)の法線(N)に関して前 記入射収束ビーム(38)の中心光線(38A)の反射側にあることを特徴とす る請求の範囲第4項の放射検出システム。 6.複数個の紫外線感知検出器(24)を備えることを特徴とする請求の範囲 第1項の放射検出システム。 7.前記放射検出器装備(24)が回路装備(50)とディスプレイ装備(5 2)に接続され、これにより前記入口孔装備(18)に入射した放射の強度に関 する表示を行うことを特徴とする請求の範囲第1項の放射検出システム。 8.前記ウェーブガイド(10)がシリカ体部(12)を備えることを特徴と する請求の範囲第1項の放射検出システム。 9.請求の範囲第8項の放射検出システムにおいて、前記シリカ・ウェーブガ イド(12)が下記の諸段階、すなわち、 シリカ・ロッドを、湾曲した反射面(20)、および平らな検出面と回折面と 入力面(23,26,14)を有するように機械加工すること、 前記湾曲反射面(20)、回折面(26)、入力面(14)、および検出面( 23)を研削および研磨すること、 入口孔(18)を形成するように前記入力面(14)に放射を通さない材料( 16)を取付けること、 所要スペクトル帯域内の放射を反射するコーティング(26)を前記湾曲反射 面(20)に取付けること、 回折格子(28)を前記回折面(26)に取付けること、および、 該インゴットをスライスに切断して複数個のウェーブガイド(10)を形成す ること の諸段階によって製作されることを特徴とする放射検出システム。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB9416223A GB9416223D0 (en) | 1994-08-11 | 1994-08-11 | Radiation detector |
GB9416223.7 | 1994-08-11 | ||
PCT/GB1995/001902 WO1996005487A1 (en) | 1994-08-11 | 1995-08-11 | Radiation detector |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH10504104A true JPH10504104A (ja) | 1998-04-14 |
Family
ID=10759726
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8507126A Ceased JPH10504104A (ja) | 1994-08-11 | 1995-08-11 | 放射検出装置 |
Country Status (14)
Country | Link |
---|---|
US (1) | US5812262A (ja) |
EP (1) | EP0775297B1 (ja) |
JP (1) | JPH10504104A (ja) |
KR (1) | KR100344161B1 (ja) |
CN (1) | CN1079947C (ja) |
AT (1) | ATE188290T1 (ja) |
AU (1) | AU685998B2 (ja) |
CA (1) | CA2197340A1 (ja) |
DE (1) | DE69514237T2 (ja) |
ES (1) | ES2143064T3 (ja) |
GB (1) | GB9416223D0 (ja) |
NZ (1) | NZ291207A (ja) |
WO (1) | WO1996005487A1 (ja) |
ZA (1) | ZA956700B (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005308495A (ja) * | 2004-04-20 | 2005-11-04 | Hamamatsu Photonics Kk | 分光器及びそれを用いた測定装置 |
Families Citing this family (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19622077C2 (de) * | 1996-05-31 | 1999-11-04 | Kratz Josef Gmbh | Vorrichtung zur Vermessung von Bräunungsgeräten |
DE19801454C2 (de) * | 1998-01-16 | 1999-12-09 | Fraunhofer Ges Forschung | Verfahren und Vorrichtung zur Bestimmung eines UV-Strahlungs-Indexes |
DE19845701A1 (de) * | 1998-10-05 | 2000-04-06 | Palme Dieter | Anordnungen zur Überwachung der Performance von DWDM-Mehrwellenlängensystemen |
AU3032700A (en) * | 1999-01-08 | 2000-07-24 | Ibsen Micro Structures A/S | Spectrometer |
GB2362460A (en) * | 2000-05-19 | 2001-11-21 | William Howard Considine | Spectroscope |
AU2001276875A1 (en) * | 2000-07-11 | 2002-01-21 | Ibsen Photonics | Monitoring apparatus for optical transmission systems |
US7495765B2 (en) * | 2001-05-17 | 2009-02-24 | Thorlabs Gmbh | Fiber polarimeter, the use thereof, as well as polarimetric method |
EP1262752B1 (de) * | 2001-05-17 | 2005-08-03 | THORLABS GmbH | Faser-Polarimeter, dessen Verwendung sowie polarimetrisches Verfahren |
DE10137428A1 (de) * | 2001-07-27 | 2003-02-20 | Karlsruhe Forschzent | Vorrichtung zur Messung eines Spektrums |
DE10304312A1 (de) * | 2003-02-04 | 2004-08-12 | Carl Zeiss Jena Gmbh | Kompakt-Spektrometer |
US7034935B1 (en) * | 2003-03-24 | 2006-04-25 | Mpb Technologies Inc. | High performance miniature spectrometer |
JP4409860B2 (ja) * | 2003-05-28 | 2010-02-03 | 浜松ホトニクス株式会社 | 光検出器を用いた分光器 |
CN100516791C (zh) * | 2006-12-28 | 2009-07-22 | 华南师范大学 | 紫外线强度检测方法及装置 |
US7817274B2 (en) | 2007-10-05 | 2010-10-19 | Jingyun Zhang | Compact spectrometer |
US8345226B2 (en) * | 2007-11-30 | 2013-01-01 | Jingyun Zhang | Spectrometers miniaturized for working with cellular phones and other portable electronic devices |
DE102008054733B4 (de) * | 2008-12-16 | 2021-02-25 | Hitachi High-Tech Analytical Science Finland Oy | Spektrometer mit mehreren Gittern |
JP5592089B2 (ja) * | 2009-08-19 | 2014-09-17 | 浜松ホトニクス株式会社 | 分光モジュール及びその製造方法 |
KR101154714B1 (ko) * | 2009-08-31 | 2012-06-14 | 전남대학교산학협력단 | 평판형 분광기 |
CN102869963A (zh) * | 2010-05-05 | 2013-01-09 | 台湾超微光学股份有限公司 | 微型光谱仪的光学机构 |
JP5538194B2 (ja) * | 2010-11-30 | 2014-07-02 | ソニー株式会社 | 光学装置及び電子機器 |
DE102011078756A1 (de) * | 2011-07-06 | 2013-01-10 | Siemens Aktiengesellschaft | Vorrichtung und Verfahren zur Reduzierung von Streustrahlung bei Spektrometern mittels Innenwänden |
DE102012210954B4 (de) * | 2012-06-27 | 2022-10-20 | Nico Correns | Spektrometeranordnung |
CN102998089B (zh) * | 2012-11-23 | 2015-11-25 | 北京振兴计量测试研究所 | 一种极远紫外探测器校准装置 |
CN103017905B (zh) * | 2012-12-31 | 2016-04-20 | 深圳先进技术研究院 | 集成平面变栅距光栅和微狭缝的微型光谱仪及其制造方法 |
EP2857810A1 (en) * | 2013-10-02 | 2015-04-08 | Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO | Monolith spectrometer |
KR101587241B1 (ko) * | 2013-12-20 | 2016-01-20 | (주)럭스콤 | 실시간 광학 스펙트럼 분석을 위한 방법 및 장치 |
JP6251073B2 (ja) * | 2014-02-05 | 2017-12-20 | 浜松ホトニクス株式会社 | 分光器、及び分光器の製造方法 |
GB2537675B (en) | 2015-04-24 | 2018-10-17 | Qioptiq Ltd | Waveguide for multispectral fusion |
KR101823096B1 (ko) * | 2016-05-30 | 2018-01-30 | 지오씨 주식회사 | 평판형 분광 모듈 및 그 제조방법 |
TWI610066B (zh) | 2016-07-12 | 2018-01-01 | 台灣超微光學股份有限公司 | 光譜儀及其製作方法 |
DE102016225344A1 (de) * | 2016-12-16 | 2018-06-21 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | System zur Analyse von elektromagnetischer Strahlung und Bauelement zur Herstellung desselben |
KR102248608B1 (ko) * | 2019-12-13 | 2021-05-06 | 지오씨 주식회사 | 분광형 압력측정장치 |
US11639873B2 (en) * | 2020-04-15 | 2023-05-02 | Viavi Solutions Inc. | High resolution multi-pass optical spectrum analyzer |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1076393A (en) * | 1964-10-29 | 1967-07-19 | Ibm | An optical system |
JPS556320A (en) * | 1978-06-27 | 1980-01-17 | Ritsuo Hasumi | Spectral module |
US4375919A (en) * | 1979-04-25 | 1983-03-08 | Baylor University | Multiple entrance aperture dispersive optical spectrometer |
JPS56100323A (en) * | 1980-01-12 | 1981-08-12 | Ritsuo Hasumi | Thick film spectrometer for light wavelength meter |
GB8629283D0 (en) * | 1986-12-08 | 1987-01-14 | Gen Electric Co Plc | Radiation meters |
US5026160A (en) * | 1989-10-04 | 1991-06-25 | The United States Of America As Represented By The Secretary Of The Navy | Monolithic optical programmable spectrograph (MOPS) |
FR2680012B1 (fr) * | 1991-07-30 | 1994-12-09 | Sextant Avionique | Dispositif de dispersion spectrale. |
DE4223741A1 (de) * | 1992-07-18 | 1994-01-27 | Manfred Prof Riemann | Verfahren und Anordnung zur Messung von strahlungsphysikalischen und lichttechnischen Grundgrößen |
-
1994
- 1994-08-11 GB GB9416223A patent/GB9416223D0/en active Pending
-
1995
- 1995-08-11 KR KR1019970700899A patent/KR100344161B1/ko not_active IP Right Cessation
- 1995-08-11 CN CN95194576A patent/CN1079947C/zh not_active Expired - Fee Related
- 1995-08-11 DE DE69514237T patent/DE69514237T2/de not_active Expired - Fee Related
- 1995-08-11 ZA ZA956700A patent/ZA956700B/xx unknown
- 1995-08-11 AT AT95928548T patent/ATE188290T1/de not_active IP Right Cessation
- 1995-08-11 JP JP8507126A patent/JPH10504104A/ja not_active Ceased
- 1995-08-11 US US08/776,792 patent/US5812262A/en not_active Expired - Fee Related
- 1995-08-11 CA CA002197340A patent/CA2197340A1/en not_active Abandoned
- 1995-08-11 AU AU32270/95A patent/AU685998B2/en not_active Ceased
- 1995-08-11 NZ NZ291207A patent/NZ291207A/en unknown
- 1995-08-11 WO PCT/GB1995/001902 patent/WO1996005487A1/en active IP Right Grant
- 1995-08-11 EP EP95928548A patent/EP0775297B1/en not_active Expired - Lifetime
- 1995-08-11 ES ES95928548T patent/ES2143064T3/es not_active Expired - Lifetime
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005308495A (ja) * | 2004-04-20 | 2005-11-04 | Hamamatsu Photonics Kk | 分光器及びそれを用いた測定装置 |
JP4627410B2 (ja) * | 2004-04-20 | 2011-02-09 | 浜松ホトニクス株式会社 | 分光器を用いた測定装置 |
Also Published As
Publication number | Publication date |
---|---|
ATE188290T1 (de) | 2000-01-15 |
AU685998B2 (en) | 1998-01-29 |
NZ291207A (en) | 1998-07-28 |
CN1079947C (zh) | 2002-02-27 |
DE69514237D1 (de) | 2000-02-03 |
KR100344161B1 (ko) | 2002-11-29 |
EP0775297A1 (en) | 1997-05-28 |
ES2143064T3 (es) | 2000-05-01 |
AU3227095A (en) | 1996-03-07 |
DE69514237T2 (de) | 2000-08-10 |
US5812262A (en) | 1998-09-22 |
ZA956700B (en) | 1996-04-10 |
WO1996005487A1 (en) | 1996-02-22 |
GB9416223D0 (en) | 1994-10-05 |
CN1155330A (zh) | 1997-07-23 |
CA2197340A1 (en) | 1996-02-22 |
EP0775297B1 (en) | 1999-12-29 |
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