DE69514237D1 - Strahlungsdetektor - Google Patents

Strahlungsdetektor

Info

Publication number
DE69514237D1
DE69514237D1 DE69514237T DE69514237T DE69514237D1 DE 69514237 D1 DE69514237 D1 DE 69514237D1 DE 69514237 T DE69514237 T DE 69514237T DE 69514237 T DE69514237 T DE 69514237T DE 69514237 D1 DE69514237 D1 DE 69514237D1
Authority
DE
Germany
Prior art keywords
pct
sec
radiation detector
date
date apr
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69514237T
Other languages
English (en)
Other versions
DE69514237T2 (de
Inventor
Andrew Ridyard
David Shrewsbury
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
4D Controls Ltd
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of DE69514237D1 publication Critical patent/DE69514237D1/de
Application granted granted Critical
Publication of DE69514237T2 publication Critical patent/DE69514237T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12007Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/42Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/429Photometry, e.g. photographic exposure meter using electric radiation detectors applied to measurement of ultraviolet light
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0256Compact construction
    • G01J3/0259Monolithic
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12Generating the spectrum; Monochromators
    • G01J3/18Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/2803Investigating the spectrum using photoelectric array detector
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0262Constructional arrangements for removing stray light
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/28Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29304Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by diffraction, e.g. grating
    • G02B6/29316Light guides comprising a diffractive element, e.g. grating in or on the light guide such that diffracted light is confined in the light guide
    • G02B6/29325Light guides comprising a diffractive element, e.g. grating in or on the light guide such that diffracted light is confined in the light guide of the slab or planar or plate like form, i.e. confinement in a single transverse dimension only
    • G02B6/29328Diffractive elements operating in reflection
DE69514237T 1994-08-11 1995-08-11 Strahlungsdetektor Expired - Fee Related DE69514237T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB9416223A GB9416223D0 (en) 1994-08-11 1994-08-11 Radiation detector
PCT/GB1995/001902 WO1996005487A1 (en) 1994-08-11 1995-08-11 Radiation detector

Publications (2)

Publication Number Publication Date
DE69514237D1 true DE69514237D1 (de) 2000-02-03
DE69514237T2 DE69514237T2 (de) 2000-08-10

Family

ID=10759726

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69514237T Expired - Fee Related DE69514237T2 (de) 1994-08-11 1995-08-11 Strahlungsdetektor

Country Status (14)

Country Link
US (1) US5812262A (de)
EP (1) EP0775297B1 (de)
JP (1) JPH10504104A (de)
KR (1) KR100344161B1 (de)
CN (1) CN1079947C (de)
AT (1) ATE188290T1 (de)
AU (1) AU685998B2 (de)
CA (1) CA2197340A1 (de)
DE (1) DE69514237T2 (de)
ES (1) ES2143064T3 (de)
GB (1) GB9416223D0 (de)
NZ (1) NZ291207A (de)
WO (1) WO1996005487A1 (de)
ZA (1) ZA956700B (de)

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19622077C2 (de) * 1996-05-31 1999-11-04 Kratz Josef Gmbh Vorrichtung zur Vermessung von Bräunungsgeräten
DE19801454C2 (de) * 1998-01-16 1999-12-09 Fraunhofer Ges Forschung Verfahren und Vorrichtung zur Bestimmung eines UV-Strahlungs-Indexes
DE19845701A1 (de) 1998-10-05 2000-04-06 Palme Dieter Anordnungen zur Überwachung der Performance von DWDM-Mehrwellenlängensystemen
WO2000040935A1 (en) * 1999-01-08 2000-07-13 Adc Telecommunications, Inc. Spectrometer
GB2362460A (en) * 2000-05-19 2001-11-21 William Howard Considine Spectroscope
WO2002004901A1 (en) * 2000-07-11 2002-01-17 Adc Telecommunications, Inc. Monitoring apparatus for optical transmission systems
US6816260B2 (en) * 2001-05-17 2004-11-09 Thorlabs Gmbh Fiber polarimeter, the use thereof, as well as polarimetric method
US7495765B2 (en) * 2001-05-17 2009-02-24 Thorlabs Gmbh Fiber polarimeter, the use thereof, as well as polarimetric method
DE10137428A1 (de) * 2001-07-27 2003-02-20 Karlsruhe Forschzent Vorrichtung zur Messung eines Spektrums
DE10304312A1 (de) * 2003-02-04 2004-08-12 Carl Zeiss Jena Gmbh Kompakt-Spektrometer
US7034935B1 (en) * 2003-03-24 2006-04-25 Mpb Technologies Inc. High performance miniature spectrometer
JP4409860B2 (ja) * 2003-05-28 2010-02-03 浜松ホトニクス株式会社 光検出器を用いた分光器
JP4627410B2 (ja) * 2004-04-20 2011-02-09 浜松ホトニクス株式会社 分光器を用いた測定装置
CN100516791C (zh) * 2006-12-28 2009-07-22 华南师范大学 紫外线强度检测方法及装置
US7817274B2 (en) 2007-10-05 2010-10-19 Jingyun Zhang Compact spectrometer
US8345226B2 (en) * 2007-11-30 2013-01-01 Jingyun Zhang Spectrometers miniaturized for working with cellular phones and other portable electronic devices
DE102008054733B4 (de) * 2008-12-16 2021-02-25 Hitachi High-Tech Analytical Science Finland Oy Spektrometer mit mehreren Gittern
JP5592089B2 (ja) * 2009-08-19 2014-09-17 浜松ホトニクス株式会社 分光モジュール及びその製造方法
KR101154714B1 (ko) * 2009-08-31 2012-06-14 전남대학교산학협력단 평판형 분광기
WO2011137584A1 (zh) * 2010-05-05 2011-11-10 台湾超微光学股份有限公司 微型光谱仪的光学机构
JP5538194B2 (ja) * 2010-11-30 2014-07-02 ソニー株式会社 光学装置及び電子機器
DE102011078756A1 (de) * 2011-07-06 2013-01-10 Siemens Aktiengesellschaft Vorrichtung und Verfahren zur Reduzierung von Streustrahlung bei Spektrometern mittels Innenwänden
DE102012210954B4 (de) * 2012-06-27 2022-10-20 Nico Correns Spektrometeranordnung
CN102998089B (zh) * 2012-11-23 2015-11-25 北京振兴计量测试研究所 一种极远紫外探测器校准装置
CN103017905B (zh) * 2012-12-31 2016-04-20 深圳先进技术研究院 集成平面变栅距光栅和微狭缝的微型光谱仪及其制造方法
EP2857810A1 (de) * 2013-10-02 2015-04-08 Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO Monolithisches Spektrometer
KR101587241B1 (ko) * 2013-12-20 2016-01-20 (주)럭스콤 실시간 광학 스펙트럼 분석을 위한 방법 및 장치
JP6251073B2 (ja) * 2014-02-05 2017-12-20 浜松ホトニクス株式会社 分光器、及び分光器の製造方法
GB2537675B (en) 2015-04-24 2018-10-17 Qioptiq Ltd Waveguide for multispectral fusion
KR101823096B1 (ko) * 2016-05-30 2018-01-30 지오씨 주식회사 평판형 분광 모듈 및 그 제조방법
TWI610066B (zh) 2016-07-12 2018-01-01 台灣超微光學股份有限公司 光譜儀及其製作方法
DE102016225344A1 (de) * 2016-12-16 2018-06-21 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. System zur Analyse von elektromagnetischer Strahlung und Bauelement zur Herstellung desselben
KR102248608B1 (ko) * 2019-12-13 2021-05-06 지오씨 주식회사 분광형 압력측정장치
US11639873B2 (en) * 2020-04-15 2023-05-02 Viavi Solutions Inc. High resolution multi-pass optical spectrum analyzer

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1076393A (en) * 1964-10-29 1967-07-19 Ibm An optical system
JPS556320A (en) * 1978-06-27 1980-01-17 Ritsuo Hasumi Spectral module
US4375919A (en) * 1979-04-25 1983-03-08 Baylor University Multiple entrance aperture dispersive optical spectrometer
JPS56100323A (en) * 1980-01-12 1981-08-12 Ritsuo Hasumi Thick film spectrometer for light wavelength meter
GB8629283D0 (en) * 1986-12-08 1987-01-14 Gen Electric Co Plc Radiation meters
US5026160A (en) * 1989-10-04 1991-06-25 The United States Of America As Represented By The Secretary Of The Navy Monolithic optical programmable spectrograph (MOPS)
FR2680012B1 (fr) * 1991-07-30 1994-12-09 Sextant Avionique Dispositif de dispersion spectrale.
DE4223741A1 (de) * 1992-07-18 1994-01-27 Manfred Prof Riemann Verfahren und Anordnung zur Messung von strahlungsphysikalischen und lichttechnischen Grundgrößen

Also Published As

Publication number Publication date
US5812262A (en) 1998-09-22
KR100344161B1 (ko) 2002-11-29
NZ291207A (en) 1998-07-28
WO1996005487A1 (en) 1996-02-22
EP0775297B1 (de) 1999-12-29
EP0775297A1 (de) 1997-05-28
GB9416223D0 (en) 1994-10-05
CN1079947C (zh) 2002-02-27
AU3227095A (en) 1996-03-07
JPH10504104A (ja) 1998-04-14
DE69514237T2 (de) 2000-08-10
ES2143064T3 (es) 2000-05-01
AU685998B2 (en) 1998-01-29
ATE188290T1 (de) 2000-01-15
ZA956700B (en) 1996-04-10
CN1155330A (zh) 1997-07-23
CA2197340A1 (en) 1996-02-22

Similar Documents

Publication Publication Date Title
ATE188290T1 (de) Strahlungsdetektor
ATE283472T1 (de) Spektrometer
AU2003251669A1 (en) Grating based spectral filter for eliminating out of band radiation in an extreme ultra-violet lithography system
EP0744599A3 (de) Optisches Spektrometer zur Erfassung von Spektren in unterschiedlichen Bereichen
IT8120091A0 (it) Impianto di scansione laserportatile e relativo procedimentodi scansione.
IL141536A (en) Device for measuring translation, rotation or velocity via light beam interference
EP0671615A3 (de) Optischer Spektralanalysator mit einem Doppelmonochromator
EP0756169A3 (de) Spektralmessgerät und automatisches Analysenmessgerät
ATE206035T1 (de) Haferextrakte enthaltende sonnenschutzmittel
BR9713109A (pt) Derivados simétricos de triazina
ATE248332T1 (de) Empfangsvorrichtung für sonnenenergie
WO1997026514A3 (en) Spectral analyser and direction indicator
ATE91784T1 (de) Strahlungsmesser.
ATE118090T1 (de) Zweistrahl-spektrometer.
FR2688641B1 (fr) Amplificateur optique integre et laser mettant en óoeuvre un tel amplificateur.
ES545795A0 (es) Un aparato analizador espectral e indicador de direccion para recibir una radiacion incidente colimada o esencialmente colimada.
ES2008967A6 (es) Composicion cosmetica filtrante en forma de emulsion del tipo aceite en agua y procedimiento para prepararla.
ATE300729T1 (de) Spektrometer mit doppeltem ausseraxialen schmidt- teleskop
TR28759A (tr) Optik fiber düzenleyici.
EP0709938A3 (de) Vorrichtung zur Wellenleiterkopplung, Vorrichtung zur Strahlbündelung, und Gerät für optische Platten
Burke The value of sunscreens.
GB2218802A (en) An opto-electrical device
ITTO920682A1 (it) Procedimento di campionamento ottico, particolarmente per fasci laser, e relativo dispositivo.
Feldman Measurements of high resolution spectra on the Omega laser at Rochester University
Hutley Concave diffraction gratings

Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: 4D CONTROLS LTD., REDRUTH, CORNWALL, GB

8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee