JP2005522689A5 - - Google Patents

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Publication number
JP2005522689A5
JP2005522689A5 JP2003584668A JP2003584668A JP2005522689A5 JP 2005522689 A5 JP2005522689 A5 JP 2005522689A5 JP 2003584668 A JP2003584668 A JP 2003584668A JP 2003584668 A JP2003584668 A JP 2003584668A JP 2005522689 A5 JP2005522689 A5 JP 2005522689A5
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JP
Japan
Prior art keywords
layer
silicon
chip
drie
etched
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2003584668A
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English (en)
Japanese (ja)
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JP2005522689A (ja
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Publication date
Priority claimed from US10/121,240 external-priority patent/US6955914B2/en
Application filed filed Critical
Publication of JP2005522689A publication Critical patent/JP2005522689A/ja
Publication of JP2005522689A5 publication Critical patent/JP2005522689A5/ja
Pending legal-status Critical Current

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JP2003584668A 2002-04-10 2003-04-08 分子的に平滑な表面の形成方法 Pending JP2005522689A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/121,240 US6955914B2 (en) 2002-04-10 2002-04-10 Method for making a molecularly smooth surface
PCT/US2003/011227 WO2003087771A2 (en) 2002-04-10 2003-04-08 Method for making a molecularly smooth surface

Publications (2)

Publication Number Publication Date
JP2005522689A JP2005522689A (ja) 2005-07-28
JP2005522689A5 true JP2005522689A5 (OSRAM) 2006-05-25

Family

ID=28790279

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003584668A Pending JP2005522689A (ja) 2002-04-10 2003-04-08 分子的に平滑な表面の形成方法

Country Status (6)

Country Link
US (1) US6955914B2 (OSRAM)
EP (1) EP1497408A4 (OSRAM)
JP (1) JP2005522689A (OSRAM)
AU (1) AU2003226346A1 (OSRAM)
CA (1) CA2481358A1 (OSRAM)
WO (1) WO2003087771A2 (OSRAM)

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US7648844B2 (en) 2005-05-02 2010-01-19 Bioscale, Inc. Method and apparatus for detection of analyte using an acoustic device
US7749445B2 (en) 2005-05-02 2010-07-06 Bioscale, Inc. Method and apparatus for analyzing bioprocess fluids
US7611908B2 (en) 2005-05-02 2009-11-03 Bioscale, Inc. Method and apparatus for therapeutic drug monitoring using an acoustic device
US7300631B2 (en) 2005-05-02 2007-11-27 Bioscale, Inc. Method and apparatus for detection of analyte using a flexural plate wave device and magnetic particles
EP1893336A2 (en) * 2005-05-19 2008-03-05 Koninklijke Philips Electronics N.V. Functional assembly and method of obtaining it
US8004021B2 (en) * 2006-04-21 2011-08-23 Bioscale, Inc. Microfabricated devices and method for fabricating microfabricated devices
US20080121042A1 (en) * 2006-11-27 2008-05-29 Bioscale, Inc. Fluid paths in etchable materials
US7999440B2 (en) * 2006-11-27 2011-08-16 Bioscale, Inc. Micro-fabricated devices having a suspended membrane or plate structure
US8354280B2 (en) 2007-09-06 2013-01-15 Bioscale, Inc. Reusable detection surfaces and methods of using same
JP2009156827A (ja) * 2007-12-28 2009-07-16 Univ Waseda 半導体センシング用電界効果型トランジスタ及びこれを用いた半導体センシングデバイス
US20110270021A1 (en) 2010-04-30 2011-11-03 Allergan, Inc. Electronically enhanced access port for a fluid filled implant
US20110270028A1 (en) * 2010-04-30 2011-11-03 Allergan, Inc. Biocompatible and biostable implantable medical device

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US5776672A (en) * 1990-09-28 1998-07-07 Kabushiki Kaisha Toshiba Gene detection method
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US5312527A (en) * 1992-10-06 1994-05-17 Concordia University Voltammetric sequence-selective sensor for target polynucleotide sequences
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