JP2005521550A - プラズマ重合による被膜の調製 - Google Patents
プラズマ重合による被膜の調製 Download PDFInfo
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- JP2005521550A JP2005521550A JP2003580003A JP2003580003A JP2005521550A JP 2005521550 A JP2005521550 A JP 2005521550A JP 2003580003 A JP2003580003 A JP 2003580003A JP 2003580003 A JP2003580003 A JP 2003580003A JP 2005521550 A JP2005521550 A JP 2005521550A
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- 238000006116 polymerization reaction Methods 0.000 title description 9
- 238000000576 coating method Methods 0.000 title 1
- 238000002360 preparation method Methods 0.000 title 1
- 239000000178 monomer Substances 0.000 claims abstract description 93
- 238000000034 method Methods 0.000 claims abstract description 89
- 229920000642 polymer Polymers 0.000 claims abstract description 49
- 239000000758 substrate Substances 0.000 claims abstract description 48
- 238000007747 plating Methods 0.000 claims abstract description 21
- 239000000126 substance Substances 0.000 claims description 39
- VVJKKWFAADXIJK-UHFFFAOYSA-N Allylamine Chemical compound NCC=C VVJKKWFAADXIJK-UHFFFAOYSA-N 0.000 claims description 26
- 239000000203 mixture Substances 0.000 claims description 23
- 150000001875 compounds Chemical class 0.000 claims description 21
- 238000003556 assay Methods 0.000 claims description 20
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims description 18
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 claims description 17
- 150000001412 amines Chemical class 0.000 claims description 14
- 150000001336 alkenes Chemical class 0.000 claims description 12
- 239000011521 glass Substances 0.000 claims description 11
- 229930195733 hydrocarbon Natural products 0.000 claims description 11
- 150000002430 hydrocarbons Chemical class 0.000 claims description 11
- 150000002894 organic compounds Chemical class 0.000 claims description 11
- -1 polyethylene terephthalate Polymers 0.000 claims description 11
- XWJBRBSPAODJER-UHFFFAOYSA-N 1,7-octadiene Chemical compound C=CCCCCC=C XWJBRBSPAODJER-UHFFFAOYSA-N 0.000 claims description 10
- 238000002493 microarray Methods 0.000 claims description 10
- 239000004215 Carbon black (E152) Substances 0.000 claims description 9
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 9
- 108090000623 proteins and genes Proteins 0.000 claims description 9
- 102000004169 proteins and genes Human genes 0.000 claims description 9
- 150000001735 carboxylic acids Chemical class 0.000 claims description 7
- 229960004624 perflexane Drugs 0.000 claims description 7
- ZJIJAJXFLBMLCK-UHFFFAOYSA-N perfluorohexane Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F ZJIJAJXFLBMLCK-UHFFFAOYSA-N 0.000 claims description 7
- 239000004793 Polystyrene Substances 0.000 claims description 6
- 229920003023 plastic Polymers 0.000 claims description 6
- 239000004033 plastic Substances 0.000 claims description 6
- 239000005020 polyethylene terephthalate Substances 0.000 claims description 6
- 229920000139 polyethylene terephthalate Polymers 0.000 claims description 6
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical compound C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 claims description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 5
- 229920001577 copolymer Polymers 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 229920002223 polystyrene Polymers 0.000 claims description 5
- 239000004800 polyvinyl chloride Substances 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 claims description 4
- 239000005977 Ethylene Substances 0.000 claims description 4
- 239000004743 Polypropylene Substances 0.000 claims description 4
- 239000002253 acid Substances 0.000 claims description 4
- XXROGKLTLUQVRX-UHFFFAOYSA-N allyl alcohol Chemical compound OCC=C XXROGKLTLUQVRX-UHFFFAOYSA-N 0.000 claims description 4
- UQEAIHBTYFGYIE-UHFFFAOYSA-N hexamethyldisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)C UQEAIHBTYFGYIE-UHFFFAOYSA-N 0.000 claims description 4
- 229920001903 high density polyethylene Polymers 0.000 claims description 4
- 239000004700 high-density polyethylene Substances 0.000 claims description 4
- 229920001684 low density polyethylene Polymers 0.000 claims description 4
- 239000004702 low-density polyethylene Substances 0.000 claims description 4
- 229920001155 polypropylene Polymers 0.000 claims description 4
- 229920000915 polyvinyl chloride Polymers 0.000 claims description 4
- ATVJXMYDOSMEPO-UHFFFAOYSA-N 3-prop-2-enoxyprop-1-ene Chemical compound C=CCOCC=C ATVJXMYDOSMEPO-UHFFFAOYSA-N 0.000 claims description 3
- 239000000020 Nitrocellulose Substances 0.000 claims description 3
- 239000004677 Nylon Substances 0.000 claims description 3
- 230000027455 binding Effects 0.000 claims description 3
- 239000000919 ceramic Substances 0.000 claims description 3
- 229920001220 nitrocellulos Polymers 0.000 claims description 3
- 229920001778 nylon Polymers 0.000 claims description 3
- 229920001223 polyethylene glycol Polymers 0.000 claims description 3
- 229920006395 saturated elastomer Polymers 0.000 claims description 3
- UWHCKJMYHZGTIT-UHFFFAOYSA-N tetraethylene glycol Chemical compound OCCOCCOCCOCCO UWHCKJMYHZGTIT-UHFFFAOYSA-N 0.000 claims description 3
- 150000001491 aromatic compounds Chemical class 0.000 claims description 2
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 claims description 2
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 claims description 2
- 150000002391 heterocyclic compounds Chemical class 0.000 claims description 2
- 229920002521 macromolecule Polymers 0.000 claims description 2
- 239000010453 quartz Substances 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 239000000463 material Substances 0.000 description 19
- 239000000523 sample Substances 0.000 description 17
- 239000007789 gas Substances 0.000 description 13
- 238000004458 analytical method Methods 0.000 description 10
- 125000000524 functional group Chemical group 0.000 description 7
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 6
- 239000012159 carrier gas Substances 0.000 description 6
- 238000002764 solid phase assay Methods 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 5
- 125000004432 carbon atom Chemical group C* 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 5
- 230000010349 pulsation Effects 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 238000003491 array Methods 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 229940117927 ethylene oxide Drugs 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 230000001965 increasing effect Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- QTYUSOHYEPOHLV-FNORWQNLSA-N 1,3-Octadiene Chemical compound CCCC\C=C\C=C QTYUSOHYEPOHLV-FNORWQNLSA-N 0.000 description 3
- 108091034117 Oligonucleotide Proteins 0.000 description 3
- JLCPHMBAVCMARE-UHFFFAOYSA-N [3-[[3-[[3-[[3-[[3-[[3-[[3-[[3-[[3-[[3-[[3-[[5-(2-amino-6-oxo-1H-purin-9-yl)-3-[[3-[[3-[[3-[[3-[[3-[[5-(2-amino-6-oxo-1H-purin-9-yl)-3-[[5-(2-amino-6-oxo-1H-purin-9-yl)-3-hydroxyoxolan-2-yl]methoxy-hydroxyphosphoryl]oxyoxolan-2-yl]methoxy-hydroxyphosphoryl]oxy-5-(5-methyl-2,4-dioxopyrimidin-1-yl)oxolan-2-yl]methoxy-hydroxyphosphoryl]oxy-5-(6-aminopurin-9-yl)oxolan-2-yl]methoxy-hydroxyphosphoryl]oxy-5-(6-aminopurin-9-yl)oxolan-2-yl]methoxy-hydroxyphosphoryl]oxy-5-(6-aminopurin-9-yl)oxolan-2-yl]methoxy-hydroxyphosphoryl]oxy-5-(6-aminopurin-9-yl)oxolan-2-yl]methoxy-hydroxyphosphoryl]oxyoxolan-2-yl]methoxy-hydroxyphosphoryl]oxy-5-(5-methyl-2,4-dioxopyrimidin-1-yl)oxolan-2-yl]methoxy-hydroxyphosphoryl]oxy-5-(4-amino-2-oxopyrimidin-1-yl)oxolan-2-yl]methoxy-hydroxyphosphoryl]oxy-5-(5-methyl-2,4-dioxopyrimidin-1-yl)oxolan-2-yl]methoxy-hydroxyphosphoryl]oxy-5-(5-methyl-2,4-dioxopyrimidin-1-yl)oxolan-2-yl]methoxy-hydroxyphosphoryl]oxy-5-(6-aminopurin-9-yl)oxolan-2-yl]methoxy-hydroxyphosphoryl]oxy-5-(6-aminopurin-9-yl)oxolan-2-yl]methoxy-hydroxyphosphoryl]oxy-5-(4-amino-2-oxopyrimidin-1-yl)oxolan-2-yl]methoxy-hydroxyphosphoryl]oxy-5-(4-amino-2-oxopyrimidin-1-yl)oxolan-2-yl]methoxy-hydroxyphosphoryl]oxy-5-(4-amino-2-oxopyrimidin-1-yl)oxolan-2-yl]methoxy-hydroxyphosphoryl]oxy-5-(6-aminopurin-9-yl)oxolan-2-yl]methoxy-hydroxyphosphoryl]oxy-5-(4-amino-2-oxopyrimidin-1-yl)oxolan-2-yl]methyl [5-(6-aminopurin-9-yl)-2-(hydroxymethyl)oxolan-3-yl] hydrogen phosphate Polymers Cc1cn(C2CC(OP(O)(=O)OCC3OC(CC3OP(O)(=O)OCC3OC(CC3O)n3cnc4c3nc(N)[nH]c4=O)n3cnc4c3nc(N)[nH]c4=O)C(COP(O)(=O)OC3CC(OC3COP(O)(=O)OC3CC(OC3COP(O)(=O)OC3CC(OC3COP(O)(=O)OC3CC(OC3COP(O)(=O)OC3CC(OC3COP(O)(=O)OC3CC(OC3COP(O)(=O)OC3CC(OC3COP(O)(=O)OC3CC(OC3COP(O)(=O)OC3CC(OC3COP(O)(=O)OC3CC(OC3COP(O)(=O)OC3CC(OC3COP(O)(=O)OC3CC(OC3COP(O)(=O)OC3CC(OC3COP(O)(=O)OC3CC(OC3COP(O)(=O)OC3CC(OC3COP(O)(=O)OC3CC(OC3COP(O)(=O)OC3CC(OC3CO)n3cnc4c(N)ncnc34)n3ccc(N)nc3=O)n3cnc4c(N)ncnc34)n3ccc(N)nc3=O)n3ccc(N)nc3=O)n3ccc(N)nc3=O)n3cnc4c(N)ncnc34)n3cnc4c(N)ncnc34)n3cc(C)c(=O)[nH]c3=O)n3cc(C)c(=O)[nH]c3=O)n3ccc(N)nc3=O)n3cc(C)c(=O)[nH]c3=O)n3cnc4c3nc(N)[nH]c4=O)n3cnc4c(N)ncnc34)n3cnc4c(N)ncnc34)n3cnc4c(N)ncnc34)n3cnc4c(N)ncnc34)O2)c(=O)[nH]c1=O JLCPHMBAVCMARE-UHFFFAOYSA-N 0.000 description 3
- 238000010276 construction Methods 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 230000002209 hydrophobic effect Effects 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 3
- 230000000704 physical effect Effects 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 238000001179 sorption measurement Methods 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- QUSNBJAOOMFDIB-UHFFFAOYSA-N Ethylamine Chemical compound CCN QUSNBJAOOMFDIB-UHFFFAOYSA-N 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 238000011331 genomic analysis Methods 0.000 description 2
- 238000009396 hybridization Methods 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 230000037361 pathway Effects 0.000 description 2
- 239000012071 phase Substances 0.000 description 2
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 2
- 239000004417 polycarbonate Substances 0.000 description 2
- 229920000515 polycarbonate Polymers 0.000 description 2
- 239000004926 polymethyl methacrylate Substances 0.000 description 2
- 102000004196 processed proteins & peptides Human genes 0.000 description 2
- 108090000765 processed proteins & peptides Proteins 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 238000012216 screening Methods 0.000 description 2
- 239000007858 starting material Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 230000003075 superhydrophobic effect Effects 0.000 description 2
- 238000012876 topography Methods 0.000 description 2
- 150000007934 α,β-unsaturated carboxylic acids Chemical class 0.000 description 2
- 108091032973 (ribonucleotides)n+m Proteins 0.000 description 1
- HIXDQWDOVZUNNA-UHFFFAOYSA-N 2-(3,4-dimethoxyphenyl)-5-hydroxy-7-methoxychromen-4-one Chemical compound C=1C(OC)=CC(O)=C(C(C=2)=O)C=1OC=2C1=CC=C(OC)C(OC)=C1 HIXDQWDOVZUNNA-UHFFFAOYSA-N 0.000 description 1
- 108020004414 DNA Proteins 0.000 description 1
- 238000000018 DNA microarray Methods 0.000 description 1
- WJYIASZWHGOTOU-UHFFFAOYSA-N Heptylamine Chemical compound CCCCCCCN WJYIASZWHGOTOU-UHFFFAOYSA-N 0.000 description 1
- VAYOSLLFUXYJDT-RDTXWAMCSA-N Lysergic acid diethylamide Chemical compound C1=CC(C=2[C@H](N(C)C[C@@H](C=2)C(=O)N(CC)CC)C2)=C3C2=CNC3=C1 VAYOSLLFUXYJDT-RDTXWAMCSA-N 0.000 description 1
- 229920002873 Polyethylenimine Polymers 0.000 description 1
- ACIAHEMYLLBZOI-ZZXKWVIFSA-N Unsaturated alcohol Chemical compound CC\C(CO)=C/C ACIAHEMYLLBZOI-ZZXKWVIFSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- 238000001261 affinity purification Methods 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 150000001335 aliphatic alkanes Chemical class 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- 150000001408 amides Chemical class 0.000 description 1
- 125000003277 amino group Chemical group 0.000 description 1
- 150000008064 anhydrides Chemical class 0.000 description 1
- 239000000427 antigen Substances 0.000 description 1
- 102000036639 antigens Human genes 0.000 description 1
- 108091007433 antigens Proteins 0.000 description 1
- 125000003118 aryl group Chemical class 0.000 description 1
- 230000001588 bifunctional effect Effects 0.000 description 1
- 230000004071 biological effect Effects 0.000 description 1
- 239000012472 biological sample Substances 0.000 description 1
- 150000001720 carbohydrates Chemical class 0.000 description 1
- 235000014633 carbohydrates Nutrition 0.000 description 1
- 239000011203 carbon fibre reinforced carbon Substances 0.000 description 1
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 description 1
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 1
- 125000002843 carboxylic acid group Chemical group 0.000 description 1
- 238000012412 chemical coupling Methods 0.000 description 1
- 125000003636 chemical group Chemical group 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 239000002131 composite material Chemical group 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000007334 copolymerization reaction Methods 0.000 description 1
- 229920006037 cross link polymer Polymers 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000001212 derivatisation Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- SWXVUIWOUIDPGS-UHFFFAOYSA-N diacetone alcohol Natural products CC(=O)CC(C)(C)O SWXVUIWOUIDPGS-UHFFFAOYSA-N 0.000 description 1
- 238000003745 diagnosis Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 125000002897 diene group Chemical group 0.000 description 1
- 150000001993 dienes Chemical class 0.000 description 1
- 208000037265 diseases, disorders, signs and symptoms Diseases 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 1
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
- 230000000763 evoking effect Effects 0.000 description 1
- 230000005281 excited state Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 235000013305 food Nutrition 0.000 description 1
- 125000002485 formyl group Chemical class [H]C(*)=O 0.000 description 1
- 238000001502 gel electrophoresis Methods 0.000 description 1
- 238000005227 gel permeation chromatography Methods 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 150000004676 glycans Chemical class 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000005283 ground state Effects 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- PGFXOWRDDHCDTE-UHFFFAOYSA-N hexafluoropropylene oxide Chemical compound FC(F)(F)C1(F)OC1(F)F PGFXOWRDDHCDTE-UHFFFAOYSA-N 0.000 description 1
- 150000002466 imines Chemical class 0.000 description 1
- 239000012678 infectious agent Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000009533 lab test Methods 0.000 description 1
- 238000002032 lab-on-a-chip Methods 0.000 description 1
- 239000003446 ligand Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000009149 molecular binding Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910017464 nitrogen compound Inorganic materials 0.000 description 1
- 150000002830 nitrogen compounds Chemical class 0.000 description 1
- 239000002773 nucleotide Substances 0.000 description 1
- 125000003729 nucleotide group Chemical group 0.000 description 1
- QTYUSOHYEPOHLV-UHFFFAOYSA-N octadiene group Chemical group C=CC=CCCCC QTYUSOHYEPOHLV-UHFFFAOYSA-N 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 229920001184 polypeptide Polymers 0.000 description 1
- 229920001282 polysaccharide Polymers 0.000 description 1
- 239000005017 polysaccharide Substances 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 238000002203 pretreatment Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 1
- ZNZJJSYHZBXQSM-UHFFFAOYSA-N propane-2,2-diamine Chemical compound CC(C)(N)N ZNZJJSYHZBXQSM-UHFFFAOYSA-N 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000013341 scale-up Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 150000003573 thiols Chemical class 0.000 description 1
- 238000013519 translation Methods 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
- YFNKIDBQEZZDLK-UHFFFAOYSA-N triglyme Chemical compound COCCOCCOCCOC YFNKIDBQEZZDLK-UHFFFAOYSA-N 0.000 description 1
- 239000012855 volatile organic compound Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/62—Plasma-deposition of organic layers
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F255/00—Macromolecular compounds obtained by polymerising monomers on to polymers of hydrocarbons as defined in group C08F10/00
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F283/00—Macromolecular compounds obtained by polymerising monomers on to polymers provided for in subclass C08G
- C08F283/06—Macromolecular compounds obtained by polymerising monomers on to polymers provided for in subclass C08G on to polyethers, polyoxymethylenes or polyacetals
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F291/00—Macromolecular compounds obtained by polymerising monomers on to macromolecular compounds according to more than one of the groups C08F251/00 - C08F289/00
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
- G01N33/50—Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
- G01N33/53—Immunoassay; Biospecific binding assay; Materials therefor
- G01N33/543—Immunoassay; Biospecific binding assay; Materials therefor with an insoluble carrier for immobilising immunochemicals
- G01N33/54393—Improving reaction conditions or stability, e.g. by coating or irradiation of surface, by reduction of non-specific binding, by promotion of specific binding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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Abstract
Description
プラズマ重合の方法は国際公開第01/31339号パンフレットに開示され、その全体が引用により取り入れられている。
アリルアミンをAldrich(UK)から購入して、使用前に溶解ガスを除去するために数回の凍結−ポンプ−融解サイクルを繰り返した。基板としてシリコンウェファーを使用し、イソプロピルアルコールで洗浄後、両面粘着テープを使用してXYZ台に取り付けた。〜100ミクロンの孔から成るマスクをマスク板に付け、基板をマスク板の数ミクロン以内まで持ち上げた。
方法はプラズマ微小点につき前記のものと同様である。微細経路をめっきするためには、プラズマ組成物を同様に維持し、試料をマスク板の下方を移動して、プラズマを有効に使用して、基板上に経路および特徴物を「描く」。
2種の異なるモノマー化合物を使用することにより官能性物質の勾配をめっきした。アリルアミンおよびアクリル酸をAldrich(UK)から購入して、溶解気体を除去するために数回の凍結−ポンプ−融解サイクルにかけた。1個の〜100ミクロンの孔から成るマスクをマスク板に付け、基板としての1片のシリコンウェファーを、接触させずに(前記のように)マスクにできるだけ近位に持ち上げた。最初にアクリル酸のモノマー供給物のみを使用してプラズマを励起した。次にモノマーガスの混合物をマスクの下方の試料の直線移動に付随して変化させた。従って初回のめっきは全体的にアクリル酸プラズマポリマーから成り、他方その後のめっきはアリルアミンとアクリル酸の混合物から成り、そしてめっきの最終部分は全体的にアリルアミンから成った。従って実験期間中、試料の移動範囲にわたり、表面の組成はカルボン酸基により支配されるものからアミン基が支配するものに滑らかに変化した。
基板材料上への直接的めっきに加えて、書き込みの前に表面を洗浄するか、もしくは地形学的特徴物を基板中にエッチングするために前処理を使用することができる。これは単一の処理で表面上に3−次元の官能化構造物(例えば底部に沿ってめっきされたアミン官能基をもつ「溝(trench)」)の構成を可能にする。
Claims (40)
- 表面上に少なくとも1種のプラズマモノマーをめっきすること、ただし前記モノマーのめっき中に、処理される表面上にわたりモノマー源を移動させて不均一なプラズマポリマー表面を製造する手段が提供される、を含んで成る、基板の少なくとも1表面の少なくとも一部を調製する方法。
- 前記手段が前記モノマー源に対して前記基板を移動させる請求項1記載の方法。
- 前記手段が前記基板に対して前記モノマー源を移動させる請求項1記載の方法。
- 表面が少なくとも1種のモノマーの少なくとも1種のプラズマポリマーを含んで成り、そこで前記プラズマポリマーの濃度が前記表面全体もしくはその一部上で不均一である、請求項1〜3のいずれかに記載の方法。
- 少なくとも2種のモノマーから形成された2種以上のプラズマポリマーを含んで成る表面が提供される、前記請求項のいずれかに記載の方法。
- 少なくとも1種のプラズマポリマーの濃度が前記表面全体もしくはその一部上で不均一である、請求項5のいずれかに記載の方法。
- モノマーが揮発性アルコールである前記請求項のいずれかに記載の方法。
- 前記モノマーが揮発性酸である請求項1〜6のいずれかに記載の方法。
- モノマーが揮発性アミンである請求項1〜6のいずれかに記載の方法。
- モノマーが揮発性炭化水素である請求項1〜6のいずれかに記載の方法。
- モノマーが揮発性炭化フッ素である請求項1〜6のいずれかに記載の方法。
- モノマーがエチレンオキシド−型の分子である請求項1〜6のいずれかに記載の方法。
- モノマーが揮発性シロキサンである請求項1〜6のいずれかに記載の方法。
- 前記モノマーがアリルアルコール、アクリル酸、オクタ−1,7−ジエン、アリルアミン、ペルフルオロヘキサン、テトラエチレングリコールモノアリルエーテルもしくはヘキサメチルジシロキサン(HMDSO):から成る群から選択される少なくとも1種である請求項1〜6のいずれかに記載の方法。
- 前記ポリマーが単一のモノマーから成る請求項4〜14のいずれかに記載の方法。
- 前記モノマーが本質的に、エチレン性不飽和有機化合物から成る請求項15記載の方法。
- モノマーが本質的に、単一の、エチレン性不飽和有機化合物から成る請求項16記載の方法。
- モノマーがエチレンオキシド型の分子から成る請求項17記載の方法。
- 化合物がアルケン、カルボン酸、アルコールもしくはアミンである請求項16もしくは17記載の方法。
- モノマーが2種以上の、エチレン性不飽和有機化合物の混合物から成る請求項15記載の方法。
- 化合物がアルケン、カルボン酸、アルコールもしくはアミン:から成る群から選択される請求項20記載の方法。
- モノマーが本質的に飽和有機化合物から成る請求項15記載の方法。
- モノマーが本質的に芳香族化合物もしくは複素環式化合物から成る請求項15記載の方法。
- モノマーが少なくとも6.6×10−2mbarの蒸気圧を有する前記請求項のいずれかに記載の方法。
- ポリマーがコポリマーである請求項4〜14のいずれかに記載の方法。
- コポリマーが少なくとも1種の炭化水素を含む少なくとも1種の有機モノマーを含んで成る請求項25記載の方法。
- 炭化水素がアルケンである請求項26記載の方法。
- 1種もしくは複数のモノマーが空間的に分離された点で前記表面上にめっきされる前記請求項のいずれかに記載の方法。
- 1種もしくは複数のモノマーが経路(tracks)もしくは線(lines)で前記表面上にめっきされる請求項1〜27のいずれかに記載の方法。
- 点および/もしくは線が異なるポリマー化学物質(polymer chemistry)を有する請求項28もしくは29記載の方法。
- 線、経路もしくは点の化学組成がその長さおよび高さに沿って不均一である請求項30記載の方法。
- 請求項1〜31のいずれかに記載の方法により得ることができる表面を含んで成る基板。
- ガラス、プラスチック(例えばポリエチレンテレフタレート、高密度ポリエチレン、低密度ポリエチレン、ポリビニルクロリド、ポリプロピレンもしくはポリスチレン)、ニトロセルロースまたはナイロン、金属、セラミックス、石英、金属フィルムもしくはシリコンウェファー:から成る群から選択される請求項32記載の基板。
- 請求項32もしくは33記載の基板を含んで成るアッセイ用製品。
- マイクロアレー(microarray)である請求項34記載のアッセイ用製品。
- 微量滴定板である請求項35記載のアッセイ用製品。
- 請求項32もしくは33の基板を含んで成る、細胞および/もしくは蛋白質および/もしくは高分子を分離するための製品。
- 微量流体装置(microfluidic device)もしくはその一部(例えば弁、スイッチ、誘動チャンネル、結合部位、ポンプ)を更に含んで成る請求項32もしくは33記載の基板。
- アレープリンター(array printer)とともに使用のための請求項34、35もしくは36記載のアッセイ用製品。
- アレーリーダー(array reader)とともに使用のための請求項34、35もしくは36記載のアッセイ用製品。
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GBGB0207350.0A GB0207350D0 (en) | 2002-03-28 | 2002-03-28 | Surface |
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PCT/GB2003/001242 WO2003082483A1 (en) | 2002-03-28 | 2003-03-24 | Preparation of coatings through plasma polymerization |
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- 2002-03-28 GB GBGB0207350.0A patent/GB0207350D0/en not_active Ceased
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- 2003-03-24 DK DK03712397T patent/DK1487591T3/da active
- 2003-03-24 CN CNB038073544A patent/CN100400183C/zh not_active Expired - Fee Related
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- 2003-03-24 US US10/509,431 patent/US20060166183A1/en not_active Abandoned
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- 2003-03-24 EP EP03712397A patent/EP1487591B1/en not_active Expired - Lifetime
- 2003-03-24 JP JP2003580003A patent/JP4798949B2/ja not_active Expired - Fee Related
- 2003-03-24 AT AT03712397T patent/ATE320862T1/de not_active IP Right Cessation
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- 2003-03-24 WO PCT/GB2003/001242 patent/WO2003082483A1/en active IP Right Grant
- 2003-03-24 DE DE60304163T patent/DE60304163T2/de not_active Expired - Lifetime
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Cited By (8)
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JP2012214815A (ja) * | 2003-06-12 | 2012-11-08 | Becton Dickinson & Co | 方法 |
JP2009167323A (ja) * | 2008-01-17 | 2009-07-30 | Osaka Prefecture Univ | 表面被覆樹脂基体、その製造方法及びその製造装置 |
KR101129090B1 (ko) | 2009-09-01 | 2012-04-13 | 성균관대학교산학협력단 | 패턴화된 세포 배양용 기판의 제조방법, 패턴화된 세포 배양용 기판, 세포의 패턴화된 배양 방법, 및 패턴화된 세포칩 |
US9580681B2 (en) | 2009-09-01 | 2017-02-28 | Sungkyunkwan University Foundation For Corporate Collaboration | Method of manufacturing patterned substrate for culturing cells, patterned substrate, and patterned cell chip |
JP2013177542A (ja) * | 2011-08-26 | 2013-09-09 | Fujifilm Corp | 硬化膜の製造方法、膜、及びプラズマ開始重合性組成物 |
KR101462765B1 (ko) | 2013-03-08 | 2014-11-21 | 성균관대학교산학협력단 | 패턴화된 세포 배양용 기판의 제조방법, 패턴화된 세포 배양용 기판 및 세포칩 |
KR20160068871A (ko) * | 2013-10-07 | 2016-06-15 | 유로플라즈마 엔브이 | 저압 플라즈마 공정용 연속 전력 모드의 개선된 플라즈마 생성 방법 |
KR102183755B1 (ko) * | 2013-10-07 | 2020-11-30 | 유로플라즈마 엔브이 | 저압 플라즈마 공정용 연속 전력 모드의 개선된 플라즈마 생성 방법 |
Also Published As
Publication number | Publication date |
---|---|
GB0207350D0 (en) | 2002-05-08 |
DK1487591T3 (da) | 2006-06-12 |
CN100400183C (zh) | 2008-07-09 |
EP1487591A1 (en) | 2004-12-22 |
CA2516432A1 (en) | 2003-10-09 |
AU2003216858A1 (en) | 2003-10-13 |
DE60304163T2 (de) | 2006-12-28 |
JP4798949B2 (ja) | 2011-10-19 |
NZ535488A (en) | 2007-06-29 |
DE60304163D1 (de) | 2006-05-11 |
EP1487591B1 (en) | 2006-03-22 |
WO2003082483A1 (en) | 2003-10-09 |
CN1642664A (zh) | 2005-07-20 |
ATE320862T1 (de) | 2006-04-15 |
US20060166183A1 (en) | 2006-07-27 |
AU2003216858B2 (en) | 2008-04-10 |
CA2516432C (en) | 2011-05-24 |
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