JP2005517282A5 - - Google Patents

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Publication number
JP2005517282A5
JP2005517282A5 JP2003504165A JP2003504165A JP2005517282A5 JP 2005517282 A5 JP2005517282 A5 JP 2005517282A5 JP 2003504165 A JP2003504165 A JP 2003504165A JP 2003504165 A JP2003504165 A JP 2003504165A JP 2005517282 A5 JP2005517282 A5 JP 2005517282A5
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JP
Japan
Prior art keywords
pattern
phase shift
layer
mask
radiation
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2003504165A
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English (en)
Japanese (ja)
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JP2005517282A (ja
JP2005517282A6 (ja
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Priority claimed from US09/972,428 external-priority patent/US6852471B2/en
Application filed filed Critical
Publication of JP2005517282A publication Critical patent/JP2005517282A/ja
Publication of JP2005517282A6 publication Critical patent/JP2005517282A6/ja
Publication of JP2005517282A5 publication Critical patent/JP2005517282A5/ja
Pending legal-status Critical Current

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JP2003504165A 2001-06-08 2002-06-07 位相シフトフォトリソグラフィックマスクの露光制御 Pending JP2005517282A (ja)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US29678801P 2001-06-08 2001-06-08
US60/296,788 2001-06-08
US30414201P 2001-07-10 2001-07-10
US60/304,142 2001-07-10
US09/972,428 2001-10-05
US09/972,428 US6852471B2 (en) 2001-06-08 2001-10-05 Exposure control for phase shifting photolithographic masks
PCT/US2002/018480 WO2002101466A2 (en) 2001-06-08 2002-06-07 Exposure control for phase shifting photolithographic masks

Publications (3)

Publication Number Publication Date
JP2005517282A JP2005517282A (ja) 2005-06-09
JP2005517282A6 JP2005517282A6 (ja) 2005-08-11
JP2005517282A5 true JP2005517282A5 (https=) 2005-12-22

Family

ID=27404462

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003504165A Pending JP2005517282A (ja) 2001-06-08 2002-06-07 位相シフトフォトリソグラフィックマスクの露光制御

Country Status (7)

Country Link
US (4) US6852471B2 (https=)
EP (1) EP1393132B1 (https=)
JP (1) JP2005517282A (https=)
CN (1) CN1282032C (https=)
AT (1) ATE555420T1 (https=)
AU (1) AU2002349203A1 (https=)
WO (1) WO2002101466A2 (https=)

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