JP2005516368A5 - - Google Patents
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- Publication number
- JP2005516368A5 JP2005516368A5 JP2003564919A JP2003564919A JP2005516368A5 JP 2005516368 A5 JP2005516368 A5 JP 2005516368A5 JP 2003564919 A JP2003564919 A JP 2003564919A JP 2003564919 A JP2003564919 A JP 2003564919A JP 2005516368 A5 JP2005516368 A5 JP 2005516368A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- forming
- protective layer
- etching
- cathode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000010410 layer Substances 0.000 claims 27
- 239000011241 protective layer Substances 0.000 claims 23
- 238000005530 etching Methods 0.000 claims 19
- 238000000034 method Methods 0.000 claims 14
- 125000006850 spacer group Chemical group 0.000 claims 8
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 claims 6
- XEMZLVDIUVCKGL-UHFFFAOYSA-N hydrogen peroxide;sulfuric acid Chemical compound OO.OS(O)(=O)=O XEMZLVDIUVCKGL-UHFFFAOYSA-N 0.000 claims 4
- 229910052581 Si3N4 Inorganic materials 0.000 claims 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 2
- 229910052814 silicon oxide Inorganic materials 0.000 claims 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- 238000000151 deposition Methods 0.000 claims 1
- 229910052750 molybdenum Inorganic materials 0.000 claims 1
- 239000011733 molybdenum Substances 0.000 claims 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims 1
- 229920005591 polysilicon Polymers 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
- 239000010936 titanium Substances 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/066,149 US6703252B2 (en) | 2002-01-31 | 2002-01-31 | Method of manufacturing an emitter |
| PCT/US2003/002955 WO2003065425A2 (en) | 2002-01-31 | 2003-01-30 | Emitter and method of making |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005516368A JP2005516368A (ja) | 2005-06-02 |
| JP2005516368A5 true JP2005516368A5 (enExample) | 2006-03-16 |
Family
ID=27610439
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003564919A Withdrawn JP2005516368A (ja) | 2002-01-31 | 2003-01-30 | 放出器およびその製造方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (3) | US6703252B2 (enExample) |
| EP (1) | EP1470566A2 (enExample) |
| JP (1) | JP2005516368A (enExample) |
| AU (1) | AU2003208921A1 (enExample) |
| NO (1) | NO20043538L (enExample) |
| TW (1) | TWI277116B (enExample) |
| WO (1) | WO2003065425A2 (enExample) |
Families Citing this family (33)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6911768B2 (en) * | 2001-04-30 | 2005-06-28 | Hewlett-Packard Development Company, L.P. | Tunneling emitter with nanohole openings |
| US7049034B2 (en) * | 2003-09-09 | 2006-05-23 | Photronics, Inc. | Photomask having an internal substantially transparent etch stop layer |
| KR100513727B1 (ko) * | 2003-02-12 | 2005-09-08 | 삼성에스디아이 주식회사 | 전계방출소자의 제조방법 |
| US20070003472A1 (en) * | 2003-03-24 | 2007-01-04 | Tolt Zhidan L | Electron emitting composite based on regulated nano-structures and a cold electron source using the composite |
| WO2004098683A1 (en) * | 2003-05-08 | 2004-11-18 | Novo Nordisk A/S | Internal needle inserter |
| EP1475113A1 (en) * | 2003-05-08 | 2004-11-10 | Novo Nordisk A/S | External needle inserter |
| JP4509100B2 (ja) * | 2003-05-08 | 2010-07-21 | ノボ・ノルデイスク・エー/エス | 取り外し可能な針挿入作動部を有する皮膚に取り付け可能な注入装置 |
| US6987688B2 (en) * | 2003-06-11 | 2006-01-17 | Ovonyx, Inc. | Die customization using programmable resistance memory elements |
| JP4545397B2 (ja) * | 2003-06-19 | 2010-09-15 | 株式会社 日立ディスプレイズ | 画像表示装置 |
| EP1502613A1 (en) * | 2003-08-01 | 2005-02-02 | Novo Nordisk A/S | Needle device with retraction means |
| US20050051764A1 (en) * | 2003-09-04 | 2005-03-10 | Huei-Pei Kuo | Anodizing process for improving electron emission in electronic devices |
| KR20060099520A (ko) * | 2003-10-21 | 2006-09-19 | 노보 노르디스크 에이/에스 | 의료용 피부 장착 장치 |
| US7459839B2 (en) * | 2003-12-05 | 2008-12-02 | Zhidan Li Tolt | Low voltage electron source with self aligned gate apertures, and luminous display using the electron source |
| EP1732626A1 (en) * | 2004-03-30 | 2006-12-20 | Novo Nordisk A/S | Actuator system comprising lever mechanism |
| US20060051681A1 (en) * | 2004-09-08 | 2006-03-09 | Phototronics, Inc. 15 Secor Road P.O. Box 5226 Brookfield, Conecticut | Method of repairing a photomask having an internal etch stop layer |
| JP2006080046A (ja) * | 2004-09-13 | 2006-03-23 | Ngk Insulators Ltd | 電子放出装置 |
| WO2006032692A1 (en) * | 2004-09-22 | 2006-03-30 | Novo Nordisk A/S | Medical device with cannula inserter |
| CN100584399C (zh) * | 2004-09-22 | 2010-01-27 | 诺和诺德公司 | 具有经皮套管装置的医疗装置 |
| US20090048563A1 (en) * | 2004-12-06 | 2009-02-19 | Novo Nordisk A/S | Ventilated Skin Mountable Device |
| US20090076451A1 (en) * | 2005-01-24 | 2009-03-19 | Nova Nordisk A/S | Medical Device with Protected Transcutaneous Device |
| US20080167641A1 (en) * | 2005-05-13 | 2008-07-10 | Novo Nordisk A/S | Medical Device Adapted To Detect Disengagement Of A Transcutaneous Device |
| US7786662B2 (en) | 2005-05-19 | 2010-08-31 | Texas Instruments Incorporated | Display using a movable electron field emitter and method of manufacture thereof |
| US20070096621A1 (en) * | 2005-10-31 | 2007-05-03 | Sang-Ho Jeon | Electron emission display |
| CN101401314B (zh) * | 2006-03-13 | 2013-04-24 | 诺沃-诺迪斯克有限公司 | 包括第一和第二单元的具有双重用途通信装置的医疗系统 |
| CN101401313B (zh) * | 2006-03-13 | 2014-06-11 | 诺沃—诺迪斯克有限公司 | 用于使用成双通信装置的电子设备的安全配对的系统 |
| US20090163874A1 (en) * | 2006-04-26 | 2009-06-25 | Novo Nordisk A/S | Skin-Mountable Device in Packaging Comprising Coated Seal Member |
| CN101460207B (zh) * | 2006-06-06 | 2012-03-21 | 诺沃-诺迪斯克有限公司 | 包括皮肤可安装设备及其包装件的组件 |
| CN101192490B (zh) | 2006-11-24 | 2010-09-29 | 清华大学 | 表面传导电子发射元件以及应用表面传导电子发射元件的电子源 |
| CN101192494B (zh) | 2006-11-24 | 2010-09-29 | 清华大学 | 电子发射元件的制备方法 |
| EP2114492A1 (en) * | 2007-03-06 | 2009-11-11 | Novo Nordisk A/S | Pump assembly comprising actuator system |
| EP2209500B1 (en) * | 2007-10-31 | 2015-07-22 | Novo Nordisk A/S | Non-porous material as sterilization barrier |
| WO2009086084A1 (en) * | 2007-12-19 | 2009-07-09 | Contour Semiconductor, Inc. | Field-emitter-based memory array with phase-change storage devices |
| KR101615634B1 (ko) * | 2010-02-09 | 2016-04-26 | 삼성전자주식회사 | 테라헤르츠 발진기 및 전자방출원의 제조방법 |
Family Cites Families (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5142A (en) * | 1847-06-05 | Rotary steam-engine | ||
| EP0251328B1 (en) | 1986-07-04 | 1995-01-04 | Canon Kabushiki Kaisha | Electron emitting device and process for producing the same |
| US4760567A (en) * | 1986-08-11 | 1988-07-26 | Electron Beam Memories | Electron beam memory system with ultra-compact, high current density electron gun |
| US4923421A (en) | 1988-07-06 | 1990-05-08 | Innovative Display Development Partners | Method for providing polyimide spacers in a field emission panel display |
| JPH02306520A (ja) * | 1989-05-19 | 1990-12-19 | Matsushita Electric Ind Co Ltd | 電子放出素子 |
| US5142184B1 (en) | 1990-02-09 | 1995-11-21 | Motorola Inc | Cold cathode field emission device with integral emitter ballasting |
| US5086017A (en) * | 1991-03-21 | 1992-02-04 | Industrial Technology Research Institute | Self aligned silicide process for gate/runner without extra masking |
| EP0532019B1 (en) | 1991-09-13 | 1997-12-29 | Canon Kabushiki Kaisha | Semiconductor electron emission device |
| US5374844A (en) | 1993-03-25 | 1994-12-20 | Micrel, Inc. | Bipolar transistor structure using ballast resistor |
| US5528103A (en) | 1994-01-31 | 1996-06-18 | Silicon Video Corporation | Field emitter with focusing ridges situated to sides of gate |
| US5473218A (en) * | 1994-05-31 | 1995-12-05 | Motorola, Inc. | Diamond cold cathode using patterned metal for electron emission control |
| US5541466A (en) | 1994-11-18 | 1996-07-30 | Texas Instruments Incorporated | Cluster arrangement of field emission microtips on ballast layer |
| US5557596A (en) | 1995-03-20 | 1996-09-17 | Gibson; Gary | Ultra-high density storage device |
| US5578900A (en) * | 1995-11-01 | 1996-11-26 | Industrial Technology Research Institute | Built in ion pump for field emission display |
| JPH10308166A (ja) | 1997-03-04 | 1998-11-17 | Pioneer Electron Corp | 電子放出素子及びこれを用いた表示装置 |
| US6033924A (en) | 1997-07-25 | 2000-03-07 | Motorola, Inc. | Method for fabricating a field emission device |
| TW391022B (en) * | 1997-10-29 | 2000-05-21 | Mitsubishi Rayon Co | Field emission electron source, method of producing the same, and use of the same |
| US6010918A (en) * | 1998-02-10 | 2000-01-04 | Fed Corporation | Gate electrode structure for field emission devices and method of making |
| US6303504B1 (en) * | 1998-02-26 | 2001-10-16 | Vlsi Technology, Inc. | Method of improving process robustness of nickel salicide in semiconductors |
| US6011356A (en) | 1998-04-30 | 2000-01-04 | St. Clair Intellectual Property Consultants, Inc. | Flat surface emitter for use in field emission display devices |
| JP2000182511A (ja) | 1998-12-14 | 2000-06-30 | Yamaha Corp | 電界放射型素子の製造方法 |
| JP2000331595A (ja) * | 1999-05-18 | 2000-11-30 | Nikon Corp | 薄膜冷陰極及びその製造方法 |
| US6360821B1 (en) * | 1999-05-20 | 2002-03-26 | Tiw Corporation | Combination whipstock and anchor assembly |
| BR0001211C1 (pt) | 2000-04-13 | 2002-03-05 | Inst Nac De Tecnologia Da Info | Estrutura de placa emissora para fed |
| KR100899588B1 (ko) * | 2000-10-26 | 2009-05-27 | 오우크-미츠이, 인크 . | 인쇄 회로 기판 제조에서 옥사이드 공정을 대체하고 미세라인을 제조하기 위해 구리 포일을 금속 처리하는 인쇄회로 기판 제조 방법 |
| US6781146B2 (en) * | 2001-04-30 | 2004-08-24 | Hewlett-Packard Development Company, L.P. | Annealed tunneling emitter |
| US6558968B1 (en) * | 2001-10-31 | 2003-05-06 | Hewlett-Packard Development Company | Method of making an emitter with variable density photoresist layer |
| US6835947B2 (en) * | 2002-01-31 | 2004-12-28 | Hewlett-Packard Development Company, L.P. | Emitter and method of making |
-
2002
- 2002-01-31 US US10/066,149 patent/US6703252B2/en not_active Expired - Lifetime
- 2002-11-29 TW TW091134879A patent/TWI277116B/zh not_active IP Right Cessation
-
2003
- 2003-01-30 AU AU2003208921A patent/AU2003208921A1/en not_active Abandoned
- 2003-01-30 WO PCT/US2003/002955 patent/WO2003065425A2/en not_active Ceased
- 2003-01-30 EP EP03707644A patent/EP1470566A2/en not_active Withdrawn
- 2003-01-30 JP JP2003564919A patent/JP2005516368A/ja not_active Withdrawn
- 2003-10-15 US US10/686,965 patent/US6933517B2/en not_active Expired - Lifetime
- 2003-10-15 US US10/688,731 patent/US7049158B2/en not_active Expired - Lifetime
-
2004
- 2004-08-25 NO NO20043538A patent/NO20043538L/no not_active Application Discontinuation
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