JP2005516368A - 放出器およびその製造方法 - Google Patents
放出器およびその製造方法 Download PDFInfo
- Publication number
- JP2005516368A JP2005516368A JP2003564919A JP2003564919A JP2005516368A JP 2005516368 A JP2005516368 A JP 2005516368A JP 2003564919 A JP2003564919 A JP 2003564919A JP 2003564919 A JP2003564919 A JP 2003564919A JP 2005516368 A JP2005516368 A JP 2005516368A
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- JP
- Japan
- Prior art keywords
- layer
- emitter
- protective layer
- cathode
- disposed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
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- 239000010410 layer Substances 0.000 claims abstract description 185
- 239000011241 protective layer Substances 0.000 claims abstract description 51
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- 239000000758 substrate Substances 0.000 claims description 84
- 125000006850 spacer group Chemical group 0.000 claims description 32
- 238000000034 method Methods 0.000 claims description 31
- 238000005530 etching Methods 0.000 claims description 21
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- 238000003860 storage Methods 0.000 claims description 18
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 15
- 229910052719 titanium Inorganic materials 0.000 claims description 15
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 12
- 238000000151 deposition Methods 0.000 claims description 12
- 229910052750 molybdenum Inorganic materials 0.000 claims description 12
- 239000011733 molybdenum Substances 0.000 claims description 12
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 claims description 7
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 6
- XEMZLVDIUVCKGL-UHFFFAOYSA-N hydrogen peroxide;sulfuric acid Chemical compound OO.OS(O)(=O)=O XEMZLVDIUVCKGL-UHFFFAOYSA-N 0.000 claims description 5
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Images
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/21—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
- G11C11/23—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using electrostatic storage on a common layer, e.g. Forrester-Haeff tubes or William tubes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/30—Cold cathodes, e.g. field-emissive cathode
- H01J1/312—Cold cathodes, e.g. field-emissive cathode having an electric field perpendicular to the surface, e.g. tunnel-effect cathodes of metal-insulator-metal [MIM] type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
- H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Crystallography & Structural Chemistry (AREA)
- Theoretical Computer Science (AREA)
- Mathematical Physics (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
- Electrodes For Cathode-Ray Tubes (AREA)
- Cold Cathode And The Manufacture (AREA)
- Bipolar Transistors (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/066,149 US6703252B2 (en) | 2002-01-31 | 2002-01-31 | Method of manufacturing an emitter |
| PCT/US2003/002955 WO2003065425A2 (en) | 2002-01-31 | 2003-01-30 | Emitter and method of making |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005516368A true JP2005516368A (ja) | 2005-06-02 |
| JP2005516368A5 JP2005516368A5 (enExample) | 2006-03-16 |
Family
ID=27610439
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003564919A Withdrawn JP2005516368A (ja) | 2002-01-31 | 2003-01-30 | 放出器およびその製造方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (3) | US6703252B2 (enExample) |
| EP (1) | EP1470566A2 (enExample) |
| JP (1) | JP2005516368A (enExample) |
| AU (1) | AU2003208921A1 (enExample) |
| NO (1) | NO20043538L (enExample) |
| TW (1) | TWI277116B (enExample) |
| WO (1) | WO2003065425A2 (enExample) |
Families Citing this family (33)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6911768B2 (en) * | 2001-04-30 | 2005-06-28 | Hewlett-Packard Development Company, L.P. | Tunneling emitter with nanohole openings |
| US7049034B2 (en) * | 2003-09-09 | 2006-05-23 | Photronics, Inc. | Photomask having an internal substantially transparent etch stop layer |
| KR100513727B1 (ko) * | 2003-02-12 | 2005-09-08 | 삼성에스디아이 주식회사 | 전계방출소자의 제조방법 |
| US7521851B2 (en) * | 2003-03-24 | 2009-04-21 | Zhidan L Tolt | Electron emitting composite based on regulated nano-structures and a cold electron source using the composite |
| EP1624914B1 (en) * | 2003-05-08 | 2008-04-16 | Novo Nordisk A/S | Internal needle inserter |
| ATE474611T1 (de) * | 2003-05-08 | 2010-08-15 | Novo Nordisk As | Eine auf die haut aufbringbare injektionsvorrichtung mit abtrennbarem betätigungsteil zum einführen der nadel |
| EP1475113A1 (en) * | 2003-05-08 | 2004-11-10 | Novo Nordisk A/S | External needle inserter |
| US6987688B2 (en) * | 2003-06-11 | 2006-01-17 | Ovonyx, Inc. | Die customization using programmable resistance memory elements |
| JP4545397B2 (ja) * | 2003-06-19 | 2010-09-15 | 株式会社 日立ディスプレイズ | 画像表示装置 |
| EP1502613A1 (en) * | 2003-08-01 | 2005-02-02 | Novo Nordisk A/S | Needle device with retraction means |
| US20050051764A1 (en) * | 2003-09-04 | 2005-03-10 | Huei-Pei Kuo | Anodizing process for improving electron emission in electronic devices |
| KR20060099520A (ko) * | 2003-10-21 | 2006-09-19 | 노보 노르디스크 에이/에스 | 의료용 피부 장착 장치 |
| US7459839B2 (en) * | 2003-12-05 | 2008-12-02 | Zhidan Li Tolt | Low voltage electron source with self aligned gate apertures, and luminous display using the electron source |
| WO2005094920A1 (en) * | 2004-03-30 | 2005-10-13 | Novo Nordisk A/S | Actuator system comprising lever mechanism |
| US20060051681A1 (en) * | 2004-09-08 | 2006-03-09 | Phototronics, Inc. 15 Secor Road P.O. Box 5226 Brookfield, Conecticut | Method of repairing a photomask having an internal etch stop layer |
| JP2006080046A (ja) * | 2004-09-13 | 2006-03-23 | Ngk Insulators Ltd | 電子放出装置 |
| US20080215006A1 (en) * | 2004-09-22 | 2008-09-04 | Novo Nordisk A/S | Medical Device with Transcutaneous Cannula Device |
| EP1804859A1 (en) * | 2004-09-22 | 2007-07-11 | Novo Nordisk A/S | Medical device with cannula inserter |
| WO2006061354A1 (en) * | 2004-12-06 | 2006-06-15 | Novo Nordisk A/S | Ventilated skin mountable device |
| EP1848476A1 (en) | 2005-01-24 | 2007-10-31 | Novo Nordisk A/S | Transcutaneous device assembly |
| US20080167641A1 (en) * | 2005-05-13 | 2008-07-10 | Novo Nordisk A/S | Medical Device Adapted To Detect Disengagement Of A Transcutaneous Device |
| US7786662B2 (en) * | 2005-05-19 | 2010-08-31 | Texas Instruments Incorporated | Display using a movable electron field emitter and method of manufacture thereof |
| US20070096621A1 (en) * | 2005-10-31 | 2007-05-03 | Sang-Ho Jeon | Electron emission display |
| JP2009530880A (ja) * | 2006-03-13 | 2009-08-27 | ノボ・ノルデイスク・エー/エス | 複合通信手段を使用した電子装置の安全なペアリング |
| CN101401314B (zh) * | 2006-03-13 | 2013-04-24 | 诺沃-诺迪斯克有限公司 | 包括第一和第二单元的具有双重用途通信装置的医疗系统 |
| CN101426542A (zh) * | 2006-04-26 | 2009-05-06 | 诺沃-诺迪斯克有限公司 | 含经涂覆的密封构件的包装件中的可安装在表皮上的装置 |
| EP2032188A1 (en) * | 2006-06-06 | 2009-03-11 | Novo Nordisk A/S | Assembly comprising skin-mountable device and packaging therefore |
| CN101192494B (zh) | 2006-11-24 | 2010-09-29 | 清华大学 | 电子发射元件的制备方法 |
| CN101192490B (zh) | 2006-11-24 | 2010-09-29 | 清华大学 | 表面传导电子发射元件以及应用表面传导电子发射元件的电子源 |
| CN101641123A (zh) * | 2007-03-06 | 2010-02-03 | 诺沃-诺迪斯克有限公司 | 包括操作机构系统的泵组件 |
| WO2009056616A1 (en) * | 2007-10-31 | 2009-05-07 | Novo Nordisk A/S | Non-porous material as sterilization barrier |
| WO2009086084A1 (en) * | 2007-12-19 | 2009-07-09 | Contour Semiconductor, Inc. | Field-emitter-based memory array with phase-change storage devices |
| KR101615634B1 (ko) * | 2010-02-09 | 2016-04-26 | 삼성전자주식회사 | 테라헤르츠 발진기 및 전자방출원의 제조방법 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5142A (en) * | 1847-06-05 | Rotary steam-engine | ||
| DE3750936T2 (de) | 1986-07-04 | 1995-05-18 | Canon Kk | Elektronen-Emitter-Vorrichtung und ihr Herstellungsverfahren. |
| US4760567A (en) * | 1986-08-11 | 1988-07-26 | Electron Beam Memories | Electron beam memory system with ultra-compact, high current density electron gun |
| US4923421A (en) | 1988-07-06 | 1990-05-08 | Innovative Display Development Partners | Method for providing polyimide spacers in a field emission panel display |
| JPH02306520A (ja) * | 1989-05-19 | 1990-12-19 | Matsushita Electric Ind Co Ltd | 電子放出素子 |
| US5142184B1 (en) | 1990-02-09 | 1995-11-21 | Motorola Inc | Cold cathode field emission device with integral emitter ballasting |
| US5086017A (en) * | 1991-03-21 | 1992-02-04 | Industrial Technology Research Institute | Self aligned silicide process for gate/runner without extra masking |
| DE69223707T2 (de) | 1991-09-13 | 1998-05-20 | Canon Kk | Halbleiter-Elektronenemittierende Einrichtung |
| US5374844A (en) | 1993-03-25 | 1994-12-20 | Micrel, Inc. | Bipolar transistor structure using ballast resistor |
| US5528103A (en) | 1994-01-31 | 1996-06-18 | Silicon Video Corporation | Field emitter with focusing ridges situated to sides of gate |
| US5473218A (en) * | 1994-05-31 | 1995-12-05 | Motorola, Inc. | Diamond cold cathode using patterned metal for electron emission control |
| US5541466A (en) | 1994-11-18 | 1996-07-30 | Texas Instruments Incorporated | Cluster arrangement of field emission microtips on ballast layer |
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-
2002
- 2002-01-31 US US10/066,149 patent/US6703252B2/en not_active Expired - Lifetime
- 2002-11-29 TW TW091134879A patent/TWI277116B/zh not_active IP Right Cessation
-
2003
- 2003-01-30 WO PCT/US2003/002955 patent/WO2003065425A2/en not_active Ceased
- 2003-01-30 AU AU2003208921A patent/AU2003208921A1/en not_active Abandoned
- 2003-01-30 JP JP2003564919A patent/JP2005516368A/ja not_active Withdrawn
- 2003-01-30 EP EP03707644A patent/EP1470566A2/en not_active Withdrawn
- 2003-10-15 US US10/688,731 patent/US7049158B2/en not_active Expired - Lifetime
- 2003-10-15 US US10/686,965 patent/US6933517B2/en not_active Expired - Lifetime
-
2004
- 2004-08-25 NO NO20043538A patent/NO20043538L/no not_active Application Discontinuation
Also Published As
| Publication number | Publication date |
|---|---|
| US7049158B2 (en) | 2006-05-23 |
| US20030143788A1 (en) | 2003-07-31 |
| US20040130251A1 (en) | 2004-07-08 |
| WO2003065425A2 (en) | 2003-08-07 |
| US6933517B2 (en) | 2005-08-23 |
| AU2003208921A1 (en) | 2003-09-02 |
| NO20043538L (no) | 2004-08-25 |
| EP1470566A2 (en) | 2004-10-27 |
| US20040087240A1 (en) | 2004-05-06 |
| US6703252B2 (en) | 2004-03-09 |
| WO2003065425A3 (en) | 2004-04-01 |
| TW200302499A (en) | 2003-08-01 |
| TWI277116B (en) | 2007-03-21 |
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