JP2005349513A5 - - Google Patents
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- Publication number
- JP2005349513A5 JP2005349513A5 JP2004171731A JP2004171731A JP2005349513A5 JP 2005349513 A5 JP2005349513 A5 JP 2005349513A5 JP 2004171731 A JP2004171731 A JP 2004171731A JP 2004171731 A JP2004171731 A JP 2004171731A JP 2005349513 A5 JP2005349513 A5 JP 2005349513A5
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- nozzle
- substrate
- processing
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims 13
- 238000003672 processing method Methods 0.000 claims 8
- 239000007788 liquid Substances 0.000 claims 7
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims 5
- 239000000843 powder Substances 0.000 claims 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 2
- 229910052802 copper Inorganic materials 0.000 claims 2
- 239000010949 copper Substances 0.000 claims 2
- 239000011347 resin Substances 0.000 claims 2
- 229920005989 resin Polymers 0.000 claims 2
- 229910052710 silicon Inorganic materials 0.000 claims 2
- 239000010703 silicon Substances 0.000 claims 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 229910017604 nitric acid Inorganic materials 0.000 claims 1
- 239000002245 particle Substances 0.000 claims 1
- 238000005498 polishing Methods 0.000 claims 1
- 238000005507 spraying Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004171731A JP4369307B2 (ja) | 2004-06-09 | 2004-06-09 | パターン加工方法及びパターン加工装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004171731A JP4369307B2 (ja) | 2004-06-09 | 2004-06-09 | パターン加工方法及びパターン加工装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005349513A JP2005349513A (ja) | 2005-12-22 |
| JP2005349513A5 true JP2005349513A5 (https=) | 2007-07-05 |
| JP4369307B2 JP4369307B2 (ja) | 2009-11-18 |
Family
ID=35584388
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004171731A Expired - Fee Related JP4369307B2 (ja) | 2004-06-09 | 2004-06-09 | パターン加工方法及びパターン加工装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4369307B2 (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011020212A (ja) * | 2009-07-15 | 2011-02-03 | Sharp Corp | 基板の加工装置および基板の加工方法、並びに加工基板の製造方法 |
| KR101416942B1 (ko) * | 2012-10-25 | 2014-07-08 | 주식회사 나무공작소 | 자동화된 목재용 샌드 블래스터 |
| CN111513411B (zh) * | 2020-04-13 | 2022-07-29 | 湖南臻和亦康医疗用品有限公司 | 一种医疗口罩生产用的压平装置 |
| EP4108438A1 (en) * | 2021-06-25 | 2022-12-28 | Essilor International | Method for manufacturing a lens element |
-
2004
- 2004-06-09 JP JP2004171731A patent/JP4369307B2/ja not_active Expired - Fee Related
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