JP2005333148A5 - - Google Patents

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Publication number
JP2005333148A5
JP2005333148A5 JP2005170117A JP2005170117A JP2005333148A5 JP 2005333148 A5 JP2005333148 A5 JP 2005333148A5 JP 2005170117 A JP2005170117 A JP 2005170117A JP 2005170117 A JP2005170117 A JP 2005170117A JP 2005333148 A5 JP2005333148 A5 JP 2005333148A5
Authority
JP
Japan
Prior art keywords
work function
semiconductor wafer
conductive
coating
electrical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2005170117A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005333148A (ja
Filing date
Publication date
Priority claimed from US10/845,815 external-priority patent/US7023231B2/en
Application filed filed Critical
Publication of JP2005333148A publication Critical patent/JP2005333148A/ja
Publication of JP2005333148A5 publication Critical patent/JP2005333148A5/ja
Pending legal-status Critical Current

Links

JP2005170117A 2004-05-14 2005-05-13 半導体ウエハの特性を測定するための仕事関数が制御されたプローブとその使用方法 Pending JP2005333148A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/845,815 US7023231B2 (en) 2004-05-14 2004-05-14 Work function controlled probe for measuring properties of a semiconductor wafer and method of use thereof

Publications (2)

Publication Number Publication Date
JP2005333148A JP2005333148A (ja) 2005-12-02
JP2005333148A5 true JP2005333148A5 (OSRAM) 2008-06-26

Family

ID=34939824

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005170117A Pending JP2005333148A (ja) 2004-05-14 2005-05-13 半導体ウエハの特性を測定するための仕事関数が制御されたプローブとその使用方法

Country Status (6)

Country Link
US (1) US7023231B2 (OSRAM)
EP (1) EP1596212B1 (OSRAM)
JP (1) JP2005333148A (OSRAM)
AT (1) ATE408154T1 (OSRAM)
DE (1) DE602005009603D1 (OSRAM)
TW (1) TWI391686B (OSRAM)

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US7449899B2 (en) 2005-06-08 2008-11-11 Cascade Microtech, Inc. Probe for high frequency signals
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US7403028B2 (en) 2006-06-12 2008-07-22 Cascade Microtech, Inc. Test structure and probe for differential signals
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JP5053788B2 (ja) * 2007-10-10 2012-10-17 株式会社アルバック 導電性プローブ、導電性プローブの製造方法、及び磁気特性測定方法
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US8410806B2 (en) 2008-11-21 2013-04-02 Cascade Microtech, Inc. Replaceable coupon for a probing apparatus
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WO2020158575A1 (ja) 2019-01-29 2020-08-06 株式会社ヨコオ プランジャーおよびコンタクトプローブ

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