JP2003158196A5 - - Google Patents
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- Publication number
- JP2003158196A5 JP2003158196A5 JP2001356354A JP2001356354A JP2003158196A5 JP 2003158196 A5 JP2003158196 A5 JP 2003158196A5 JP 2001356354 A JP2001356354 A JP 2001356354A JP 2001356354 A JP2001356354 A JP 2001356354A JP 2003158196 A5 JP2003158196 A5 JP 2003158196A5
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- resistance element
- oxide film
- forming
- direct
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 15
- 239000011229 interlayer Substances 0.000 claims 5
- 150000004767 nitrides Chemical class 0.000 claims 5
- 238000002955 isolation Methods 0.000 claims 4
- 238000004519 manufacturing process Methods 0.000 claims 4
- 239000010410 layer Substances 0.000 claims 3
- 239000000463 material Substances 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 2
- 229910021332 silicide Inorganic materials 0.000 claims 2
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 238000005468 ion implantation Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 239000003870 refractory metal Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001356354A JP2003158196A (ja) | 2001-11-21 | 2001-11-21 | 半導体装置およびその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001356354A JP2003158196A (ja) | 2001-11-21 | 2001-11-21 | 半導体装置およびその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003158196A JP2003158196A (ja) | 2003-05-30 |
| JP2003158196A5 true JP2003158196A5 (OSRAM) | 2005-07-14 |
Family
ID=19167890
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001356354A Pending JP2003158196A (ja) | 2001-11-21 | 2001-11-21 | 半導体装置およびその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2003158196A (OSRAM) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004363234A (ja) * | 2003-06-03 | 2004-12-24 | Renesas Technology Corp | 半導体装置の製造方法 |
| JP4786126B2 (ja) * | 2003-06-04 | 2011-10-05 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
| JP4546054B2 (ja) * | 2003-08-29 | 2010-09-15 | パナソニック株式会社 | 半導体装置の製造方法 |
| JP5354160B2 (ja) * | 2008-10-16 | 2013-11-27 | セイコーエプソン株式会社 | 半導体装置の製造方法 |
| JP5850671B2 (ja) * | 2011-08-15 | 2016-02-03 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
| JP2019021659A (ja) * | 2017-07-11 | 2019-02-07 | キヤノン株式会社 | 半導体装置および機器 |
-
2001
- 2001-11-21 JP JP2001356354A patent/JP2003158196A/ja active Pending
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