JP2005325410A5 - - Google Patents

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Publication number
JP2005325410A5
JP2005325410A5 JP2004144538A JP2004144538A JP2005325410A5 JP 2005325410 A5 JP2005325410 A5 JP 2005325410A5 JP 2004144538 A JP2004144538 A JP 2004144538A JP 2004144538 A JP2004144538 A JP 2004144538A JP 2005325410 A5 JP2005325410 A5 JP 2005325410A5
Authority
JP
Japan
Prior art keywords
refrigerant
tank
cooling
tank wall
path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004144538A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005325410A (ja
JP4016071B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2004144538A priority Critical patent/JP4016071B2/ja
Priority claimed from JP2004144538A external-priority patent/JP4016071B2/ja
Priority to KR1020067022051A priority patent/KR100884161B1/ko
Priority to PCT/JP2005/000849 priority patent/WO2005111258A1/ja
Priority to CN2005800130682A priority patent/CN1946871B/zh
Publication of JP2005325410A publication Critical patent/JP2005325410A/ja
Publication of JP2005325410A5 publication Critical patent/JP2005325410A5/ja
Application granted granted Critical
Publication of JP4016071B2 publication Critical patent/JP4016071B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2004144538A 2004-05-14 2004-05-14 冷却手段を備えた装置及び冷却方法 Expired - Fee Related JP4016071B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2004144538A JP4016071B2 (ja) 2004-05-14 2004-05-14 冷却手段を備えた装置及び冷却方法
KR1020067022051A KR100884161B1 (ko) 2004-05-14 2005-01-24 냉각 수단을 구비한 진공 장치
PCT/JP2005/000849 WO2005111258A1 (ja) 2004-05-14 2005-01-24 冷却手段を備えた装置及び冷却方法
CN2005800130682A CN1946871B (zh) 2004-05-14 2005-01-24 具有冷却装置的装置及冷却方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004144538A JP4016071B2 (ja) 2004-05-14 2004-05-14 冷却手段を備えた装置及び冷却方法

Publications (3)

Publication Number Publication Date
JP2005325410A JP2005325410A (ja) 2005-11-24
JP2005325410A5 true JP2005325410A5 (https=) 2007-02-08
JP4016071B2 JP4016071B2 (ja) 2007-12-05

Family

ID=35394172

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004144538A Expired - Fee Related JP4016071B2 (ja) 2004-05-14 2004-05-14 冷却手段を備えた装置及び冷却方法

Country Status (4)

Country Link
JP (1) JP4016071B2 (https=)
KR (1) KR100884161B1 (https=)
CN (1) CN1946871B (https=)
WO (1) WO2005111258A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2234463A1 (en) * 2007-12-27 2010-09-29 Sharp Kabushiki Kaisha Plasma treatment apparatus, heating device for the plasma treatment apparatus, and plasma treatment method
CN103132027A (zh) * 2011-11-28 2013-06-05 鸿富锦精密工业（深圳）有限公司 真空镀膜设备
CN108385065A (zh) * 2018-05-23 2018-08-10 北京铂阳顶荣光伏科技有限公司 一种带有蒸发源的设备及安全控制方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03179742A (ja) * 1989-12-07 1991-08-05 Toshiba Corp 酸化珪素成膜方法
KR100297003B1 (ko) * 1998-02-10 2001-08-07 서성기 박막증착장치
JP2000310694A (ja) * 1999-04-27 2000-11-07 Ishikawajima Harima Heavy Ind Co Ltd 原子炉圧力容器アクセスホールカバーの吊り耳切断用放電加工電極
KR20020086761A (ko) * 2001-05-10 2002-11-20 주식회사 엘지이아이 냉각수단을 구비한 고분자막 연속증착장비
DE10256038A1 (de) * 2002-11-30 2004-06-17 Applied Films Gmbh & Co. Kg Bedampfungsvorrichtung

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