WO2005111258A1 - 冷却手段を備えた装置及び冷却方法 - Google Patents

冷却手段を備えた装置及び冷却方法 Download PDF

Info

Publication number
WO2005111258A1
WO2005111258A1 PCT/JP2005/000849 JP2005000849W WO2005111258A1 WO 2005111258 A1 WO2005111258 A1 WO 2005111258A1 JP 2005000849 W JP2005000849 W JP 2005000849W WO 2005111258 A1 WO2005111258 A1 WO 2005111258A1
Authority
WO
WIPO (PCT)
Prior art keywords
refrigerant
cooling
tank
paths
tank wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2005/000849
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
Masayuki Takimoto
Yutaka Fuse
Tatsumi Abe
Hiroyuki Komuro
Kazuhito Aonahata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Showa Shinku Co Ltd
Original Assignee
Showa Shinku Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Shinku Co Ltd filed Critical Showa Shinku Co Ltd
Priority to CN2005800130682A priority Critical patent/CN1946871B/zh
Publication of WO2005111258A1 publication Critical patent/WO2005111258A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
    • F25D23/00—General constructional features
    • F25D23/06—Walls
    • F25D23/061—Walls with conduit means

Definitions

  • the cooling path cooling pipe 1 is provided at the substrate heating heater introduction portion. 36, substrate dome rotation mechanism 35, crucible mechanism introduction part 46, and electron gun introduction part 47.
  • the cooling water is circulated through the cooling path cooling pipe 1, and the cooling medium may be any substance that can be cooled regardless of liquid or gas.
  • the cooling water to the substrate dome rotating mechanism 35 and the substrate heating heater 34 arranged at the upper part of the vacuum tank passes through the cooling path cooling pipe 1 installed from the centralized connection part 2 to the upper part.
  • a short tube 42 is connected from the upper part of the vacuum chamber to the substrate dome rotation mechanism 35 and the heater introduction part 36 for heating the substrate.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Combustion & Propulsion (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Physical Vapour Deposition (AREA)
PCT/JP2005/000849 2004-05-14 2005-01-24 冷却手段を備えた装置及び冷却方法 Ceased WO2005111258A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2005800130682A CN1946871B (zh) 2004-05-14 2005-01-24 具有冷却装置的装置及冷却方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004-144538 2004-05-14
JP2004144538A JP4016071B2 (ja) 2004-05-14 2004-05-14 冷却手段を備えた装置及び冷却方法

Publications (1)

Publication Number Publication Date
WO2005111258A1 true WO2005111258A1 (ja) 2005-11-24

Family

ID=35394172

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2005/000849 Ceased WO2005111258A1 (ja) 2004-05-14 2005-01-24 冷却手段を備えた装置及び冷却方法

Country Status (4)

Country Link
JP (1) JP4016071B2 (https=)
KR (1) KR100884161B1 (https=)
CN (1) CN1946871B (https=)
WO (1) WO2005111258A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2234463A1 (en) * 2007-12-27 2010-09-29 Sharp Kabushiki Kaisha Plasma treatment apparatus, heating device for the plasma treatment apparatus, and plasma treatment method
CN103132027A (zh) * 2011-11-28 2013-06-05 鸿富锦精密工业（深圳）有限公司 真空镀膜设备
CN108385065A (zh) * 2018-05-23 2018-08-10 北京铂阳顶荣光伏科技有限公司 一种带有蒸发源的设备及安全控制方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03179742A (ja) * 1989-12-07 1991-08-05 Toshiba Corp 酸化珪素成膜方法
JP2000310694A (ja) * 1999-04-27 2000-11-07 Ishikawajima Harima Heavy Ind Co Ltd 原子炉圧力容器アクセスホールカバーの吊り耳切断用放電加工電極
JP2004183100A (ja) * 2002-11-30 2004-07-02 Applied Films Gmbh & Co Kg 蒸着装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100297003B1 (ko) * 1998-02-10 2001-08-07 서성기 박막증착장치
KR20020086761A (ko) * 2001-05-10 2002-11-20 주식회사 엘지이아이 냉각수단을 구비한 고분자막 연속증착장비

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03179742A (ja) * 1989-12-07 1991-08-05 Toshiba Corp 酸化珪素成膜方法
JP2000310694A (ja) * 1999-04-27 2000-11-07 Ishikawajima Harima Heavy Ind Co Ltd 原子炉圧力容器アクセスホールカバーの吊り耳切断用放電加工電極
JP2004183100A (ja) * 2002-11-30 2004-07-02 Applied Films Gmbh & Co Kg 蒸着装置

Also Published As

Publication number Publication date
KR100884161B1 (ko) 2009-02-17
KR20070012424A (ko) 2007-01-25
CN1946871A (zh) 2007-04-11
CN1946871B (zh) 2012-06-20
JP2005325410A (ja) 2005-11-24
JP4016071B2 (ja) 2007-12-05

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