CN108385065A - 一种带有蒸发源的设备及安全控制方法 - Google Patents
一种带有蒸发源的设备及安全控制方法 Download PDFInfo
- Publication number
- CN108385065A CN108385065A CN201810503126.9A CN201810503126A CN108385065A CN 108385065 A CN108385065 A CN 108385065A CN 201810503126 A CN201810503126 A CN 201810503126A CN 108385065 A CN108385065 A CN 108385065A
- Authority
- CN
- China
- Prior art keywords
- female connector
- pin end
- evaporation source
- fixing piece
- equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
- C23C14/543—Controlling the film thickness or evaporation rate using measurement on the vapor source
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Details Of Connecting Devices For Male And Female Coupling (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201810503126.9A CN108385065A (zh) | 2018-05-23 | 2018-05-23 | 一种带有蒸发源的设备及安全控制方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201810503126.9A CN108385065A (zh) | 2018-05-23 | 2018-05-23 | 一种带有蒸发源的设备及安全控制方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN108385065A true CN108385065A (zh) | 2018-08-10 |
Family
ID=63071940
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201810503126.9A Pending CN108385065A (zh) | 2018-05-23 | 2018-05-23 | 一种带有蒸发源的设备及安全控制方法 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN108385065A (zh) |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2194365Y (zh) * | 1994-07-13 | 1995-04-12 | 北京市天金机电新技术开发公司 | 多功能离子镀膜机 |
CN1946871A (zh) * | 2004-05-14 | 2007-04-11 | 株式会社昭和真空 | 具有冷却装置的装置及冷却方法 |
CN101824596A (zh) * | 2010-03-30 | 2010-09-08 | 东莞宏威数码机械有限公司 | 自动冷却式供电装置 |
US20140050850A1 (en) * | 2011-11-15 | 2014-02-20 | Panasonic Corporation | Vacuum apparatus, method for cooling heat source in vacuum, and thin film manufacturing method |
CN104009589A (zh) * | 2014-06-18 | 2014-08-27 | 东方电气集团东方电机有限公司 | 一种蒸发冷却介质泄漏监测处理系统 |
US20140238105A1 (en) * | 2013-02-26 | 2014-08-28 | Everdisplay Optronics (Shanghai) Limited | Device for detecting evaporation source and method for applying the same |
CN105953009A (zh) * | 2016-06-24 | 2016-09-21 | 中航光电科技股份有限公司 | 公接头、母接头及快速接头组件 |
CN208501083U (zh) * | 2018-05-23 | 2019-02-15 | 北京铂阳顶荣光伏科技有限公司 | 一种带有蒸发源的设备 |
-
2018
- 2018-05-23 CN CN201810503126.9A patent/CN108385065A/zh active Pending
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2194365Y (zh) * | 1994-07-13 | 1995-04-12 | 北京市天金机电新技术开发公司 | 多功能离子镀膜机 |
CN1946871A (zh) * | 2004-05-14 | 2007-04-11 | 株式会社昭和真空 | 具有冷却装置的装置及冷却方法 |
CN101824596A (zh) * | 2010-03-30 | 2010-09-08 | 东莞宏威数码机械有限公司 | 自动冷却式供电装置 |
US20140050850A1 (en) * | 2011-11-15 | 2014-02-20 | Panasonic Corporation | Vacuum apparatus, method for cooling heat source in vacuum, and thin film manufacturing method |
US20140238105A1 (en) * | 2013-02-26 | 2014-08-28 | Everdisplay Optronics (Shanghai) Limited | Device for detecting evaporation source and method for applying the same |
CN104009589A (zh) * | 2014-06-18 | 2014-08-27 | 东方电气集团东方电机有限公司 | 一种蒸发冷却介质泄漏监测处理系统 |
CN105953009A (zh) * | 2016-06-24 | 2016-09-21 | 中航光电科技股份有限公司 | 公接头、母接头及快速接头组件 |
CN208501083U (zh) * | 2018-05-23 | 2019-02-15 | 北京铂阳顶荣光伏科技有限公司 | 一种带有蒸发源的设备 |
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Legal Events
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PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
CB02 | Change of applicant information | ||
CB02 | Change of applicant information |
Address after: 100076 6015, 6th floor, building 8, 9 Yingshun Road, Yinghai Town, Daxing District, Beijing Applicant after: Beijing Dingrong Photovoltaic Technology Co.,Ltd. Address before: 100176 Beijing Daxing District Beijing economic and Technological Development Zone Rongchang East Street 7 hospital 6 Building 3001 room. Applicant before: BEIJING APOLLO DING RONG SOLAR TECHNOLOGY Co.,Ltd. |
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TA01 | Transfer of patent application right | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20210415 Address after: 518066 Room 201, building A, No. 1, Qian Wan Road, Qianhai Shenzhen Hong Kong cooperation zone, Shenzhen, Guangdong (Shenzhen Qianhai business secretary Co., Ltd.) Applicant after: Shenzhen Zhengyue development and Construction Co.,Ltd. Address before: 100076 6015, 6th floor, building 8, 9 Yingshun Road, Yinghai Town, Daxing District, Beijing Applicant before: Beijing Dingrong Photovoltaic Technology Co.,Ltd. |
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TA01 | Transfer of patent application right | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20210924 Address after: 201203 3rd floor, no.665 Zhangjiang Road, China (Shanghai) pilot Free Trade Zone, Pudong New Area, Shanghai Applicant after: Shanghai zuqiang Energy Co.,Ltd. Address before: 518066 Room 201, building A, No. 1, Qian Wan Road, Qianhai Shenzhen Hong Kong cooperation zone, Shenzhen, Guangdong (Shenzhen Qianhai business secretary Co., Ltd.) Applicant before: Shenzhen Zhengyue development and Construction Co.,Ltd. |