JP2005316412A - 感放射線性樹脂組成物 - Google Patents
感放射線性樹脂組成物 Download PDFInfo
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- JP2005316412A JP2005316412A JP2005060552A JP2005060552A JP2005316412A JP 2005316412 A JP2005316412 A JP 2005316412A JP 2005060552 A JP2005060552 A JP 2005060552A JP 2005060552 A JP2005060552 A JP 2005060552A JP 2005316412 A JP2005316412 A JP 2005316412A
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Abstract
【解決手段】 アルカリ可溶性樹脂、活性放射線の照射または活性放射線の照射と引き続く熱処理によってアルカリ可溶性樹脂を架橋する架橋成分、及び活性放射線を吸収する化合物を含有する感放射線性樹脂組成物であって、アルカリ可溶性樹脂がポリビニルフェノール30〜80重量%とノボラック樹脂20〜70重量%とを含有するものであり、かつ活性放射線を吸収する化合物がビスアジド化合物である感放射線性樹脂組成物。
【選択図】なし
Description
(1)アルカリ可溶性樹脂(a)が、ポリビニルフェノール30〜80重量%とノボラック樹脂20〜70重量%とを含有するものであり、かつ
(2)活性放射線を吸収する化合物(c)が、ビスアジド化合物である
ことを特徴とする感放射線性樹脂組成物が提供される。
本発明では、アルカリ可溶性樹脂として、ポリビニルフェノールとノボラック樹脂とを含有する樹脂組成物を使用する。アルカリ可溶性樹脂中でのポリビニルフェノールの割合は、30〜80重量%、好ましくは35〜75重量%、より好ましくは40〜70重量%である。したがって、ノボラック樹脂の割合は、20〜70重量%、好ましくは25〜65重量%、より好ましくは30〜60重量%である。
温度:38℃、
溶剤:テトラヒドロフラン、
流速:1.0ml/min、
試料:濃度0.05〜0.6重量%の試料を0.1ml注入。
本発明で使用する架橋成分は、活性放射線の照射または活性放射線の照射と引き続く熱処理によってアルカリ可溶性樹脂を架橋する成分である。この架橋成分の作用により、露光領域のアルカリ可溶性樹脂の分子量が大きくなって、アルカリ現像液に対する溶解速度が極端に低下する。それによって、本発明の感放射線性樹脂組成物は、アルカリ現像液による現像が可能なネガ型レジスト材料として機能する。
活性放射線によって酸を発生する化合物としては、活性放射線によって露光されると、ブレンステッド酸またはルイス酸を発生する物質であれば特に制限はなく、オニウム塩、ハロゲン化有機化合物、キノンジアジド化合物、スルホン化合物、有機酸エステル化合物、有機酸アミド化合物、有機酸イミド化合物など公知のものを用いることができる。これらの光酸発生剤は、パターンを露光する光源の波長に応じて、分光感度の面から選択することが好ましい。
酸架橋剤は、活性放射線の照射(露光)によって生じた酸の存在下で、アルカリ可溶性樹脂を架橋しうる化合物(感酸物質)である。このような酸架橋剤としては、例えば、アルコキシメチル化尿素樹脂、アルコキシメチル化メラミン樹脂、アルコキシメチル化ウロン樹脂、アルコキシメチル化グリコールウリル樹脂、アルコキシメチル化アミノ樹脂などの周知の酸架橋性化合物を挙げることができる。
レジストパターンの耐熱性向上の観点から、架橋成分(b)としては、光酸発生剤(b1)と酸架橋剤(b2)との組み合わせが好ましい。光酸発生剤(b1)と酸架橋剤(b2)との重量比(b1:b2)は、通常1:1〜1:30、好ましくは1:2〜1:25、より好ましくは1:3〜1:20である。両者の比率が上記範囲にあることによって、高度の耐熱性を達成することができる。
レジスト組成物中に活性放射線を吸収する化合物を含有させると、露光時に、レジスト膜の深さ方向に行く光を吸収するため、断面が逆テーパー状のレジストパターンを形成することができる。基板や基板上に形成されたITO膜などにより露光した光が反射することによっても、レジストパターンの形状が影響を受ける。したがって、露光光の反射防止のためにも、活性放射線を吸収する化合物が必要となる。特に架橋成分として光酸発生剤と酸架橋剤との組み合わせを用いたレジスト組成物は、架橋型の化学増幅レジストであって、光の照射により生成した酸がレジスト膜内で拡散し、光が当たらない領域にまで架橋反応を起こすため、活性放射線を吸収する化合物を存在させることにより、レジストパターンの形状を制御することが重要となる。
感放射線性樹脂組成物の各成分の分散性向上などの目的で、界面活性剤を添加することができる。界面活性剤としては、例えば、ポリオキシエチレンラウリルエーテル、ポリオキシエチレンステアリルエーテル、ポリオキシエチレンオレイルエーテル等のポリオキシエチレンアルキルエーテル類;ポリオキシエチレンオクチルフェニルエーテル、ポリオキシエチレンノニルフェノルエーテルなどのポリオキシエチレンアリールエーテル類;ポリエチレングリコールジラウレート、エチレングリコールジステアレート等のポリエチレングリコールジアルキルエステル類;エフトップ EF301、EF303、EF352(新秋田化成社製)、メガファックス F171、F172、F173、F177(大日本インキ社製)、フロラードFC430、FC431(住友スリーエム社製)、アサヒガード AG710、サーフロン S−382、SC−101、SC−102、SC−103、SC−104、SC−105、SC−106(旭硝子社製)等のフッ素界面活性剤;オルガノシロキサンポリマー KP341(信越化学工業社製);アクリル酸系またはメタクリル酸系(共)重合体ポリフローNo.75、No.95(共栄社油脂化学工業社製)が挙げられる。これらの界面活性剤の配合量は、レジスト組成物の固形分100重量部当り、通常2重量部以下、好ましくは1重量部以下である。
本発明の感放射線性樹脂組成物は、通常、各成分を有機溶剤に溶解し、濾過して得られる溶液として使用に供される。有機溶剤は、各成分を均一に溶解または分散し得るに足る量で用いられる。溶液中の固形分濃度は、通常5〜50重量%、好ましくは10〜40重量%程度である。
本発明では、感放射線性樹脂組成物の保存安定性を改善するために、含窒素塩基性化合物を添加することが好ましい。含窒素塩基性化合物としては、脂肪族第一級アミン、脂肪族第二級アミン、脂肪族第三級アミン、アミノアルコール、芳香族アミン、第四級アンモニウムヒドロキシド、脂環式アミンなどが挙げられる。
本発明の感放射線性樹脂組成物は、スピンコーティングなどの塗布法により、基板上に均一に塗布し、溶剤を乾燥除去すると、基板上にレジスト膜を形成する。このレジスト膜は、一般に、80〜110℃程度の加熱温度で、10〜200秒間程度の時間、加熱処理(プリベーク)される。このようにして、厚みが通常0.5〜5μm程度のレジスト膜を得る。
パターニングしたウェハを、更にホットプレート上で300℃で5分間ベークした。その後、SEMにより断面形状を観察した。逆テーパー形状が維持できており、かつ、加熱前後での線幅の収縮率が5%未満のものをA、5〜10%未満のもをB、逆テーパー形状が維持できていないもの、あるいは線幅の収縮率が10%以上のものをCと評価した。
パターニングしたウェハの断面を切り出し、SEMにより逆テーパー形状の側壁に異常な突起部位があるか否かを観察した。異常な突起部位がなければA、あった場合はBと評価した。
感放射線性樹脂組成物を5℃及び23℃の温度で、それぞれ3ヶ月保管後、感度(Eth)を測定した。5℃で保管した感放射線性樹脂組成物の感度を基準として、23℃で保管した感放射線性樹脂組成物の感度の変化が5%以内のものをA、5〜10%以内のものをB、10%を越えるものをCと評価した。
シリコンウェハ上に感放射線性樹脂組成物をスピンコートした後、110℃で90秒間ホットプレート上でベークし、膜厚1.95μmの膜を形成した。g線ステッパ(ニコン社製、商品名「NSR1505G6E」)を用いて、一定間隔で露光量を変化させて5mm角のパターンを100個露光した。露光後、110℃で60秒間ホットプレート上でベーク(PEB)することにより、露光部を架橋させた。PEB後、2.38重量%テトラメチルアンモニウムヒドロキシド(TMAH)水溶液で70秒間パドル現像し、露光した部分にレジスト膜が残り始めた部分の露光量を感度(Eth)とした。
パターニングの操作において、PEB時の温度を100℃及び120℃に変更した以外は同様に操作して、パターニングを行った。それぞれのPEB温度条件で得られたラインパターンの線幅をSEMにより測定し、その線幅変化を10℃当たりの変化量で計算した。
線幅変化量が、1.0μm/10℃以下のものをA、1.0μm/10℃超過2.0μm/10℃以下のものをB、2.0μm/10℃超過のものをCと評価した。
重量平均分子量(Mw)5000のポリp−ビニルフェノール(丸善石化社製、商品名「マルカリンカーS−2P」)70重量部と、m−クレゾール/p−クレゾールを70/30(重量比)の仕込み比でホルムアルデヒドと脱水縮合して得た重量平均分子量4000のノボラック樹脂30重量部とからなるアルカリ可溶性樹脂100重量部に対して、ハロゲン含有トリアジン系光酸発生剤(みどり化学社製、商品名「TAZ110」)2重量部、メラミン系架橋剤(酸架橋剤:三井サイテック社製、商品名「サイメル303」)20重量部、及びビスアジド化合物(東洋合成工業社製、商品名「BAC−M」)1重量部をプロピレングリコールモノメチルエーテルアセテート(PGMEA)290重量部中に溶解させた。得られた溶液を、孔径0.1μmのポリテトラフルオロエチレン製メンブランフィルターで濾過して、固形分濃度が30重量%のレジスト溶液を調製した。
ポリビニルフェノールとノボラック樹脂との配合割合を表1に示すように変更したこと以外は、実施例1と同様に操作した。パターンの断面形状は、逆テーパー状であった。結果を表1に示す。
ポリビニルフェノールとノボラック樹脂との配合割合を表1に示すように変更したこと以外は、実施例1と同様に操作した。結果を表1に示す。
活性放射線を吸収する化合物として、ビスアジド化合物に代えて、染料(オリエント化学社製、商品名「オイルイエロー」)を用いたこと以外は、実施例2と同様に操作した。結果を表1に示す。
活性放射線を吸収する化合物を使用しなかったこと以外は、実施例3と同様に操作した。結果を表1に示す。
実施例1〜3において、それぞれ含窒素塩基性化合物としてトリエタノールアミン0.1重量部を更に添加したこと以外は、同様に操作した。結果を表2に示す。
21:透明基板、22:ITO膜、23:レジストパターン(断面)、
24、24′:有機EL材料の蒸着膜、25、25′:金属蒸着膜、
31:透明基板、32:ITO膜、33:レジストパターン(断面)、
34a、34b、34c:有機EL材料の蒸着膜、
35、35′:金属蒸着膜、41:基板、42:レジストパターン(断面)、
43:オーバーハング部、51:基板、52:レジストパターン(断面)、
53:金属蒸着膜。
Claims (4)
- アルカリ可溶性樹脂(a)、活性放射線の照射または活性放射線の照射と引き続く熱処理によってアルカリ可溶性樹脂を架橋する架橋成分(b)、及び活性放射線を吸収する化合物(c)を含有する感放射線性樹脂組成物であって、
(1)アルカリ可溶性樹脂(a)が、ポリビニルフェノール30〜80重量%とノボラック樹脂20〜70重量%とを含有するものであり、かつ
(2)活性放射線を吸収する化合物(c)が、ビスアジド化合物である
ことを特徴とする感放射線性樹脂組成物。 - 含窒素塩基性化合物(d)をさらに含有する請求項1記載の感放射線性樹脂組成物。
- 有機EL表示素子の隔壁形成用レジスト材料である請求項1または2記載の感放射線性樹脂組成物。
- リフトオフ法による断面が逆テーパー状のパターン形成用レジスト材料である請求項1または2記載の感放射線性樹脂組成物。
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