JP2005311328A5 - - Google Patents
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- Publication number
- JP2005311328A5 JP2005311328A5 JP2005081271A JP2005081271A JP2005311328A5 JP 2005311328 A5 JP2005311328 A5 JP 2005311328A5 JP 2005081271 A JP2005081271 A JP 2005081271A JP 2005081271 A JP2005081271 A JP 2005081271A JP 2005311328 A5 JP2005311328 A5 JP 2005311328A5
- Authority
- JP
- Japan
- Prior art keywords
- manufacturing
- light emitting
- layer
- semiconductor layer
- emitting device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims 9
- 238000004519 manufacturing process Methods 0.000 claims 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 2
- 238000000034 method Methods 0.000 claims 2
- 229910052710 silicon Inorganic materials 0.000 claims 2
- 239000010703 silicon Substances 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 238000001312 dry etching Methods 0.000 claims 1
- 239000012535 impurity Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005081271A JP5004430B2 (ja) | 2004-03-25 | 2005-03-22 | 発光装置の製造方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004089213 | 2004-03-25 | ||
| JP2004089213 | 2004-03-25 | ||
| JP2005081271A JP5004430B2 (ja) | 2004-03-25 | 2005-03-22 | 発光装置の製造方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012088650A Division JP5244994B2 (ja) | 2004-03-25 | 2012-04-09 | 発光装置の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005311328A JP2005311328A (ja) | 2005-11-04 |
| JP2005311328A5 true JP2005311328A5 (enExample) | 2008-05-01 |
| JP5004430B2 JP5004430B2 (ja) | 2012-08-22 |
Family
ID=35439676
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005081271A Expired - Fee Related JP5004430B2 (ja) | 2004-03-25 | 2005-03-22 | 発光装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5004430B2 (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI291310B (en) * | 2005-12-01 | 2007-12-11 | Au Optronics Corp | Organic light emitting diode (OLED) display panel and method of forming polysilicon channel layer thereof |
| JP4752818B2 (ja) | 2007-07-06 | 2011-08-17 | ソニー株式会社 | 有機el表示装置、電子機器、有機el表示装置用の基板および有機el表示装置の製造方法 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1168110A (ja) * | 1997-08-13 | 1999-03-09 | Semiconductor Energy Lab Co Ltd | 表示装置の作製方法 |
| JP2000349301A (ja) * | 1999-04-01 | 2000-12-15 | Semiconductor Energy Lab Co Ltd | 半導体装置およびその作製方法 |
| JP3799915B2 (ja) * | 1999-12-08 | 2006-07-19 | セイコーエプソン株式会社 | 電気光学装置の製造方法並びに半導体基板及び電気光学装置 |
| JP2002072232A (ja) * | 2000-08-24 | 2002-03-12 | Sharp Corp | 液晶表示装置、及び、当該液晶表示装置の製造方法 |
-
2005
- 2005-03-22 JP JP2005081271A patent/JP5004430B2/ja not_active Expired - Fee Related
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