JP2005294815A5 - - Google Patents

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Publication number
JP2005294815A5
JP2005294815A5 JP2005062667A JP2005062667A JP2005294815A5 JP 2005294815 A5 JP2005294815 A5 JP 2005294815A5 JP 2005062667 A JP2005062667 A JP 2005062667A JP 2005062667 A JP2005062667 A JP 2005062667A JP 2005294815 A5 JP2005294815 A5 JP 2005294815A5
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JP
Japan
Prior art keywords
transistor
region
source
drain
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2005062667A
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English (en)
Japanese (ja)
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JP2005294815A (ja
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Publication date
Application filed filed Critical
Priority to JP2005062667A priority Critical patent/JP2005294815A/ja
Priority claimed from JP2005062667A external-priority patent/JP2005294815A/ja
Publication of JP2005294815A publication Critical patent/JP2005294815A/ja
Publication of JP2005294815A5 publication Critical patent/JP2005294815A5/ja
Withdrawn legal-status Critical Current

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JP2005062667A 2004-03-12 2005-03-07 薄膜トランジスタ及び半導体装置 Withdrawn JP2005294815A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005062667A JP2005294815A (ja) 2004-03-12 2005-03-07 薄膜トランジスタ及び半導体装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004071793 2004-03-12
JP2005062667A JP2005294815A (ja) 2004-03-12 2005-03-07 薄膜トランジスタ及び半導体装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2012007224A Division JP5542262B2 (ja) 2004-03-12 2012-01-17 半導体装置

Publications (2)

Publication Number Publication Date
JP2005294815A JP2005294815A (ja) 2005-10-20
JP2005294815A5 true JP2005294815A5 (enExample) 2008-04-10

Family

ID=35327351

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005062667A Withdrawn JP2005294815A (ja) 2004-03-12 2005-03-07 薄膜トランジスタ及び半導体装置

Country Status (1)

Country Link
JP (1) JP2005294815A (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007058329A1 (en) * 2005-11-15 2007-05-24 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
TWI850180B (zh) 2006-09-29 2024-07-21 日商半導體能源研究所股份有限公司 半導體裝置
JP5653669B2 (ja) * 2010-07-16 2015-01-14 株式会社ジャパンディスプレイ 表示装置
KR102138280B1 (ko) * 2013-04-30 2020-07-28 삼성디스플레이 주식회사 표시 패널 및 이를 구비하는 표시 장치
KR102486878B1 (ko) * 2017-09-06 2023-01-11 삼성디스플레이 주식회사 박막트랜지스터를 포함하는 표시 장치 및 그 제조 방법

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06317812A (ja) * 1993-04-30 1994-11-15 Fuji Xerox Co Ltd アクティブマトリクス素子及びその製造方法
JP4536186B2 (ja) * 1998-11-16 2010-09-01 株式会社半導体エネルギー研究所 半導体装置の作製方法
JP4785271B2 (ja) * 2001-04-27 2011-10-05 株式会社半導体エネルギー研究所 液晶表示装置、電子機器
JP2003197637A (ja) * 2001-12-27 2003-07-11 Casio Comput Co Ltd 薄膜トランジスタおよびその製造方法
JP2003332578A (ja) * 2002-05-09 2003-11-21 Sharp Corp 薄膜トランジスタ及びその製造方法並びにこれを用いた液晶表示装置
JP4083493B2 (ja) * 2002-07-30 2008-04-30 株式会社半導体エネルギー研究所 表示装置及び当該表示装置を具備する電子機器

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