JP2005281753A - 電解加工装置 - Google Patents
電解加工装置 Download PDFInfo
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- JP2005281753A JP2005281753A JP2004096287A JP2004096287A JP2005281753A JP 2005281753 A JP2005281753 A JP 2005281753A JP 2004096287 A JP2004096287 A JP 2004096287A JP 2004096287 A JP2004096287 A JP 2004096287A JP 2005281753 A JP2005281753 A JP 2005281753A
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- 238000003754 machining Methods 0.000 title claims abstract description 48
- 239000000126 substance Substances 0.000 title abstract description 17
- 239000007788 liquid Substances 0.000 claims abstract description 133
- 230000001172 regenerating effect Effects 0.000 claims abstract description 35
- 230000008929 regeneration Effects 0.000 claims description 88
- 238000011069 regeneration method Methods 0.000 claims description 88
- 238000005192 partition Methods 0.000 claims description 28
- 238000000034 method Methods 0.000 claims description 24
- 230000008569 process Effects 0.000 claims description 9
- 230000035699 permeability Effects 0.000 claims description 8
- 239000004020 conductor Substances 0.000 claims description 7
- 239000003014 ion exchange membrane Substances 0.000 claims description 2
- 150000002500 ions Chemical class 0.000 abstract description 154
- 230000008021 deposition Effects 0.000 abstract description 12
- 238000001556 precipitation Methods 0.000 abstract description 6
- 239000000758 substrate Substances 0.000 description 60
- 239000010949 copper Substances 0.000 description 29
- 229910052802 copper Inorganic materials 0.000 description 28
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 27
- 229910021642 ultra pure water Inorganic materials 0.000 description 26
- 239000012498 ultrapure water Substances 0.000 description 26
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 26
- 239000000463 material Substances 0.000 description 23
- 150000001768 cations Chemical class 0.000 description 21
- 239000000047 product Substances 0.000 description 21
- 238000005341 cation exchange Methods 0.000 description 19
- 238000005349 anion exchange Methods 0.000 description 18
- 150000001450 anions Chemical class 0.000 description 18
- 239000012535 impurity Substances 0.000 description 18
- -1 hydroxide ions Chemical class 0.000 description 17
- 238000006243 chemical reaction Methods 0.000 description 13
- 238000000151 deposition Methods 0.000 description 13
- 238000005342 ion exchange Methods 0.000 description 11
- 239000008151 electrolyte solution Substances 0.000 description 10
- 238000010559 graft polymerization reaction Methods 0.000 description 10
- 239000004745 nonwoven fabric Substances 0.000 description 8
- 239000000243 solution Substances 0.000 description 8
- 239000002253 acid Substances 0.000 description 7
- 239000010410 layer Substances 0.000 description 6
- 238000003672 processing method Methods 0.000 description 6
- 230000009471 action Effects 0.000 description 5
- 150000001875 compounds Chemical class 0.000 description 5
- 238000005498 polishing Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 4
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 4
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 4
- 239000003792 electrolyte Substances 0.000 description 4
- 229910052739 hydrogen Inorganic materials 0.000 description 4
- 239000001257 hydrogen Substances 0.000 description 4
- 239000000178 monomer Substances 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 230000005855 radiation Effects 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- 239000004094 surface-active agent Substances 0.000 description 4
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical group OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 3
- 239000003513 alkali Substances 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 239000002585 base Substances 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 238000004891 communication Methods 0.000 description 3
- 238000004090 dissolution Methods 0.000 description 3
- 239000000835 fiber Substances 0.000 description 3
- 239000010419 fine particle Substances 0.000 description 3
- 230000001678 irradiating effect Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 229920000098 polyolefin Polymers 0.000 description 3
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 2
- 239000005751 Copper oxide Substances 0.000 description 2
- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- 229910021529 ammonia Inorganic materials 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 229910001431 copper ion Inorganic materials 0.000 description 2
- 229910000431 copper oxide Inorganic materials 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 238000001962 electrophoresis Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 229920000620 organic polymer Polymers 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229920000573 polyethylene Polymers 0.000 description 2
- 229920001155 polypropylene Polymers 0.000 description 2
- 125000001453 quaternary ammonium group Chemical group 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000011734 sodium Substances 0.000 description 2
- 239000011780 sodium chloride Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 125000000542 sulfonic acid group Chemical group 0.000 description 2
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- IWTYTFSSTWXZFU-UHFFFAOYSA-N 3-chloroprop-1-enylbenzene Chemical compound ClCC=CC1=CC=CC=C1 IWTYTFSSTWXZFU-UHFFFAOYSA-N 0.000 description 1
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229920000557 Nafion® Polymers 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 125000003277 amino group Chemical group 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 150000001879 copper Chemical class 0.000 description 1
- HTXDPTMKBJXEOW-UHFFFAOYSA-N dioxoiridium Chemical compound O=[Ir]=O HTXDPTMKBJXEOW-UHFFFAOYSA-N 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000010828 elution Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000005251 gamma ray Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- VOZRXNHHFUQHIL-UHFFFAOYSA-N glycidyl methacrylate Chemical compound CC(=C)C(=O)OCC1CO1 VOZRXNHHFUQHIL-UHFFFAOYSA-N 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 150000004679 hydroxides Chemical class 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 229910000457 iridium oxide Inorganic materials 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000010338 mechanical breakdown Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 150000002843 nonmetals Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000010970 precious metal Substances 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910001415 sodium ion Inorganic materials 0.000 description 1
- MNCGMVDMOKPCSQ-UHFFFAOYSA-M sodium;2-phenylethenesulfonate Chemical compound [Na+].[O-]S(=O)(=O)C=CC1=CC=CC=C1 MNCGMVDMOKPCSQ-UHFFFAOYSA-M 0.000 description 1
- 239000007784 solid electrolyte Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 239000002759 woven fabric Substances 0.000 description 1
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
- C25F7/00—Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects; Servicing or operating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H5/00—Combined machining
- B23H5/06—Electrochemical machining combined with mechanical working, e.g. grinding or honing
- B23H5/08—Electrolytic grinding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/32115—Planarisation
- H01L21/3212—Planarisation by chemical mechanical polishing [CMP]
- H01L21/32125—Planarisation by chemical mechanical polishing [CMP] by simultaneously passing an electrical current, i.e. electrochemical mechanical polishing, e.g. ECMP
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
- Weting (AREA)
Abstract
【解決手段】 電解加工装置50は、給電電極74、イオン交換体76、加工電極72、加工用液体供給源80、再生用液体室90a,90b、再生用液体供給源94、再生電極84を備える。さらに、電解加工装置50は、給電電極74と加工電極72との間に電圧を印加する加工用電源58と、加工電極72と再生電極84との間に電圧を印加する再生用電源96とを備える。給電電極74、加工電極72、再生電極84の順に電位が構成され、かつ、給電電極74と加工電極72の極性が同一になるように加工用電源58による電圧と再生用電源96による電圧とを制御する。
【選択図】図4
Description
52 アーム
54 基板保持部
56 電極部
56a 貫通孔
56b,56c 凹部
56d 再生用液体供給流路
56e 再生用液体排出流路
58 加工用電源
60 揺動用モータ
62 揺動軸
64 ボールねじ
66 上下動用モータ
68 自転用モータ
70 中空モータ
72 加工電極
74 給電電極
76 イオン交換体
78 加工用液体供給管
80 加工用液体供給源
82 コントロールボックス
84 再生電極
86 隔壁
88 絶縁部材
90a,90b 再生用液体室
92 再生用液体供給管
94 再生用液体供給源
96 再生用電源
97a,98a 第1の電源
97b,98b 第2の電源
Claims (8)
- 被加工物上の導電性材料を電解加工する電解加工装置であって、
被加工物に給電する給電電極と、
被加工物に接触または近接して配置される接触部材と、
被加工物上の導電性材料を電解加工する加工電極と、
被加工物と前記接触部材との間に加工用液体を供給する加工用液体供給源と、
前記加工電極を再生用液体に浸漬する再生用液体室と、
前記再生用液体室に再生用液体を供給する再生用液体供給源と、
前記加工電極から離間して配置された再生電極と、
前記給電電極と前記加工電極と前記再生電極とに電圧を印加する電源と、
前記給電電極、前記加工電極、前記再生電極の順に電位が構成され、かつ、前記給電電極と前記加工電極の極性が同一になるように、前記電源により前記給電電極と前記加工電極と前記再生電極とに印加される電圧を制御する制御部と、
を備えたことを特徴とする電解加工装置。 - 前記接触部材と前記加工電極との間に配置された通液性を有する絶縁部材をさらに備えたことを特徴とする請求項1に記載の電解加工装置。
- 加工用液体と再生用液体とを隔離するように前記接触部材と前記絶縁部材との間に配置された隔壁をさらに備えたことを特徴とする請求項2に記載の電解加工装置。
- 前記隔壁はイオン交換膜であることを特徴とする請求項3に記載の電解加工装置。
- 前記接触部材はイオン交換体であることを特徴とする請求項1から4のいずれか一項に記載の電解加工装置。
- 前記加工電極は通液性を有することを特徴とする請求項1から5のいずれか一項に記載の電解加工装置。
- 前記制御部は、前記給電電極、前記加工電極、および前記再生電極の電位、または前記給電電極、前記加工電極、および前記再生電極を流れる電流をさらに制御することを特徴とする請求項1から6のいずれか一項に記載の電解加工装置。
- 前記制御部は、前記加工電極に流れる電流が前記給電電極または前記再生電極に流れる電流の1〜30%となるように前記加工電極に流れる電流を制御することを特徴とする請求項7に記載の電解加工装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004096287A JP2005281753A (ja) | 2004-03-29 | 2004-03-29 | 電解加工装置 |
PCT/JP2005/006208 WO2005093135A1 (en) | 2004-03-29 | 2005-03-24 | Electrolytic processing apparatus |
US10/585,739 US20080217164A1 (en) | 2004-03-29 | 2005-03-24 | Electrolytic Processing Apparatus |
TW094109721A TW200536643A (en) | 2004-03-29 | 2005-03-29 | Electrolytic processing apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004096287A JP2005281753A (ja) | 2004-03-29 | 2004-03-29 | 電解加工装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005281753A true JP2005281753A (ja) | 2005-10-13 |
JP2005281753A5 JP2005281753A5 (ja) | 2007-04-12 |
Family
ID=35056231
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004096287A Ceased JP2005281753A (ja) | 2004-03-29 | 2004-03-29 | 電解加工装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US20080217164A1 (ja) |
JP (1) | JP2005281753A (ja) |
TW (1) | TW200536643A (ja) |
WO (1) | WO2005093135A1 (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018150599A (ja) * | 2017-03-14 | 2018-09-27 | トヨタ自動車株式会社 | 金属皮膜の成膜方法 |
JP2018154855A (ja) * | 2017-03-15 | 2018-10-04 | トヨタ自動車株式会社 | 金属皮膜の成膜装置 |
JP2018154854A (ja) * | 2017-03-15 | 2018-10-04 | トヨタ自動車株式会社 | 金属皮膜の成膜方法 |
JP2018178140A (ja) * | 2017-04-03 | 2018-11-15 | トヨタ自動車株式会社 | 金属皮膜の成膜装置 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102019200832A1 (de) * | 2019-01-24 | 2020-07-30 | MTU Aero Engines AG | VERFAHREN ZUM ENTFERNEN VON Cr(VI)-IONEN AUS EINER WÄSSRIGEN ELEKTROLYTLÖSUNG |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003297804A (ja) * | 2002-01-31 | 2003-10-17 | Ebara Corp | 基板処理装置および方法 |
JP2004002955A (ja) * | 2002-03-22 | 2004-01-08 | Ebara Corp | 電解加工装置及び方法 |
JP2004015028A (ja) * | 2002-06-11 | 2004-01-15 | Ebara Corp | 基板処理方法及び半導体装置 |
JP2004017177A (ja) * | 2002-06-12 | 2004-01-22 | Ebara Corp | イオン交換体の固定方法、固定構造並びに電解加工装置 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6722950B1 (en) * | 2000-11-07 | 2004-04-20 | Planar Labs Corporation | Method and apparatus for electrodialytic chemical mechanical polishing and deposition |
KR100917433B1 (ko) * | 2001-11-29 | 2009-09-14 | 가부시키가이샤 에바라 세이사꾸쇼 | 이온 교환기를 재생시키는 방법 및 장치, 그리고 전해질처리장치 |
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2004
- 2004-03-29 JP JP2004096287A patent/JP2005281753A/ja not_active Ceased
-
2005
- 2005-03-24 WO PCT/JP2005/006208 patent/WO2005093135A1/en active Application Filing
- 2005-03-24 US US10/585,739 patent/US20080217164A1/en not_active Abandoned
- 2005-03-29 TW TW094109721A patent/TW200536643A/zh unknown
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003297804A (ja) * | 2002-01-31 | 2003-10-17 | Ebara Corp | 基板処理装置および方法 |
JP2004002955A (ja) * | 2002-03-22 | 2004-01-08 | Ebara Corp | 電解加工装置及び方法 |
JP2004015028A (ja) * | 2002-06-11 | 2004-01-15 | Ebara Corp | 基板処理方法及び半導体装置 |
JP2004017177A (ja) * | 2002-06-12 | 2004-01-22 | Ebara Corp | イオン交換体の固定方法、固定構造並びに電解加工装置 |
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JP2018154855A (ja) * | 2017-03-15 | 2018-10-04 | トヨタ自動車株式会社 | 金属皮膜の成膜装置 |
JP2018154854A (ja) * | 2017-03-15 | 2018-10-04 | トヨタ自動車株式会社 | 金属皮膜の成膜方法 |
JP2018178140A (ja) * | 2017-04-03 | 2018-11-15 | トヨタ自動車株式会社 | 金属皮膜の成膜装置 |
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WO2005093135A1 (en) | 2005-10-06 |
US20080217164A1 (en) | 2008-09-11 |
TW200536643A (en) | 2005-11-16 |
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