JP2005218202A - アクチュエータ及びボンディング装置 - Google Patents
アクチュエータ及びボンディング装置 Download PDFInfo
- Publication number
- JP2005218202A JP2005218202A JP2004020434A JP2004020434A JP2005218202A JP 2005218202 A JP2005218202 A JP 2005218202A JP 2004020434 A JP2004020434 A JP 2004020434A JP 2004020434 A JP2004020434 A JP 2004020434A JP 2005218202 A JP2005218202 A JP 2005218202A
- Authority
- JP
- Japan
- Prior art keywords
- rotating body
- rectilinear
- bonding apparatus
- along
- axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/0711—Apparatus therefor
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/0711—Apparatus therefor
- H10W72/07168—Means for storing or moving the material for the connector
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/075—Connecting or disconnecting of bond wires
- H10W72/07502—Connecting or disconnecting of bond wires using an auxiliary member
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/50—Bond wires
- H10W72/551—Materials of bond wires
- H10W72/552—Materials of bond wires comprising metals or metalloids, e.g. silver
Landscapes
- Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
- Wire Bonding (AREA)
- Die Bonding (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004020434A JP2005218202A (ja) | 2004-01-28 | 2004-01-28 | アクチュエータ及びボンディング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004020434A JP2005218202A (ja) | 2004-01-28 | 2004-01-28 | アクチュエータ及びボンディング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005218202A true JP2005218202A (ja) | 2005-08-11 |
| JP2005218202A5 JP2005218202A5 (https=) | 2006-04-06 |
Family
ID=34904354
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004020434A Pending JP2005218202A (ja) | 2004-01-28 | 2004-01-28 | アクチュエータ及びボンディング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2005218202A (https=) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006036669A1 (en) * | 2004-09-22 | 2006-04-06 | Kulicke And Soffa Industries, Inc. | Motion control device for wire bonder bondhead |
| WO2019151340A1 (ja) * | 2018-01-30 | 2019-08-08 | 株式会社新川 | アクチュエータ及びワイヤボンディング装置 |
-
2004
- 2004-01-28 JP JP2004020434A patent/JP2005218202A/ja active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006036669A1 (en) * | 2004-09-22 | 2006-04-06 | Kulicke And Soffa Industries, Inc. | Motion control device for wire bonder bondhead |
| WO2019151340A1 (ja) * | 2018-01-30 | 2019-08-08 | 株式会社新川 | アクチュエータ及びワイヤボンディング装置 |
| CN111656502A (zh) * | 2018-01-30 | 2020-09-11 | 株式会社新川 | 致动器以及打线接合装置 |
| JPWO2019151340A1 (ja) * | 2018-01-30 | 2021-01-07 | 株式会社新川 | アクチュエータ及びワイヤボンディング装置 |
| JP7002148B2 (ja) | 2018-01-30 | 2022-01-20 | 株式会社新川 | アクチュエータ及びワイヤボンディング装置 |
| CN111656502B (zh) * | 2018-01-30 | 2023-05-26 | 株式会社新川 | 致动器以及打线接合装置 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7898204B2 (en) | High-speed substrate manipulator | |
| CN104883011B (zh) | 转子线圈的制造方法和旋转电机 | |
| JP4902612B2 (ja) | 機械装置の平面ステージ移動装置 | |
| JP2005218202A (ja) | アクチュエータ及びボンディング装置 | |
| JP2010159842A (ja) | 磁気軸受 | |
| JP4018057B2 (ja) | ボンディング装置 | |
| US7265461B2 (en) | Actuator and bonding apparatus | |
| US8256658B2 (en) | Wire bonding apparatus comprising rotary positioning stage | |
| JP3993157B2 (ja) | ボンディング装置 | |
| US6279490B1 (en) | Epicyclic stage | |
| JP4826149B2 (ja) | 長ストローク移動可能なアライメントステージ | |
| JP4581641B2 (ja) | 平面ステージ | |
| JP2005353839A (ja) | ボンディング装置 | |
| JP2008187807A (ja) | コイル巻線装置及び方法及びステータ | |
| JPH10303241A (ja) | ワイヤボンダー | |
| WO2016199660A1 (ja) | 加工機 | |
| JP5141652B2 (ja) | 直動回転アクチュエータ | |
| JP2014046339A (ja) | 傾斜角度調整機構を有する摩擦攪拌接合装置 | |
| JP3590946B2 (ja) | 多自由度加工ステージ装置 | |
| JP5407277B2 (ja) | Xyステージ装置 | |
| JP4204816B2 (ja) | テーブル駆動装置 | |
| JP2014069205A (ja) | サポートユニット及びそれを用いた摩擦撹拌接合装置 | |
| JP2946007B2 (ja) | ボンディング装置 | |
| JP2005219148A (ja) | ロボット | |
| JPH01303360A (ja) | 2次元運動機構 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20060221 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20060221 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20081201 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20090324 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20090714 |