JP4018057B2 - ボンディング装置 - Google Patents
ボンディング装置 Download PDFInfo
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- JP4018057B2 JP4018057B2 JP2003382890A JP2003382890A JP4018057B2 JP 4018057 B2 JP4018057 B2 JP 4018057B2 JP 2003382890 A JP2003382890 A JP 2003382890A JP 2003382890 A JP2003382890 A JP 2003382890A JP 4018057 B2 JP4018057 B2 JP 4018057B2
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- bonding
- bonding head
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25C—HAND-HELD NAILING OR STAPLING TOOLS; MANUALLY OPERATED PORTABLE STAPLING TOOLS
- B25C1/00—Hand-held nailing tools; Nail feeding devices
- B25C1/04—Hand-held nailing tools; Nail feeding devices operated by fluid pressure, e.g. by air pressure
- B25C1/047—Mechanical details
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/002—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating specially adapted for particular articles or work
- B23K20/004—Wire welding
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K37/00—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
- B23K37/02—Carriages for supporting the welding or cutting element
- B23K37/0247—Driving means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25C—HAND-HELD NAILING OR STAPLING TOOLS; MANUALLY OPERATED PORTABLE STAPLING TOOLS
- B25C1/00—Hand-held nailing tools; Nail feeding devices
- B25C1/008—Safety devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/78—Apparatus for connecting with wire connectors
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45144—Gold (Au) as principal constituent
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
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- H—ELECTRICITY
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L24/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L24/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01005—Boron [B]
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- H—ELECTRICITY
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
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- H01L2924/01006—Carbon [C]
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
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- H01L2924/01007—Nitrogen [N]
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- H—ELECTRICITY
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
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- H01L2924/01029—Copper [Cu]
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- H—ELECTRICITY
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
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- H01L2924/01033—Arsenic [As]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01039—Yttrium [Y]
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- H—ELECTRICITY
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01074—Tungsten [W]
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01075—Rhenium [Re]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01079—Gold [Au]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01082—Lead [Pb]
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/17—Surface bonding means and/or assemblymeans with work feeding or handling means
- Y10T156/1702—For plural parts or plural areas of single part
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/17—Surface bonding means and/or assemblymeans with work feeding or handling means
- Y10T156/1702—For plural parts or plural areas of single part
- Y10T156/1744—Means bringing discrete articles into assembled relationship
- Y10T156/1768—Means simultaneously conveying plural articles from a single source and serially presenting them to an assembly station
Description
1.ボンディングヘッド部が、2段に重ねられたXテーブルとYテーブルの上に搭載され るため、移動のために駆動すべき質量がボンディングヘッド部の質量のみならずXテ ーブルやYテーブルの質量も加算される。したがって、重い質量を駆動することにな り、ボンディングヘッド部の移動速度をより高速化することが困難である。
2.Xテーブルの上をYテーブル及びボンディングヘッド部がY方向に移動するので、X 方向駆動モータの駆動方向と、Yテーブル及びボンディングヘッド部の重心位置との 間に偏心が生ずる。このためX方向の駆動力によりボンディングヘッド部に対する回 転力が生じ、これを防止するため、リニアガイド等の案内機構の剛性を高める必要が あり、そのための質量がさらに増加する。したがって、ボンディングヘッド部の移動 速度の高速化を阻害する。
3.X方向の移動精度及びY方向の移動精度をきめるリニアガイドの真直精度の向上に限 度があり、位置決め精度をより高めることが困難である。
4.Xテーブルの移動に伴い、その上のYテーブルもX方向に移動する。つまり、Y方向 アクチュエータの可動コイルは、Y方向に移動するのみならずX方向にも移動する。 したがって、Y方向アクチュエータの駆動磁界発生用磁石は、この可動コイルの移動 範囲をカバーするために大型化し、コストアップになる。
また、ボンディングヘッド部120は図9に示すように円弧運動を行うが、ボンディングヘッド部120自身に回転軸受等の複雑な機構を要しない。
Claims (9)
- ボンディング対象に対しボンディング作業を行うボンディングヘッド部と、ボンディングヘッド部を任意の位置に移動させる移動機構とを含むボンディング装置であって、
移動機構は、
架台に回転自在に支持されるリニアガイドに沿って移動可能な第1可動子と、第1可動子を駆動する駆動部とを有する第1アクチュエータと、
架台に回転自在に支持されるリニアガイドに沿って移動可能な第2可動子と、第2可動子を駆動する駆動部とを有する第2アクチュエータと、
を含み、
ボンディングヘッド部に第1可動子が固定され、第2可動子が軸支されることを特徴とするボンディング装置。 - 請求項1に記載のボンディング装置において、
第1アクチュエータは、駆動部と第1可動子を案内するリニアガイドとが一体として架台に対し回転自在に支持され、
第2アクチュエータは、駆動部と第2可動子を案内するリニアガイドとが一体として架台に対し回転自在に支持されることを特徴とするボンディング装置。 - 請求項1に記載のボンディング装置において、
第1アクチュエータは、第1可動子としての第1可動コイルと、第1可動コイルに鎖交磁束を与える磁石を含み架台に固定される駆動部とを有し、第1可動コイルの大きさは、第1可動コイルの回転及び直線移動によって第1可動コイルに与えられる鎖交磁束量が変化しない条件に基づいて設定され、
第2アクチュエータは、第2可動子としての第2可動コイルと、第2可動コイルに鎖交磁束を与える磁石を含み架台に固定される駆動部とを有し、第2可動コイルの大きさが、第2可動コイルの回転及び直線移動によって第2可動コイルに与えられる鎖交磁束量が変化しない条件に基づいて設定されることを特徴とするボンディング装置。 - ボンディング対象に対しボンディング作業を行うボンディングヘッド部と、ボンディングヘッド部を任意の位置に移動させる移動機構とを含むボンディング装置であって、
移動機構は、
架台に固定されるリニアガイドに沿って移動可能なスライド台に回転自在に支持される第1可動子である第1可動コイルと、第1可動コイルに鎖交磁束を与える磁石を含み架台に固定される駆動部とを有し、第1可動コイルの大きさが、第1可動コイルの回転及び直線移動によって第1可動コイルに与えられる鎖交磁束量が変化しない条件に基づいて設定される第1アクチュエータと、
架台に固定されるリニアガイドに沿って移動可能なスライド台に回転自在に支持される第2可動子である第2可動コイルと、第2可動コイルに鎖交磁束を与える磁石を含み架台に固定される駆動部とを有し、第2可動コイルの大きさが、第2可動コイルの回転及び直線移動によって第2可動コイルに与えられる鎖交磁束量が変化しない条件に基づいて設定される第2アクチュエータと、
を含み、
ボンディングヘッド部に第1可動子が固定され、第2可動子が軸支されることを特徴とするボンディング装置。 - 請求項1乃至請求項4のいずれか1に記載のボンディング装置において、
第1可動子の回転中心と第1可動子がボンディングヘッド部に固定される固定点とを結ぶ直線と、第2可動子の回転中心と第2可動子がボンディングヘッド部に軸支される軸支点とを結ぶ直線との交点が、ボンディングヘッド部の重心位置に略一致することを特徴とするボンディング装置。 - 請求項1乃至請求項4のいずれか1に記載のボンディング装置において、
ボンディングヘッド部は架台に対し流体圧により支持されることを特徴とするボンディング装置。 - 請求項1乃至請求項4のいずれか1に記載のボンディング装置において、
架台は、流体圧によりボンディングヘッド部を支持する流体圧支持架台であることを特徴とするボンディング装置。 - 請求項1または請求項2に記載のボンディング装置において、
架台は、ボンディングヘッド部を吊り下げて支持する吊り下げ架台であることを特徴とするボンディング装置。 - 請求項1乃至請求項4のいずれか1に記載のボンディング装置において、
第1可動子の位置を検出する第1センサと、
第2可動子の位置を検出する第2センサと、
第1センサの検出データ及び第2センサの検出データに基づき、ボンディングヘッド部の位置を架台に対する直交座標系の位置として算出する位置算出手段と、
算出された直交座標系の位置に基づいてボンディングヘッド部の位置制御を行う制御手段と、
を備えることを特徴とするボンディング装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003382890A JP4018057B2 (ja) | 2003-03-31 | 2003-11-12 | ボンディング装置 |
TW092137004A TW200421508A (en) | 2003-03-31 | 2003-12-26 | Bonding device |
KR1020040003684A KR100545341B1 (ko) | 2003-03-31 | 2004-01-19 | 본딩 장치 |
US10/808,845 US7096912B2 (en) | 2003-03-31 | 2004-03-25 | Bonding apparatus |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003096241 | 2003-03-31 | ||
JP2003382890A JP4018057B2 (ja) | 2003-03-31 | 2003-11-12 | ボンディング装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2004319958A JP2004319958A (ja) | 2004-11-11 |
JP4018057B2 true JP4018057B2 (ja) | 2007-12-05 |
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Application Number | Title | Priority Date | Filing Date |
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JP2003382890A Expired - Fee Related JP4018057B2 (ja) | 2003-03-31 | 2003-11-12 | ボンディング装置 |
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---|---|
US (1) | US7096912B2 (ja) |
JP (1) | JP4018057B2 (ja) |
KR (1) | KR100545341B1 (ja) |
TW (1) | TW200421508A (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
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JP3993157B2 (ja) * | 2003-10-23 | 2007-10-17 | 株式会社新川 | ボンディング装置 |
JP2005353839A (ja) * | 2004-06-10 | 2005-12-22 | Shinkawa Ltd | ボンディング装置 |
US20060060631A1 (en) * | 2004-09-22 | 2006-03-23 | Kulicke And Soffa Industries, Inc. | Motion control device for wire bonder bondhead |
US7810698B2 (en) * | 2008-11-20 | 2010-10-12 | Asm Assembly Automation Ltd. | Vision system for positioning a bonding tool |
JP4595018B2 (ja) * | 2009-02-23 | 2010-12-08 | 株式会社新川 | 半導体装置の製造方法およびボンディング装置 |
KR20110137602A (ko) * | 2010-06-17 | 2011-12-23 | 한미반도체 주식회사 | 다이 본딩 장치의 본드 헤드 |
KR101483047B1 (ko) * | 2013-07-02 | 2015-01-19 | 김성갑 | 스폿 용접기의 타점 누락 방지 시스템 |
CN105666463B (zh) * | 2016-04-15 | 2018-06-19 | 东莞理工学院 | 一种核辐射环境下的末端工具手及其手抓快速拆装系统 |
US11289446B2 (en) * | 2018-03-28 | 2022-03-29 | Asm Technology Singapore Pte Ltd | Multiple actuator wire bonding apparatus |
US11289445B2 (en) * | 2018-12-24 | 2022-03-29 | Asm Technology Singapore Pte Ltd | Die bonder incorporating rotatable adhesive dispenser head |
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JPH05235077A (ja) * | 1991-04-26 | 1993-09-10 | Texas Instr Inc <Ti> | 半導体デバイスボンディング用の極座標運動ボンディングヘッド |
JPH09285874A (ja) * | 1996-04-25 | 1997-11-04 | Fanuc Ltd | スポット溶接システム |
JP3718395B2 (ja) * | 1999-11-12 | 2005-11-24 | 超音波工業株式会社 | ボンディング装置のボンディングヘッド |
JP3885867B2 (ja) * | 2000-11-29 | 2007-02-28 | 日本電気株式会社 | ワイヤボンディング装置 |
JP4021158B2 (ja) | 2001-04-27 | 2007-12-12 | 株式会社新川 | 半導体製造装置におけるxyテーブル |
-
2003
- 2003-11-12 JP JP2003382890A patent/JP4018057B2/ja not_active Expired - Fee Related
- 2003-12-26 TW TW092137004A patent/TW200421508A/zh unknown
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2004
- 2004-01-19 KR KR1020040003684A patent/KR100545341B1/ko not_active IP Right Cessation
- 2004-03-25 US US10/808,845 patent/US7096912B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
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US20040188026A1 (en) | 2004-09-30 |
TW200421508A (en) | 2004-10-16 |
JP2004319958A (ja) | 2004-11-11 |
KR20040086158A (ko) | 2004-10-08 |
US7096912B2 (en) | 2006-08-29 |
KR100545341B1 (ko) | 2006-01-24 |
TWI293489B (ja) | 2008-02-11 |
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