JP4397349B2 - チップボンディング装置 - Google Patents
チップボンディング装置 Download PDFInfo
- Publication number
- JP4397349B2 JP4397349B2 JP2005148425A JP2005148425A JP4397349B2 JP 4397349 B2 JP4397349 B2 JP 4397349B2 JP 2005148425 A JP2005148425 A JP 2005148425A JP 2005148425 A JP2005148425 A JP 2005148425A JP 4397349 B2 JP4397349 B2 JP 4397349B2
- Authority
- JP
- Japan
- Prior art keywords
- axis direction
- bonding apparatus
- chip bonding
- drive
- bonding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000007246 mechanism Effects 0.000 description 10
- 239000011295 pitch Substances 0.000 description 10
- 238000004804 winding Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 7
- 230000005484 gravity Effects 0.000 description 4
- 238000003825 pressing Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- BGPVFRJUHWVFKM-UHFFFAOYSA-N N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] Chemical compound N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] BGPVFRJUHWVFKM-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000002079 cooperative effect Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 230000020169 heat generation Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000032258 transport Effects 0.000 description 2
- 239000013585 weight reducing agent Substances 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 230000000875 corresponding effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910001172 neodymium magnet Inorganic materials 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67144—Apparatus for mounting on conductive members, e.g. leadframes or conductors on insulating substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/75—Apparatus for connecting with bump connectors or layer connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/40—Details of apparatuses used for either manufacturing connectors or connecting the semiconductor or solid-state body
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Die Bonding (AREA)
- Supply And Installment Of Electrical Components (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
Claims (6)
- X軸方向に低速駆動されるXテーブルと、
Xテーブル上でY軸方向に高速駆動されるYテーブルと、
ボンディングヘッド部が搭載されるZテーブルと、
駆動コイル部と磁石部とで構成される固定子部と可動子部とを有し、ZテーブルをZ軸方向に高速駆動するZ駆動モータと、
を備えるチップボンディング装置であって、
Z駆動モータは、
固定子部と可動子のうち、重い質量または大きな慣性を有する固定子部がXテーブルに設けられ、
軽い質量または小さな慣性を有する可動子部がボンディングヘッド部に接続され、Yテーブル上に設けられた案内に沿ってZ軸方向に移動可能であり、
固定子部と可動子部との協働によって可動子にZ軸方向の駆動力を生じさせることを特徴とするチップボンディング装置。 - 請求項1に記載のチップボンディング装置において、
可動子部は、
ボンディングヘッド部に接続され、YZ平面内で扁平な駆動コイル部であって、
固定子部は、
磁性体のヨークと、
駆動コイルに向かい合い、駆動コイルのYZ平面内の移動範囲全体をカバーする対向面積を有する磁石部と、
を有することを特徴とするチップボンディング装置。 - 請求項2に記載のチップボンディング装置において、
固定子部は、
駆動コイルのYZ平面を挟んで、両側にそれぞれ配置されることを特徴とするチップボンディング装置。 - 請求項2に記載のチップボンディング装置において、
固定子部は、
駆動コイルのYZ平面を挟んで、いずれか片側に配置されることを特徴とするチップボンディング装置。 - 請求項2に記載のチップボンディング装置において、
可動子部は、
Z軸方向に沿って配置される複数の駆動コイルであって、各駆動コイルの協調的な駆動によって全体としてZ軸方向に沿って移動する駆動磁場を形成するように駆動される複数の駆動コイルを有し、
固定子部は、
Z軸方向に交互に極性を変えて配置される複数の固定子磁石であって、各駆動コイルによって形成される駆動磁場と協働して可動子部にZ軸方向の駆動力を生じさせる極性配置関係で配置される複数の固定子磁石を有することを特徴とするチップボンディング装置。 - 請求項5に記載のチップボンディング装置において、
可動子部は、
相互に駆動位相が120度相違するU相、V相、W相の駆動コイルがZ軸方向に沿って配置されることを特徴とするチップボンディング装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005148425A JP4397349B2 (ja) | 2005-05-20 | 2005-05-20 | チップボンディング装置 |
TW095112349A TW200735233A (en) | 2005-05-20 | 2006-04-07 | Bonding device for chip |
KR1020060038587A KR100741740B1 (ko) | 2005-05-20 | 2006-04-28 | 칩 본딩 장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005148425A JP4397349B2 (ja) | 2005-05-20 | 2005-05-20 | チップボンディング装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2006324598A JP2006324598A (ja) | 2006-11-30 |
JP2006324598A5 JP2006324598A5 (ja) | 2007-09-13 |
JP4397349B2 true JP4397349B2 (ja) | 2010-01-13 |
Family
ID=37544022
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005148425A Active JP4397349B2 (ja) | 2005-05-20 | 2005-05-20 | チップボンディング装置 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP4397349B2 (ja) |
KR (1) | KR100741740B1 (ja) |
TW (1) | TW200735233A (ja) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5468313B2 (ja) * | 2009-06-08 | 2014-04-09 | Juki株式会社 | 部品実装装置 |
JP4897033B2 (ja) * | 2009-12-01 | 2012-03-14 | キヤノンマシナリー株式会社 | 半導体製造装置 |
JP2013026268A (ja) * | 2011-07-15 | 2013-02-04 | Hitachi High-Tech Instruments Co Ltd | 2軸駆動機構及びダイボンダ |
JP2013026267A (ja) * | 2011-07-15 | 2013-02-04 | Hitachi High-Tech Instruments Co Ltd | 2軸駆動機構及びダイボンダ並びにダイボンダの運転方法 |
JP5705052B2 (ja) * | 2011-07-26 | 2015-04-22 | 株式会社新川 | ダイボンディング装置 |
JP5997448B2 (ja) * | 2012-01-31 | 2016-09-28 | ファスフォードテクノロジ株式会社 | ダイボンダ及びボンディング方法 |
JP5941705B2 (ja) * | 2012-02-29 | 2016-06-29 | ファスフォードテクノロジ株式会社 | 2軸駆動機構及びダイボンダ |
TWI734434B (zh) * | 2019-04-11 | 2021-07-21 | 日商新川股份有限公司 | 接合裝置 |
TWI784622B (zh) * | 2020-08-12 | 2022-11-21 | 日商捷進科技有限公司 | 黏晶裝置及半導體裝置的製造方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH691719A5 (fr) | 1997-04-11 | 2001-09-14 | Etel Sa | Table X-Y pour déplacer une charge, telle qu'un outil, selon deux directions perpendiculaires. |
-
2005
- 2005-05-20 JP JP2005148425A patent/JP4397349B2/ja active Active
-
2006
- 2006-04-07 TW TW095112349A patent/TW200735233A/zh unknown
- 2006-04-28 KR KR1020060038587A patent/KR100741740B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
KR100741740B1 (ko) | 2007-07-24 |
TWI334627B (ja) | 2010-12-11 |
JP2006324598A (ja) | 2006-11-30 |
KR20060120408A (ko) | 2006-11-27 |
TW200735233A (en) | 2007-09-16 |
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