JP2005207982A5 - - Google Patents

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Publication number
JP2005207982A5
JP2005207982A5 JP2004016889A JP2004016889A JP2005207982A5 JP 2005207982 A5 JP2005207982 A5 JP 2005207982A5 JP 2004016889 A JP2004016889 A JP 2004016889A JP 2004016889 A JP2004016889 A JP 2004016889A JP 2005207982 A5 JP2005207982 A5 JP 2005207982A5
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JP
Japan
Prior art keywords
spectrum
light
exit slit
light emitted
spectroscopic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004016889A
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English (en)
Japanese (ja)
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JP2005207982A (ja
JP4416522B2 (ja
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Publication date
Application filed filed Critical
Priority to JP2004016889A priority Critical patent/JP4416522B2/ja
Priority claimed from JP2004016889A external-priority patent/JP4416522B2/ja
Priority to US11/042,447 priority patent/US7167239B2/en
Publication of JP2005207982A publication Critical patent/JP2005207982A/ja
Publication of JP2005207982A5 publication Critical patent/JP2005207982A5/ja
Application granted granted Critical
Publication of JP4416522B2 publication Critical patent/JP4416522B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2004016889A 2004-01-26 2004-01-26 分光器 Expired - Fee Related JP4416522B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2004016889A JP4416522B2 (ja) 2004-01-26 2004-01-26 分光器
US11/042,447 US7167239B2 (en) 2004-01-26 2005-01-25 Spectroscope and measuring apparatus using the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004016889A JP4416522B2 (ja) 2004-01-26 2004-01-26 分光器

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2009160650A Division JP2009222727A (ja) 2009-07-07 2009-07-07 分光器

Publications (3)

Publication Number Publication Date
JP2005207982A JP2005207982A (ja) 2005-08-04
JP2005207982A5 true JP2005207982A5 (enExample) 2007-03-08
JP4416522B2 JP4416522B2 (ja) 2010-02-17

Family

ID=34792491

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004016889A Expired - Fee Related JP4416522B2 (ja) 2004-01-26 2004-01-26 分光器

Country Status (2)

Country Link
US (1) US7167239B2 (enExample)
JP (1) JP4416522B2 (enExample)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10324934A1 (de) * 2003-06-03 2004-12-23 Carl Zeiss Jena Gmbh Anordnung und ein Verfahren zur Erkennung von Schichten, die auf Oberflächen von Bauteilen angeordnet sind, und Bestimmung deren Eigenschaften
US7310153B2 (en) * 2004-08-23 2007-12-18 Palo Alto Research Center, Incorporated Using position-sensitive detectors for wavelength determination
US7522786B2 (en) * 2005-12-22 2009-04-21 Palo Alto Research Center Incorporated Transmitting light with photon energy information
US7315667B2 (en) * 2005-12-22 2008-01-01 Palo Alto Research Center Incorporated Propagating light to be sensed
US7433552B2 (en) * 2005-12-22 2008-10-07 Palo Alto Research Center Incorporated Obtaining analyte information
US8437582B2 (en) * 2005-12-22 2013-05-07 Palo Alto Research Center Incorporated Transmitting light with lateral variation
US7718948B2 (en) * 2006-12-04 2010-05-18 Palo Alto Research Center Incorporated Monitoring light pulses
US9164037B2 (en) 2007-01-26 2015-10-20 Palo Alto Research Center Incorporated Method and system for evaluation of signals received from spatially modulated excitation and emission to accurately determine particle positions and distances
US8821799B2 (en) 2007-01-26 2014-09-02 Palo Alto Research Center Incorporated Method and system implementing spatially modulated excitation or emission for particle characterization with enhanced sensitivity
US8320983B2 (en) 2007-12-17 2012-11-27 Palo Alto Research Center Incorporated Controlling transfer of objects affecting optical characteristics
US8629981B2 (en) 2008-02-01 2014-01-14 Palo Alto Research Center Incorporated Analyzers with time variation based on color-coded spatial modulation
US8373860B2 (en) 2008-02-01 2013-02-12 Palo Alto Research Center Incorporated Transmitting/reflecting emanating light with time variation
US8269161B2 (en) 2008-12-12 2012-09-18 Baker Hughes Incorporated Apparatus and method for evaluating downhole fluids
JP5541972B2 (ja) * 2010-06-09 2014-07-09 オリンパス株式会社 走査型共焦点顕微鏡
WO2012050974A2 (en) * 2010-09-29 2012-04-19 Booz, Allen & Hamilton Mobile phone hyperspectral imager with single-frame spatial, spectral and polarization information
JP5838466B2 (ja) * 2011-03-11 2016-01-06 ナノフォトン株式会社 光学顕微鏡、及び分光測定方法
US9029800B2 (en) 2011-08-09 2015-05-12 Palo Alto Research Center Incorporated Compact analyzer with spatial modulation and multiple intensity modulated excitation sources
US8723140B2 (en) 2011-08-09 2014-05-13 Palo Alto Research Center Incorporated Particle analyzer with spatial modulation and long lifetime bioprobes
JP2013113664A (ja) 2011-11-28 2013-06-10 Yokogawa Electric Corp レーザガス分析装置
DE102012205181B4 (de) * 2012-03-30 2015-09-24 Carl Zeiss Smt Gmbh Messvorrichtung zum Vermessen einer Beleuchtungseigenschaft
JP5811956B2 (ja) * 2012-06-06 2015-11-11 株式会社島津製作所 分光器の校正装置及び校正方法
JP6201547B2 (ja) * 2013-09-06 2017-09-27 株式会社島津製作所 分光器の波長校正方法
CN105444885A (zh) * 2014-07-22 2016-03-30 联想(北京)有限公司 一种光检测方法及电子设备
JP6128150B2 (ja) * 2015-03-12 2017-05-17 横河電機株式会社 レーザガス分析装置
CN104977085B (zh) * 2015-06-29 2017-08-25 杭州路弘科技有限公司 获得测量光谱的方法
CN105021282B (zh) * 2015-07-06 2017-12-19 中国科学院遥感与数字地球研究所 快照式偏振高光谱相机及成像方法
CN105043722A (zh) * 2015-07-28 2015-11-11 哈尔滨工程大学 一种反射镜反射率的测量方法
JP7147143B2 (ja) * 2017-01-20 2022-10-05 株式会社リコー 分光器および分析装置
KR102663185B1 (ko) * 2018-08-07 2024-05-03 삼성전자주식회사 광학 방출 분광 시스템 및 그 보정 방법, 반도체 소자 제조 방법
EP4006531B1 (en) * 2020-11-27 2023-04-26 JEOL Ltd. X-ray detection apparatus and method
EP4556869A1 (en) * 2023-11-15 2025-05-21 ASML Netherlands B.V. Methods and assemblies for wavelength calibration
WO2025073459A1 (en) * 2023-10-03 2025-04-10 Asml Netherlands B.V. Methods and assemblies for wavelength calibration
CN117420083B (zh) * 2023-12-19 2024-04-09 哈尔滨工业大学 一种等离子体侵蚀痕量产物在线监测装置及方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4804266A (en) * 1985-07-26 1989-02-14 Barspec Ltd. Continuously rotating grating rapid-scan spectrophotometer
JP3106979B2 (ja) * 1996-10-31 2000-11-06 安藤電気株式会社 光スペクトル測定装置
JP4325109B2 (ja) * 2000-12-27 2009-09-02 株式会社島津製作所 分光光度計

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