JP2005197705A - 半導体デバイスを製造するための方法 - Google Patents
半導体デバイスを製造するための方法 Download PDFInfo
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- JP2005197705A JP2005197705A JP2004376936A JP2004376936A JP2005197705A JP 2005197705 A JP2005197705 A JP 2005197705A JP 2004376936 A JP2004376936 A JP 2004376936A JP 2004376936 A JP2004376936 A JP 2004376936A JP 2005197705 A JP2005197705 A JP 2005197705A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 54
- 238000000034 method Methods 0.000 title claims abstract description 21
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 16
- 239000000758 substrate Substances 0.000 claims abstract description 38
- 150000004767 nitrides Chemical class 0.000 claims abstract description 28
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims abstract description 28
- 229920005591 polysilicon Polymers 0.000 claims abstract description 26
- 238000005530 etching Methods 0.000 claims abstract description 10
- 238000000151 deposition Methods 0.000 claims abstract description 9
- 229920002120 photoresistant polymer Polymers 0.000 claims description 9
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 230000003449 preventive effect Effects 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 abstract description 2
- 239000010703 silicon Substances 0.000 abstract description 2
- 239000010410 layer Substances 0.000 description 21
- 238000004140 cleaning Methods 0.000 description 3
- 230000010354 integration Effects 0.000 description 3
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 238000001259 photo etching Methods 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000002784 hot electron Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000006117 anti-reflective coating Substances 0.000 description 1
- 238000004380 ashing Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
- 238000009279 wet oxidation reaction Methods 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B69/00—Erasable-and-programmable ROM [EPROM] devices not provided for in groups H10B41/00 - H10B63/00, e.g. ultraviolet erasable-and-programmable ROM [UVEPROM] devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66833—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a charge trapping gate insulator, e.g. MNOS transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/401—Multistep manufacturing processes
- H01L29/4011—Multistep manufacturing processes for data storage electrodes
- H01L29/40117—Multistep manufacturing processes for data storage electrodes the electrodes comprising a charge-trapping insulator
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/792—Field effect transistors with field effect produced by an insulated gate with charge trapping gate insulator, e.g. MNOS-memory transistors
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Non-Volatile Memory (AREA)
- Semiconductor Memories (AREA)
Abstract
【解決手段】 半導体デバイスを製造するための方法は、SONOS構造体を上部に形成すべき半導体基板を所定の深さまでエッチングし、トレンチを形成する工程と、内部に前記トレンチが形成された半導体基板上にONO膜を形成する工程と、前記トレンチの内壁面およびその近くの領域の双方に前記ONO膜を残すと共に、前記半導体基板の残りの領域から前記ONO膜を除去する工程と、前記ONO膜の外側にて前記半導体基板上にゲート酸化膜を形成する工程と、前記半導体基板にポリシリコンをデポジットし、前記トレンチを満たす工程と、前記ポリシリコンを除去し、前記ゲート酸化膜およびトレンチ上にそれぞれSONOSゲート電極を形成する工程とを備える。
【選択図】 図2D
Description
40 ONO膜
41 下部酸化膜
43 窒化膜
45 上部酸化膜
51 窒化膜
53 フォトレジスト膜
55 トレンチ
63 ゲート酸化膜
65 ポリシリコン層
71 第1ゲート電極
73 第2ゲート電極
Claims (5)
- SONOS構造体を上部に形成すべき半導体基板を所定の深さまでエッチングし、トレンチを形成する工程と、
内部に前記トレンチが形成された半導体基板上にONO膜を形成する工程と、
前記トレンチの内壁面およびその近くの領域の双方に前記ONO膜を残すと共に、前記半導体基板の残りの領域から前記ONO膜を除去する工程と、
前記ONO膜の外側にて前記半導体基板上にゲート酸化膜を形成する工程と、
前記半導体基板にポリシリコンをデポジットし、前記トレンチを満たす工程と、
前記ポリシリコンを除去し、前記ゲート酸化膜およびトレンチ上にそれぞれSONOSゲート電極を形成する工程とを備えたことを特徴とする半導体デバイスを製造するための方法。 - トレンチを形成するよう、半導体基板をエッチングする前記工程が、前記トレンチを前記ゲート電極の5〜100%の深さまで形成する工程を含むことを特徴とする請求項1記載の方法。
- 前記トレンチの内側壁面に設けられた前記ONO膜が前記ゲート電極の高さの5〜100%の高さを有することを特徴とする請求項1記載の方法。
- SONOSゲート電極を形成するために前記ポリシリコンを除去する前記工程が、前記ゲート電極をフォトエッチングするために前記ポリシリコンにコーティングされたフォトレジスト膜の上および/またはその下方に、BARC(底部反射防止コーティング)膜を、200〜1300Åの厚みに形成する工程を含むことを特徴とする請求項1記載の方法。
- 前記ONO膜が、
20〜100Åの厚みを有する下部酸化膜と、
30〜200Åの厚みを有するトラップ用窒化膜と、
50〜200Åの厚みを有する上部酸化膜とを備えたことを特徴とする請求項1記載の方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020030100569A KR100593599B1 (ko) | 2003-12-30 | 2003-12-30 | 반도체 소자의 제조 방법 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2005197705A true JP2005197705A (ja) | 2005-07-21 |
Family
ID=34698779
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004376936A Pending JP2005197705A (ja) | 2003-12-30 | 2004-12-27 | 半導体デバイスを製造するための方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7005348B2 (ja) |
JP (1) | JP2005197705A (ja) |
KR (1) | KR100593599B1 (ja) |
DE (1) | DE102004063142A1 (ja) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100763918B1 (ko) * | 2006-07-28 | 2007-10-05 | 삼성전자주식회사 | 비휘발성 메모리 소자 및 그 제조 방법 |
US20080029803A1 (en) * | 2006-08-02 | 2008-02-07 | Infineon Technologies Ag | Programmable non-volatile memory cell |
KR100763335B1 (ko) * | 2006-09-12 | 2007-10-04 | 삼성전자주식회사 | 트랜지스터들, 집적 회로배선들 및 그의 형성방법들 |
KR100869745B1 (ko) | 2007-06-01 | 2008-11-21 | 주식회사 동부하이텍 | 반도체소자 및 그의 제조 방법 |
US20120181600A1 (en) * | 2007-08-17 | 2012-07-19 | Masahiko Higashi | Sonos flash memory device |
US8552490B2 (en) * | 2010-06-18 | 2013-10-08 | United Microelectronics Corp. | Nonvolatile memory device with a high-K charge storage layer having a U-shaped,cross-sectional structure |
US8754338B2 (en) * | 2011-05-28 | 2014-06-17 | Banpil Photonics, Inc. | On-chip interconnects with reduced capacitance and method of afbrication |
CN106298671A (zh) * | 2015-05-11 | 2017-01-04 | 联华电子股份有限公司 | 具sonos存储单元的非挥发性存储器的制造方法 |
CN114335004B (zh) * | 2022-03-11 | 2022-05-17 | 江苏游隼微电子有限公司 | 一种1.5t sonos器件及其制备方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6404007B1 (en) * | 1999-04-05 | 2002-06-11 | Fairchild Semiconductor Corporation | Trench transistor with superior gate dielectric |
US6936887B2 (en) * | 2001-05-18 | 2005-08-30 | Sandisk Corporation | Non-volatile memory cells utilizing substrate trenches |
DE10129958B4 (de) * | 2001-06-21 | 2006-07-13 | Infineon Technologies Ag | Speicherzellenanordnung und Herstellungsverfahren |
JP2003218242A (ja) * | 2002-01-24 | 2003-07-31 | Hitachi Ltd | 不揮発性半導体記憶装置およびその製造方法 |
JP2003309192A (ja) * | 2002-04-17 | 2003-10-31 | Fujitsu Ltd | 不揮発性半導体メモリおよびその製造方法 |
US20030235076A1 (en) * | 2002-06-21 | 2003-12-25 | Micron Technology, Inc. | Multistate NROM having a storage density much greater than 1 Bit per 1F2 |
US6888755B2 (en) * | 2002-10-28 | 2005-05-03 | Sandisk Corporation | Flash memory cell arrays having dual control gates per memory cell charge storage element |
US6965143B2 (en) * | 2003-10-10 | 2005-11-15 | Advanced Micro Devices, Inc. | Recess channel flash architecture for reduced short channel effect |
KR20050064233A (ko) * | 2003-12-23 | 2005-06-29 | 주식회사 하이닉스반도체 | Sonos형 비휘발성 메모리 소자 및 그 제조 방법 |
-
2003
- 2003-12-30 KR KR1020030100569A patent/KR100593599B1/ko not_active IP Right Cessation
-
2004
- 2004-12-22 DE DE102004063142A patent/DE102004063142A1/de not_active Withdrawn
- 2004-12-27 JP JP2004376936A patent/JP2005197705A/ja active Pending
- 2004-12-29 US US11/027,079 patent/US7005348B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US20050142759A1 (en) | 2005-06-30 |
DE102004063142A1 (de) | 2005-08-04 |
KR20050068764A (ko) | 2005-07-05 |
US7005348B2 (en) | 2006-02-28 |
KR100593599B1 (ko) | 2006-06-28 |
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