JP2005166758A - カセット台およびウエハ検査装置 - Google Patents

カセット台およびウエハ検査装置 Download PDF

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Publication number
JP2005166758A
JP2005166758A JP2003400726A JP2003400726A JP2005166758A JP 2005166758 A JP2005166758 A JP 2005166758A JP 2003400726 A JP2003400726 A JP 2003400726A JP 2003400726 A JP2003400726 A JP 2003400726A JP 2005166758 A JP2005166758 A JP 2005166758A
Authority
JP
Japan
Prior art keywords
wafer
cassette
opening
wafers
transfer arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2003400726A
Other languages
English (en)
Japanese (ja)
Inventor
Tomoo Kato
智生 加藤
Shinichi Tsuchisaka
新一 土坂
Toru Akiba
徹 秋葉
Hidefumi Ibaraki
秀文 茨木
Tatsuo Nirei
辰夫 楡井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Priority to JP2003400726A priority Critical patent/JP2005166758A/ja
Priority to TW093135633A priority patent/TW200520040A/zh
Priority to KR1020040096056A priority patent/KR20050052350A/ko
Priority to CNB2004100958892A priority patent/CN100413048C/zh
Publication of JP2005166758A publication Critical patent/JP2005166758A/ja
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N2021/0106—General arrangement of respective parts
JP2003400726A 2003-11-28 2003-11-28 カセット台およびウエハ検査装置 Pending JP2005166758A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2003400726A JP2005166758A (ja) 2003-11-28 2003-11-28 カセット台およびウエハ検査装置
TW093135633A TW200520040A (en) 2003-11-28 2004-11-19 Cassette table and wafer-inspecting apparatus
KR1020040096056A KR20050052350A (ko) 2003-11-28 2004-11-23 카세트대 및 웨이퍼검사장치
CNB2004100958892A CN100413048C (zh) 2003-11-28 2004-11-26 盒基座及晶片检查装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003400726A JP2005166758A (ja) 2003-11-28 2003-11-28 カセット台およびウエハ検査装置

Publications (1)

Publication Number Publication Date
JP2005166758A true JP2005166758A (ja) 2005-06-23

Family

ID=34724879

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003400726A Pending JP2005166758A (ja) 2003-11-28 2003-11-28 カセット台およびウエハ検査装置

Country Status (4)

Country Link
JP (1) JP2005166758A (zh)
KR (1) KR20050052350A (zh)
CN (1) CN100413048C (zh)
TW (1) TW200520040A (zh)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011014582A (ja) * 2009-06-30 2011-01-20 Tesetsuku:Kk 電子部品用搬送装置
CN102445573A (zh) * 2010-09-13 2012-05-09 东京毅力科创株式会社 晶片检查装置和探针卡的预热方法
JP2012216707A (ja) * 2011-04-01 2012-11-08 Seiko Epson Corp 印刷装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111960313A (zh) * 2020-07-21 2020-11-20 沈阳芯源微电子设备有限公司 基板升降机构

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH065570A (ja) * 1992-06-17 1994-01-14 Ratsupu Master S F T Kk 半導体ウエハのオリフラ位置合わせ機構
JPH08139162A (ja) * 1994-11-11 1996-05-31 Toshiba Corp ウエハの位置決め搬送装置及び方法
WO1997045861A1 (en) * 1996-05-28 1997-12-04 Holtronic Technologies Ltd. Device for gripping and holding a substrate
JPH11121585A (ja) * 1997-10-17 1999-04-30 Olympus Optical Co Ltd ウェハ搬送装置
JP2002270672A (ja) * 2001-03-09 2002-09-20 Olympus Optical Co Ltd アライメント方法及び基板検査装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011014582A (ja) * 2009-06-30 2011-01-20 Tesetsuku:Kk 電子部品用搬送装置
CN102445573A (zh) * 2010-09-13 2012-05-09 东京毅力科创株式会社 晶片检查装置和探针卡的预热方法
JP2012216707A (ja) * 2011-04-01 2012-11-08 Seiko Epson Corp 印刷装置

Also Published As

Publication number Publication date
KR20050052350A (ko) 2005-06-02
TW200520040A (en) 2005-06-16
CN100413048C (zh) 2008-08-20
CN1622306A (zh) 2005-06-01

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