TW200520040A - Cassette table and wafer-inspecting apparatus - Google Patents

Cassette table and wafer-inspecting apparatus

Info

Publication number
TW200520040A
TW200520040A TW093135633A TW93135633A TW200520040A TW 200520040 A TW200520040 A TW 200520040A TW 093135633 A TW093135633 A TW 093135633A TW 93135633 A TW93135633 A TW 93135633A TW 200520040 A TW200520040 A TW 200520040A
Authority
TW
Taiwan
Prior art keywords
wafer
cassette
opening part
pushing means
cassette table
Prior art date
Application number
TW093135633A
Other languages
Chinese (zh)
Inventor
Tomoo Kato
Shinichi Dosaka
Toru Akiba
Hidenori Ibaraki
Tatuo Nirei
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Publication of TW200520040A publication Critical patent/TW200520040A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N2021/0106—General arrangement of respective parts

Abstract

The cassette table (2) includes: plural wafers 5 each having an orientation flat part in a laminating direction; a first opening part to retrieve/dispose said wafer; a cassette 6 having a second opening part disposed opposite to said first opening part; first pushing means (803, 804) in the cassette for retrieval/disposition to push/press said wafer through said second opening part; and second pushing means (903, 904) in the cassette for retrieval/disposition to push/press said wafer through said first opening part. Any one of said first pushing means and said second pushing means pushes/presses the orientation flat part, and the other one pushes/presses the peripheral edge of the said wafer, so as to hold the wafer.
TW093135633A 2003-11-28 2004-11-19 Cassette table and wafer-inspecting apparatus TW200520040A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003400726A JP2005166758A (en) 2003-11-28 2003-11-28 Cassette base and wafer inspecting device

Publications (1)

Publication Number Publication Date
TW200520040A true TW200520040A (en) 2005-06-16

Family

ID=34724879

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093135633A TW200520040A (en) 2003-11-28 2004-11-19 Cassette table and wafer-inspecting apparatus

Country Status (4)

Country Link
JP (1) JP2005166758A (en)
KR (1) KR20050052350A (en)
CN (1) CN100413048C (en)
TW (1) TW200520040A (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011014582A (en) * 2009-06-30 2011-01-20 Tesetsuku:Kk Electronic component carrier
JP5889581B2 (en) * 2010-09-13 2016-03-22 東京エレクトロン株式会社 Wafer inspection equipment
JP5682421B2 (en) * 2011-04-01 2015-03-11 セイコーエプソン株式会社 Printing device
CN111960313A (en) * 2020-07-21 2020-11-20 沈阳芯源微电子设备有限公司 Substrate lifting mechanism

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH065570A (en) * 1992-06-17 1994-01-14 Ratsupu Master S F T Kk Mechanism for positioning orientation flat of semiconductor wafer
JPH08139162A (en) * 1994-11-11 1996-05-31 Toshiba Corp Transfer device and method for positioning wafer
WO1997045861A1 (en) * 1996-05-28 1997-12-04 Holtronic Technologies Ltd. Device for gripping and holding a substrate
JPH11121585A (en) * 1997-10-17 1999-04-30 Olympus Optical Co Ltd Wafer carrier
JP2002270672A (en) * 2001-03-09 2002-09-20 Olympus Optical Co Ltd Method of alignment and substrate-inspecting apparatus

Also Published As

Publication number Publication date
KR20050052350A (en) 2005-06-02
CN100413048C (en) 2008-08-20
JP2005166758A (en) 2005-06-23
CN1622306A (en) 2005-06-01

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