JP2005150743A - ラテラル結晶化のための方法 - Google Patents
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- 238000000034 method Methods 0.000 title claims abstract description 55
- 238000002425 crystallisation Methods 0.000 title claims abstract description 21
- 230000008025 crystallization Effects 0.000 title claims abstract description 21
- 239000000758 substrate Substances 0.000 claims abstract description 110
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 33
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 33
- 239000010703 silicon Substances 0.000 claims abstract description 33
- 238000010438 heat treatment Methods 0.000 claims abstract description 7
- 230000001678 irradiating effect Effects 0.000 claims abstract description 5
- 238000005224 laser annealing Methods 0.000 claims description 23
- 238000004093 laser heating Methods 0.000 claims description 23
- 230000008018 melting Effects 0.000 claims description 14
- 238000002844 melting Methods 0.000 claims description 14
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 13
- 238000000137 annealing Methods 0.000 claims description 12
- 239000007787 solid Substances 0.000 claims description 11
- 230000005855 radiation Effects 0.000 claims description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 8
- 229910052681 coesite Inorganic materials 0.000 claims 4
- 229910052906 cristobalite Inorganic materials 0.000 claims 4
- 239000000377 silicon dioxide Substances 0.000 claims 4
- 235000012239 silicon dioxide Nutrition 0.000 claims 4
- 229910052682 stishovite Inorganic materials 0.000 claims 4
- 229910052905 tridymite Inorganic materials 0.000 claims 4
- 229910009372 YVO4 Inorganic materials 0.000 claims 2
- 230000008569 process Effects 0.000 abstract description 26
- 230000004807 localization Effects 0.000 abstract 2
- 238000001429 visible spectrum Methods 0.000 abstract 1
- 239000010408 film Substances 0.000 description 58
- 230000006911 nucleation Effects 0.000 description 15
- 238000010899 nucleation Methods 0.000 description 15
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 8
- 239000011521 glass Substances 0.000 description 7
- 239000010409 thin film Substances 0.000 description 5
- 230000008901 benefit Effects 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 238000010791 quenching Methods 0.000 description 4
- 230000001186 cumulative effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005286 illumination Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000001208 nuclear magnetic resonance pulse sequence Methods 0.000 description 3
- 238000007711 solidification Methods 0.000 description 3
- 230000008023 solidification Effects 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 238000005054 agglomeration Methods 0.000 description 2
- 230000002776 aggregation Effects 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000013526 supercooled liquid Substances 0.000 description 2
- 206010063601 Exposure to extreme temperature Diseases 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 239000013590 bulk material Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000012804 iterative process Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910021424 microcrystalline silicon Inorganic materials 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 238000005309 stochastic process Methods 0.000 description 1
- 238000004781 supercooling Methods 0.000 description 1
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- H01L21/02365—Forming inorganic semiconducting materials on a substrate
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- H01L21/02664—Aftertreatments
- H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
- H01L21/02675—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth using laser beams
- H01L21/02686—Pulsed laser beam
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- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/16—Heating of the molten zone
- C30B13/22—Heating of the molten zone by irradiation or electric discharge
- C30B13/24—Heating of the molten zone by irradiation or electric discharge using electromagnetic waves
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
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Abstract
【解決手段】 基板の局所化領域が短時間の間加熱され基板の局所化領域が加熱されている間、基板の上に位置するシリコン膜を照射してシリコン膜をアニールし、加熱された基板領域と熱接触するシリコン膜の一部分を結晶化する。CO2レーザを加熱源として使用して基板を加熱し、他方紫外線レーザまたは可視スペクトルレーザを使用して膜を照射および結晶化するラテラル結晶化プロセス。
【選択図】なし
Description
該基板表面上の局所化領域を、該基板が著しく損傷しないように短時間の間、該基板の融点を越える温度に加熱するステップと、該局所化基板領域を該基板の該融点に維持しながら、該基板領域と熱接触する該シリコン膜の一部分を照射して、該シリコン膜の該部分を結晶化するステップとを包含する。
該基板表面上の局所化基板領域を、レーザ加熱源を用いて露光するステップと、該シリコン膜をレーザアニール源に暴露することによって、該局所化基板領域と熱接触する該シリコン膜の一部分をアニールするステップとを包含する。
CO2パルス持続時間:5〜1000μs、好ましくは、5〜100μsecまたは5〜30μsec
CO2パルス面積:1mm2〜1cm2
CO2パルス瞬時パワー密度:50〜150W/mm2
CO2パルスフルエンス:0.4〜4J/cm2;より好ましくは、0.4〜1.5J/cm2;さらに好ましくは、0.4〜1J/cm2。
パルス周波数(f):100〜300Hz。
図6は、走査結晶化プロセスのための、図3に対応する繰り返しパルスシーケンスを示す。図4および図5に示されるシーケンスは、走査結晶化プロセスで使用するために同様に繰り返され得る。
34 第2の曲線
36 第3の曲線
42 CO2レーザパルス
44 エキシマレーザパルス
Claims (18)
- ラテラル結晶化するための方法であって、
基板表面上にシリコン膜を提供するステップと、
該基板表面上の局所化領域を、該基板が著しく損傷しないように短時間の間、該基板の融点を越える温度に加熱するステップと、
該局所化基板領域を該基板の該融点に維持しながら、該基板領域と熱接触する該シリコン膜の一部分を照射して、該シリコン膜の該部分を結晶化するステップと
を包含する方法。 - ラテラル結晶化するための方法であって、
基板表面上にシリコン膜を提供するステップと、
該基板表面上の局所化基板領域を、レーザ加熱源を用いて露光するステップと、
該シリコン膜をレーザアニール源に暴露することによって、該局所化基板領域と熱接触する該シリコン膜の一部分をアニールするステップと
を包含する方法。 - 前記基板表面はSiO2であり、前記レーザ加熱源は約9〜11μmの光波長を有する、請求項2に記載の方法。
- 前記レーザ加熱源はCO2レーザである、請求項3に記載の方法。
- 前記CO2レーザは約0.01ミリ秒〜1ミリ秒のパルス持続時間を有する、請求項4に記載の方法。
- 前記レーザアニール源は、エキシマレーザである、請求項2に記載の方法。
- 前記エキシマレーザは、XeClレーザまたはKrFレーザである、請求項6に記載の方法。
- 前記エキシマレーザは約30ナノ秒〜300ナノ秒のパルス持続時間を有する、請求項6に記載の方法。
- 前記レーザアニール源は固体レーザである、請求項2に記載の方法。
- 前記固体レーザは2倍周波数Nd−YAGレーザまたは2倍周波数Nd−YVO4レーザである、請求項9に記載の方法。
- 前記固体レーザは、3倍周波数Nd−YAGレーザまたは3倍周波数Nd−YVO4レーザである、請求項9に記載の方法。
- 前記レーザアニール源は約100Hz〜500Hzの放射周波数を有する、請求項2に記載の方法。
- 前記レーザアニール源は約10kHz〜100kHzの放射周波数を有する、請求項2に記載の方法。
- 前記レーザ加熱源がパルス化され、前記アニール源が化パルスされ、かつ該レーザ加熱源は該アニール源のパルスによる前記シリコン膜の照射の前に該基板を照射する、請求項2に記載の方法。
- 前記レーザアニール源のパルスは前記レーザ加熱源のパルスよりも短く、かつ該レーザ加熱源のパルス中に開始する、請求項14に記載の方法。
- 前記レーザアニール源のパルスは前記レーザ加熱源のパルス中に完了する、請求項15に記載の方法。
- 前記レーザアニール源のパルスは前記レーザ加熱源のパルスの後に生じる、請求項14に記載の方法。
- ラテラル結晶化のための方法であって、
SiO2層と熱接触するシリコン膜を基板上に提供するステップと、
該SiO2層の一部分を、約0.01ミリ秒〜1ミリ秒の持続時間を有するCO2レーザパルスに暴露するステップであって、これにより該SiO2層の該暴露部分が加熱される、ステップと、
該シリコン膜の一部分をパルス化エキシマレーザまたはパルス化固体レーザの第2高調波を用いて照射することによって、該SiO2層の該加熱部分と熱接触する該シリコン膜の一部分を結晶化するステップと
を包含する方法。
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US10/713,383 US7018468B2 (en) | 2003-11-13 | 2003-11-13 | Process for long crystal lateral growth in silicon films by UV and IR pulse sequencing |
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JP2009081433A (ja) * | 2007-09-26 | 2009-04-16 | Sharp Corp | 結晶化方法および活性半導体膜構造体 |
JP2012507878A (ja) * | 2008-11-04 | 2012-03-29 | ソイテック | プライミングおよび光束によって板状体の層を加熱するための方法および装置 |
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US7018468B2 (en) * | 2003-11-13 | 2006-03-28 | Sharp Laboratories Of America, Inc. | Process for long crystal lateral growth in silicon films by UV and IR pulse sequencing |
US7292616B2 (en) * | 2005-02-09 | 2007-11-06 | Ultratech, Inc. | CO2 laser stabilization systems and methods |
US8377743B2 (en) * | 2008-05-21 | 2013-02-19 | Cbrite Inc. | Laser annealing of metal oxide semiconductor on temperature sensitive substrate formations |
US20100068897A1 (en) * | 2008-09-16 | 2010-03-18 | Tokyo Electron Limited | Dielectric treatment platform for dielectric film deposition and curing |
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JP2009081433A (ja) * | 2007-09-26 | 2009-04-16 | Sharp Corp | 結晶化方法および活性半導体膜構造体 |
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Also Published As
Publication number | Publication date |
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JP4931102B2 (ja) | 2012-05-16 |
US6881686B1 (en) | 2005-04-19 |
US7018468B2 (en) | 2006-03-28 |
US20060054077A1 (en) | 2006-03-16 |
US7608144B2 (en) | 2009-10-27 |
US20050158995A1 (en) | 2005-07-21 |
US7056843B2 (en) | 2006-06-06 |
US20050103255A1 (en) | 2005-05-19 |
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