JP2005120440A5 - - Google Patents
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- Publication number
- JP2005120440A5 JP2005120440A5 JP2003357608A JP2003357608A JP2005120440A5 JP 2005120440 A5 JP2005120440 A5 JP 2005120440A5 JP 2003357608 A JP2003357608 A JP 2003357608A JP 2003357608 A JP2003357608 A JP 2003357608A JP 2005120440 A5 JP2005120440 A5 JP 2005120440A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- intermediate layer
- substrate
- thickness
- film formation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 claims description 19
- 239000000758 substrate Substances 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 239000000843 powder Substances 0.000 claims description 6
- 238000000151 deposition Methods 0.000 claims description 3
- 230000008021 deposition Effects 0.000 claims description 3
- 230000003647 oxidation Effects 0.000 claims description 3
- 238000007254 oxidation reaction Methods 0.000 claims description 3
- 230000001590 oxidative effect Effects 0.000 claims description 3
- 239000007921 spray Substances 0.000 claims description 2
- 238000009718 spray deposition Methods 0.000 claims description 2
- 238000007664 blowing Methods 0.000 claims 1
- 239000010410 layer Substances 0.000 description 50
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 20
- 230000015572 biosynthetic process Effects 0.000 description 10
- 229910052697 platinum Inorganic materials 0.000 description 10
- 239000004642 Polyimide Substances 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 4
- 229920001721 polyimide Polymers 0.000 description 4
- 238000004873 anchoring Methods 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 2
- 239000004926 polymethyl methacrylate Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- SVONRAPFKPVNKG-UHFFFAOYSA-N 2-ethoxyethyl acetate Chemical compound CCOCCOC(C)=O SVONRAPFKPVNKG-UHFFFAOYSA-N 0.000 description 1
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 1
- 229930192627 Naphthoquinone Natural products 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 150000002791 naphthoquinones Chemical class 0.000 description 1
- 229920003986 novolac Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003357608A JP4094521B2 (ja) | 2003-10-17 | 2003-10-17 | 構造物の製造方法 |
| US10/964,614 US7179718B2 (en) | 2003-10-17 | 2004-10-15 | Structure and method of manufacturing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003357608A JP4094521B2 (ja) | 2003-10-17 | 2003-10-17 | 構造物の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005120440A JP2005120440A (ja) | 2005-05-12 |
| JP2005120440A5 true JP2005120440A5 (enExample) | 2006-07-13 |
| JP4094521B2 JP4094521B2 (ja) | 2008-06-04 |
Family
ID=34614450
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003357608A Expired - Fee Related JP4094521B2 (ja) | 2003-10-17 | 2003-10-17 | 構造物の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4094521B2 (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4921091B2 (ja) * | 2005-09-30 | 2012-04-18 | 富士フイルム株式会社 | 複合構造物の製造方法、不純物除去処理装置、成膜装置、及び、複合構造物 |
| JP4885668B2 (ja) * | 2005-09-30 | 2012-02-29 | 富士フイルム株式会社 | 構造物の製造方法、及び、複合構造物 |
| DE602006018502D1 (de) | 2005-09-30 | 2011-01-05 | Fujifilm Corp | Ng |
| JP2008019464A (ja) * | 2006-07-11 | 2008-01-31 | Sumitomo Electric Ind Ltd | ダイヤモンド被膜およびその製造方法 |
| JP2008248279A (ja) * | 2007-03-29 | 2008-10-16 | Honda Motor Co Ltd | 準結晶粒子分散合金積層材の製造方法、準結晶粒子分散合金バルク材の製造方法、準結晶粒子分散合金積層材および準結晶粒子分散合金バルク材 |
| JP5392737B2 (ja) * | 2007-05-22 | 2014-01-22 | 独立行政法人産業技術総合研究所 | 脆性材料膜構造体 |
-
2003
- 2003-10-17 JP JP2003357608A patent/JP4094521B2/ja not_active Expired - Fee Related
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