JP4094521B2 - 構造物の製造方法 - Google Patents

構造物の製造方法 Download PDF

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Publication number
JP4094521B2
JP4094521B2 JP2003357608A JP2003357608A JP4094521B2 JP 4094521 B2 JP4094521 B2 JP 4094521B2 JP 2003357608 A JP2003357608 A JP 2003357608A JP 2003357608 A JP2003357608 A JP 2003357608A JP 4094521 B2 JP4094521 B2 JP 4094521B2
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Japan
Prior art keywords
layer
substrate
intermediate layer
manufacturing
thickness
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Expired - Fee Related
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JP2003357608A
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English (en)
Japanese (ja)
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JP2005120440A5 (enExample
JP2005120440A (ja
Inventor
隆 中村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Corp
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Fujifilm Corp
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Priority to JP2003357608A priority Critical patent/JP4094521B2/ja
Priority to US10/964,614 priority patent/US7179718B2/en
Publication of JP2005120440A publication Critical patent/JP2005120440A/ja
Publication of JP2005120440A5 publication Critical patent/JP2005120440A5/ja
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Publication of JP4094521B2 publication Critical patent/JP4094521B2/ja
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Expired - Fee Related legal-status Critical Current

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JP2003357608A 2003-10-17 2003-10-17 構造物の製造方法 Expired - Fee Related JP4094521B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2003357608A JP4094521B2 (ja) 2003-10-17 2003-10-17 構造物の製造方法
US10/964,614 US7179718B2 (en) 2003-10-17 2004-10-15 Structure and method of manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003357608A JP4094521B2 (ja) 2003-10-17 2003-10-17 構造物の製造方法

Publications (3)

Publication Number Publication Date
JP2005120440A JP2005120440A (ja) 2005-05-12
JP2005120440A5 JP2005120440A5 (enExample) 2006-07-13
JP4094521B2 true JP4094521B2 (ja) 2008-06-04

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ID=34614450

Family Applications (1)

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JP2003357608A Expired - Fee Related JP4094521B2 (ja) 2003-10-17 2003-10-17 構造物の製造方法

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JP (1) JP4094521B2 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4921091B2 (ja) * 2005-09-30 2012-04-18 富士フイルム株式会社 複合構造物の製造方法、不純物除去処理装置、成膜装置、及び、複合構造物
JP4885668B2 (ja) * 2005-09-30 2012-02-29 富士フイルム株式会社 構造物の製造方法、及び、複合構造物
DE602006018502D1 (de) 2005-09-30 2011-01-05 Fujifilm Corp Ng
JP2008019464A (ja) * 2006-07-11 2008-01-31 Sumitomo Electric Ind Ltd ダイヤモンド被膜およびその製造方法
JP2008248279A (ja) * 2007-03-29 2008-10-16 Honda Motor Co Ltd 準結晶粒子分散合金積層材の製造方法、準結晶粒子分散合金バルク材の製造方法、準結晶粒子分散合金積層材および準結晶粒子分散合金バルク材
JP5392737B2 (ja) * 2007-05-22 2014-01-22 独立行政法人産業技術総合研究所 脆性材料膜構造体

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JP2005120440A (ja) 2005-05-12

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