JP2005118770A - 流体噴射ノズル - Google Patents
流体噴射ノズル Download PDFInfo
- Publication number
- JP2005118770A JP2005118770A JP2004181303A JP2004181303A JP2005118770A JP 2005118770 A JP2005118770 A JP 2005118770A JP 2004181303 A JP2004181303 A JP 2004181303A JP 2004181303 A JP2004181303 A JP 2004181303A JP 2005118770 A JP2005118770 A JP 2005118770A
- Authority
- JP
- Japan
- Prior art keywords
- fluid
- substrate
- plate
- nozzle
- plates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/02—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape
- B05B1/04—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape in flat form, e.g. fan-like, sheet-like
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0254—Coating heads with slot-shaped outlet
Landscapes
- Nozzles (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Coating Apparatus (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
【解決手段】流体噴射ノズルは、一定の幅を有して互いに対向する第1、第2プレート3、5を備え、前記第1、第2プレート3、5は締結手段によって締結される。前記第1、第2プレート3、5が結合された間には流体が通過できる管路7が提供され、前記第1、第2プレート3、5の先端部の長さが互いに異なるように形成する。
【選択図】図2
Description
3 第1プレート
5 第2プレート
7、9 管路
G 基板
R ローラ
θ 傾斜角
Claims (4)
- 流体を噴射して基板を処理するための流体噴射ノズルにおいて、
第1プレートと;
前記第1プレートに組立て手段によって流体が通過できる管路が提供される状態で結合される第2プレートと;を備え、
前記第1、2プレートは、流体が噴射される先端部の長さが互いに異なるように構成されることを特徴とする流体噴射ノズル。 - 前記第1、2プレートのうち先端部の短い部分が基板の移動方向側に配置されることを特徴とする請求項1に記載の流体噴射ノズル。
- 流体を噴射して基板を処理するための流体噴射ノズルにおいて、
第1プレートと;
前記第1プレートに組立て手段によって流体が通過できる管路が提供される状態で結合される第2プレートと;を備え、
前記第1、2プレートの間の管路で噴射される流体が流線形に曲がって噴射される手段;
をさらに含むことを特徴とする流体噴射ノズル。 - 前記流体が流線形に曲がって噴射される手段は、
前記第1、2プレートの先端部の長さが互いに異なるように構成されることを特徴とする請求項3に記載の流体噴射ノズル。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020030072489A KR100648411B1 (ko) | 2003-10-17 | 2003-10-17 | 유체분사노즐 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005118770A true JP2005118770A (ja) | 2005-05-12 |
JP4002911B2 JP4002911B2 (ja) | 2007-11-07 |
Family
ID=34510922
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004181303A Active JP4002911B2 (ja) | 2003-10-17 | 2004-06-18 | 流体噴射ノズル |
Country Status (5)
Country | Link |
---|---|
US (1) | US20050082397A1 (ja) |
JP (1) | JP4002911B2 (ja) |
KR (1) | KR100648411B1 (ja) |
CN (1) | CN100333839C (ja) |
TW (1) | TWI250897B (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100666138B1 (ko) | 2005-07-12 | 2007-01-09 | 김육중 | 분리형 노즐 |
KR101009042B1 (ko) * | 2008-05-30 | 2011-01-18 | 세메스 주식회사 | 약액 분사 노즐 및 이를 이용한 감광액 도포 장치 |
JP2021053593A (ja) * | 2019-09-30 | 2021-04-08 | 富士フイルム株式会社 | 塗布装置 |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100794342B1 (ko) * | 2005-11-29 | 2008-01-15 | 세메스 주식회사 | 유체 분사 노즐 및 이를 포함하는 기판 처리 장치 |
KR100828665B1 (ko) * | 2006-12-28 | 2008-05-09 | 주식회사 디엠에스 | 유체 분사노즐 |
KR101340643B1 (ko) * | 2007-04-02 | 2013-12-11 | 주식회사 디엠에스 | 임프린트용 소프트 몰드 성형장치 |
KR100969359B1 (ko) | 2008-07-24 | 2010-07-09 | 주식회사 디엠에스 | 유체분사장치 |
KR101250931B1 (ko) * | 2010-12-20 | 2013-04-04 | 주식회사 나래나노텍 | 개선된 디스펜싱 노즐 장치의 토출 구조, 및 이를 구비한 디스펜싱 노즐 장치 및 코팅 장치 |
JP5442054B2 (ja) * | 2012-02-23 | 2014-03-12 | パナソニック株式会社 | 塗布装置および塗布方法 |
KR101941998B1 (ko) * | 2012-04-03 | 2019-01-25 | 삼성디스플레이 주식회사 | 코팅 장치 및 이를 이용한 코팅 방법 |
CN103706513B (zh) * | 2012-09-28 | 2018-04-06 | 威亚光电子有限公司 | 用于将粘性材料层施加至基底上的作用元件、装置和方法 |
CN102899463B (zh) * | 2012-10-09 | 2014-11-26 | 无锡信德隆工业炉有限公司 | 直线水帘装置 |
CN104089809B (zh) * | 2014-06-24 | 2016-05-04 | 京东方科技集团股份有限公司 | 一种膜层去除装置 |
CN113171889B (zh) * | 2021-04-27 | 2022-07-12 | 常州瑞择微电子科技有限公司 | 水帘喷头 |
CN116140152A (zh) * | 2023-01-31 | 2023-05-23 | 江苏邦宇薄膜技术有限公司 | 一种常压腔逆向涂覆表面处理装置 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3420412C2 (de) * | 1984-06-01 | 1995-08-10 | Voith Gmbh J M | Streicheinrichtung zur Beschichtung laufender Warenbahnen |
US4830872A (en) * | 1985-09-03 | 1989-05-16 | Sale Tilney Technology Plc | Electrostatic coating blade and method of applying a thin layer of liquid therewith onto an object |
DE3721593A1 (de) * | 1987-06-30 | 1989-01-26 | Henning J Claassen | Vorrichtung zum auftragen von fluessigen klebstoffen auf ein substrat |
GB9024548D0 (en) * | 1990-11-12 | 1991-01-02 | Ici Plc | Apparatus and process for producing sheets of material |
DE4208897C2 (de) * | 1992-03-19 | 1995-02-23 | Voith Gmbh J M | Auftragswerk zum Beschichten von Bahnen aus Papier oder Karton |
US5436030A (en) * | 1992-09-11 | 1995-07-25 | Consolidated Papers, Inc. | Apparatus for and method of minimizing skip coating on a paper web |
US5441204A (en) * | 1993-06-10 | 1995-08-15 | United Air Specialists, Inc. | Electrostatic fluid distribution nozzle |
ATE200325T1 (de) * | 1994-09-09 | 2001-04-15 | Voith Paper Patent Gmbh | Auftragswerk zum direkten oder indirekten auftragen eines flüssigen oder pastösen mediums auf eine laufende materialbahn |
JP3676182B2 (ja) * | 2000-04-03 | 2005-07-27 | 三菱重工業株式会社 | 塗工装置および塗工方法 |
-
2003
- 2003-10-17 KR KR1020030072489A patent/KR100648411B1/ko active IP Right Grant
-
2004
- 2004-06-02 TW TW093115770A patent/TWI250897B/zh active
- 2004-06-10 US US10/864,997 patent/US20050082397A1/en not_active Abandoned
- 2004-06-14 CN CNB200410048241XA patent/CN100333839C/zh active Active
- 2004-06-18 JP JP2004181303A patent/JP4002911B2/ja active Active
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100666138B1 (ko) | 2005-07-12 | 2007-01-09 | 김육중 | 분리형 노즐 |
KR101009042B1 (ko) * | 2008-05-30 | 2011-01-18 | 세메스 주식회사 | 약액 분사 노즐 및 이를 이용한 감광액 도포 장치 |
JP2021053593A (ja) * | 2019-09-30 | 2021-04-08 | 富士フイルム株式会社 | 塗布装置 |
JP7152378B2 (ja) | 2019-09-30 | 2022-10-12 | 富士フイルム株式会社 | 塗布装置 |
Also Published As
Publication number | Publication date |
---|---|
TW200514622A (en) | 2005-05-01 |
CN100333839C (zh) | 2007-08-29 |
US20050082397A1 (en) | 2005-04-21 |
JP4002911B2 (ja) | 2007-11-07 |
KR20050037078A (ko) | 2005-04-21 |
CN1608740A (zh) | 2005-04-27 |
TWI250897B (en) | 2006-03-11 |
KR100648411B1 (ko) | 2006-11-24 |
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