CN100333839C - 液体注入喷嘴 - Google Patents

液体注入喷嘴 Download PDF

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Publication number
CN100333839C
CN100333839C CNB200410048241XA CN200410048241A CN100333839C CN 100333839 C CN100333839 C CN 100333839C CN B200410048241X A CNB200410048241X A CN B200410048241XA CN 200410048241 A CN200410048241 A CN 200410048241A CN 100333839 C CN100333839 C CN 100333839C
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plate
nozzle
substrate
liquid
tip
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Expired - Lifetime
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CN1608740A (zh
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许经宪
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Weihai Dms Optical Electromechanical Co ltd
DMS Co Ltd
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Display Manufacturing Services Co Ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/02Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape
    • B05B1/04Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape in flat form, e.g. fan-like, sheet-like
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0254Coating heads with slot-shaped outlet

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  • Nozzles (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Coating Apparatus (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

本发明公开了一种用于处理基片的液体注入喷嘴,该喷嘴包括具有第一尖端的第一板和具有第二尖端的第二板,第二板通过紧固件与第一板连接。第一板和第二板确定了一个液体通道,且第一尖端和第二尖端的长度不同。

Description

液体注入喷嘴
技术领域
本发明涉及液体注入喷嘴,特别涉及能够用于处理平面显示板的表面和按预定方向喷射液体的液体注入喷嘴。
背景技术
韩国实用新型号为20-0305052的专利公开了用于处理平面显示板的表面的液体注入喷嘴。此专利所公开的喷嘴被设计为具有长度彼此不同的尖端。喷嘴放置在相对于平板处理表面倾斜的位置,以通过向平板的表面注入液体来处理表面。通过倾斜的喷嘴按预定方向注入液体,能够提高处理效率。
然而,当喷嘴倾斜至一个状态以至于该喷嘴处于靠近表面的位置时,喷嘴可能与面板相接触,这将降低处理效率。此外,即使当喷嘴倾斜放置时,液体也可能不按预定方向注入。也就是说,如果液体的注入方向与平板的前进方向相同,将产生涡流和负压,造成基片振动,从而降低处理效率。
发明内容
因此,本发明提出了一种液体注入喷嘴,该喷嘴充分克服了由于现有技术的局限和缺陷所引发的一个或多个问题。
本发明的一个目的在于提供一种用于处理平面显示板表面的液体注入喷嘴,该喷嘴能够安装在注射器上,这样,喷嘴可相对于基片充分倾斜,并且,即使在喷嘴相对于基片无倾斜时,该喷嘴也能够按预定方向注入液体。
为了实现该目的,本发明提供了一种用于处理基片的液体注入喷嘴,该喷嘴包括具有第一尖端的第一板和具有第二尖端的第二板,第二板与第一板通过紧固件连接,其中第一板和第二板确定了液体通道,且第一尖端和第二尖端的长度不同。
优选地,第一板和第二板中尖端较短的板相对于基片前进方向放置在基片的下游位置。
因此,由于注入喷嘴的各个尖端长度彼此不同,所以,即使当喷嘴不倾斜时,也可提高基片的处理效率。
当倾斜喷嘴以至较短的尖端靠近基片的表面放置时,可在尖端和基片之间保持足够大的间隙,以防止喷嘴与表面接触,并减少产品的缺陷。
而且,由于液体的注入方向与基片前进方向相反,因此将抑制涡流和负压的产生,从而防止基片振动以增加基片的处理效率。
应该理解的是:对本发明的上述概括描述和以下的详细描述都是示例性的和解释性的,这些描述的目的在于提供权利要求所声明的本发明的深入说明。
附图说明
图1是根据本发明一优选实施例的液体注入喷嘴的透视图;
图2是沿图1的A-A线的剖面图;
图3是说明本发明的操作的示意图。
具体实施方式
下面,对附图说明的本发明优选实施例进行详细描述。在任何可能的地方,同一标注号码将在所有附图中用于表示相同或相近的部件。
图1和图2示出了根据本发明一优选实施例的液体注入喷嘴。
本发明的液体注入喷嘴1相对于基片G的表面以预定的角度θ倾斜放置。
喷嘴1包括第一板3和第二板5,每个板具有预定的宽度。第一板3和第二板5由诸如螺钉/螺母套件的紧固件彼此连接,在第一板3和第二板5之间确定了液体通道7。第二板5的尖端部分的长度比第一板3的尖端部分的长度短L。此外,优选地,第二板5相对于基片G的前进方向(图中的箭头方向)放置在下游端。也就是说,优选地,放置喷嘴以使得尖端长度较短的板位于下游端。
液体通道7由在第一板3和第二板5的相对表面上形成槽来确定,或由在第一板3和第二板5之间提供分离的间隙形成组件来确定。
下面参考图3说明本发明的操作过程。
喷嘴1相对于基片G的表面以预定的角度θ倾斜放置,基片G由滚子R(见图1)传送。此时,尖端长度较短的第二板5相对于基片G前进方向(见图1的箭头方向)放置在下游端。当液体通过液体通道7注入时,液体通道7的中轴处的流速比液体通道7的通道壁处的流速高(见图3的A,箭头长度表示流速)。也就是说,因为沿通道7流动的外围液体和通道壁产生碰撞,外围液体的流速比中轴处的液体流速小。此外,当液体经过第二板5的尖端时,由于液体与通道壁的碰撞消失,流速将陡然增加(见图3的B)。
由于流经第一板3和第二板5的液体向具有较长尖端的第一板3弯曲,因此液体被注入。而且,由于喷嘴1相对于基片G的前进方向倾斜,液体的注入方向和基片G的前进方向相反。结果,在对应于第一板3的第一板部分,抑制了涡流和负压的产生,从而防止基片G振动,以稳定地传送基片G。
如上所述,通过按照与基片前进的方向相反的方向注入液体,基片G的处理效率将显著增加。
此外,即使当喷嘴1靠近基片G放置时,第二板5的尖端和基片G之间仍能够保持足够大的距离,以防止喷嘴1接触基片G,其中,该接触可能由于滚子R的振动而导致。
如上所述,在本发明中,因为注入喷嘴的尖端的长度彼此不同,所以,即使喷嘴不倾斜,也可提高基片的处理效率。
当喷嘴的倾斜使得较短的尖端靠近基片的表面放置时,尖端和基片之间可保持足够大的间隙,从而防止喷嘴接触基片,并减少产品的缺陷。
而且,因为液体的注入方向与基片的前进方向相反,因此,可抑制涡流和负压的产生,从而防止基片振动以提高基片的处理效率。
显而易见,对本领域的普通技术人员来说,可对本发明进行各种改进和改变。因此,在附带的权利要求和它们的同等物的范围内,本发明包含本发明的改进和改变。

Claims (1)

1、一种用于处理基片的液体注入喷嘴,该喷嘴包括:
具有第一尖端的第一板;和
具有第二尖端的第二板,第二板通过紧固件与第一板连接,第一板和第二板确定了一个液体通道;
所述第一板和第二板中,用于喷射流体的尖端的长度彼此不同,所述第一板和第二板中,尖端较短的板配置在相对于基片的前进方向的下游侧;并且
所述液体注入喷嘴相对于基片倾斜,以便通过所述液体通道沿所述前进方向的相反方向注入液体。
CNB200410048241XA 2003-10-17 2004-06-14 液体注入喷嘴 Expired - Lifetime CN100333839C (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
KR1020030072489A KR100648411B1 (ko) 2003-10-17 2003-10-17 유체분사노즐
KR1020030072489 2003-10-17
KR10-2003-0072489 2003-10-17

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CN1608740A CN1608740A (zh) 2005-04-27
CN100333839C true CN100333839C (zh) 2007-08-29

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US (1) US20050082397A1 (zh)
JP (1) JP4002911B2 (zh)
KR (1) KR100648411B1 (zh)
CN (1) CN100333839C (zh)
TW (1) TWI250897B (zh)

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KR100666138B1 (ko) 2005-07-12 2007-01-09 김육중 분리형 노즐
KR100794342B1 (ko) * 2005-11-29 2008-01-15 세메스 주식회사 유체 분사 노즐 및 이를 포함하는 기판 처리 장치
KR100828665B1 (ko) * 2006-12-28 2008-05-09 주식회사 디엠에스 유체 분사노즐
KR101340643B1 (ko) * 2007-04-02 2013-12-11 주식회사 디엠에스 임프린트용 소프트 몰드 성형장치
KR101009042B1 (ko) * 2008-05-30 2011-01-18 세메스 주식회사 약액 분사 노즐 및 이를 이용한 감광액 도포 장치
KR100969359B1 (ko) 2008-07-24 2010-07-09 주식회사 디엠에스 유체분사장치
KR101250931B1 (ko) * 2010-12-20 2013-04-04 주식회사 나래나노텍 개선된 디스펜싱 노즐 장치의 토출 구조, 및 이를 구비한 디스펜싱 노즐 장치 및 코팅 장치
JP5442054B2 (ja) 2012-02-23 2014-03-12 パナソニック株式会社 塗布装置および塗布方法
KR101941998B1 (ko) * 2012-04-03 2019-01-25 삼성디스플레이 주식회사 코팅 장치 및 이를 이용한 코팅 방법
CN103706513B (zh) * 2012-09-28 2018-04-06 威亚光电子有限公司 用于将粘性材料层施加至基底上的作用元件、装置和方法
CN102899463B (zh) * 2012-10-09 2014-11-26 无锡信德隆工业炉有限公司 直线水帘装置
CN104089809B (zh) * 2014-06-24 2016-05-04 京东方科技集团股份有限公司 一种膜层去除装置
JP7152378B2 (ja) * 2019-09-30 2022-10-12 富士フイルム株式会社 塗布装置
CN113171889B (zh) * 2021-04-27 2022-07-12 常州瑞择微电子科技有限公司 水帘喷头
CN116140152A (zh) * 2023-01-31 2023-05-23 江苏邦宇薄膜技术有限公司 一种常压腔逆向涂覆表面处理装置

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US5785253A (en) * 1994-09-09 1998-07-28 Voith Sulzer Papiermaschinen Gmbh Application unit for the direct or indirect application of a liquid or pasty medium onto a moving material web

Also Published As

Publication number Publication date
TWI250897B (en) 2006-03-11
CN1608740A (zh) 2005-04-27
US20050082397A1 (en) 2005-04-21
TW200514622A (en) 2005-05-01
KR20050037078A (ko) 2005-04-21
KR100648411B1 (ko) 2006-11-24
JP2005118770A (ja) 2005-05-12
JP4002911B2 (ja) 2007-11-07

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