CN100333839C - 液体注入喷嘴 - Google Patents
液体注入喷嘴 Download PDFInfo
- Publication number
- CN100333839C CN100333839C CNB200410048241XA CN200410048241A CN100333839C CN 100333839 C CN100333839 C CN 100333839C CN B200410048241X A CNB200410048241X A CN B200410048241XA CN 200410048241 A CN200410048241 A CN 200410048241A CN 100333839 C CN100333839 C CN 100333839C
- Authority
- CN
- China
- Prior art keywords
- plate
- nozzle
- substrate
- liquid
- tip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000012530 fluid Substances 0.000 title claims abstract description 12
- 238000002347 injection Methods 0.000 title claims abstract description 9
- 239000007924 injection Substances 0.000 title claims abstract description 9
- 239000000758 substrate Substances 0.000 claims abstract description 37
- 239000007788 liquid Substances 0.000 claims description 31
- 239000007921 spray Substances 0.000 claims 1
- 230000002950 deficient Effects 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/02—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape
- B05B1/04—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape in flat form, e.g. fan-like, sheet-like
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0254—Coating heads with slot-shaped outlet
Landscapes
- Nozzles (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Coating Apparatus (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
Description
Claims (1)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020030072489A KR100648411B1 (ko) | 2003-10-17 | 2003-10-17 | 유체분사노즐 |
KR1020030072489 | 2003-10-17 | ||
KR10-2003-0072489 | 2003-10-17 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1608740A CN1608740A (zh) | 2005-04-27 |
CN100333839C true CN100333839C (zh) | 2007-08-29 |
Family
ID=34510922
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB200410048241XA Expired - Lifetime CN100333839C (zh) | 2003-10-17 | 2004-06-14 | 液体注入喷嘴 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20050082397A1 (zh) |
JP (1) | JP4002911B2 (zh) |
KR (1) | KR100648411B1 (zh) |
CN (1) | CN100333839C (zh) |
TW (1) | TWI250897B (zh) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100666138B1 (ko) | 2005-07-12 | 2007-01-09 | 김육중 | 분리형 노즐 |
KR100794342B1 (ko) * | 2005-11-29 | 2008-01-15 | 세메스 주식회사 | 유체 분사 노즐 및 이를 포함하는 기판 처리 장치 |
KR100828665B1 (ko) * | 2006-12-28 | 2008-05-09 | 주식회사 디엠에스 | 유체 분사노즐 |
KR101340643B1 (ko) * | 2007-04-02 | 2013-12-11 | 주식회사 디엠에스 | 임프린트용 소프트 몰드 성형장치 |
KR101009042B1 (ko) * | 2008-05-30 | 2011-01-18 | 세메스 주식회사 | 약액 분사 노즐 및 이를 이용한 감광액 도포 장치 |
KR100969359B1 (ko) | 2008-07-24 | 2010-07-09 | 주식회사 디엠에스 | 유체분사장치 |
KR101250931B1 (ko) * | 2010-12-20 | 2013-04-04 | 주식회사 나래나노텍 | 개선된 디스펜싱 노즐 장치의 토출 구조, 및 이를 구비한 디스펜싱 노즐 장치 및 코팅 장치 |
JP5442054B2 (ja) | 2012-02-23 | 2014-03-12 | パナソニック株式会社 | 塗布装置および塗布方法 |
KR101941998B1 (ko) * | 2012-04-03 | 2019-01-25 | 삼성디스플레이 주식회사 | 코팅 장치 및 이를 이용한 코팅 방법 |
CN103706513B (zh) * | 2012-09-28 | 2018-04-06 | 威亚光电子有限公司 | 用于将粘性材料层施加至基底上的作用元件、装置和方法 |
CN102899463B (zh) * | 2012-10-09 | 2014-11-26 | 无锡信德隆工业炉有限公司 | 直线水帘装置 |
CN104089809B (zh) * | 2014-06-24 | 2016-05-04 | 京东方科技集团股份有限公司 | 一种膜层去除装置 |
JP7152378B2 (ja) * | 2019-09-30 | 2022-10-12 | 富士フイルム株式会社 | 塗布装置 |
CN113171889B (zh) * | 2021-04-27 | 2022-07-12 | 常州瑞择微电子科技有限公司 | 水帘喷头 |
CN116140152A (zh) * | 2023-01-31 | 2023-05-23 | 江苏邦宇薄膜技术有限公司 | 一种常压腔逆向涂覆表面处理装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4830872A (en) * | 1985-09-03 | 1989-05-16 | Sale Tilney Technology Plc | Electrostatic coating blade and method of applying a thin layer of liquid therewith onto an object |
US5785253A (en) * | 1994-09-09 | 1998-07-28 | Voith Sulzer Papiermaschinen Gmbh | Application unit for the direct or indirect application of a liquid or pasty medium onto a moving material web |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3420412C2 (de) * | 1984-06-01 | 1995-08-10 | Voith Gmbh J M | Streicheinrichtung zur Beschichtung laufender Warenbahnen |
DE3721593A1 (de) * | 1987-06-30 | 1989-01-26 | Henning J Claassen | Vorrichtung zum auftragen von fluessigen klebstoffen auf ein substrat |
GB9024548D0 (en) * | 1990-11-12 | 1991-01-02 | Ici Plc | Apparatus and process for producing sheets of material |
DE4208897C2 (de) * | 1992-03-19 | 1995-02-23 | Voith Gmbh J M | Auftragswerk zum Beschichten von Bahnen aus Papier oder Karton |
US5436030A (en) * | 1992-09-11 | 1995-07-25 | Consolidated Papers, Inc. | Apparatus for and method of minimizing skip coating on a paper web |
US5441204A (en) * | 1993-06-10 | 1995-08-15 | United Air Specialists, Inc. | Electrostatic fluid distribution nozzle |
JP3676182B2 (ja) * | 2000-04-03 | 2005-07-27 | 三菱重工業株式会社 | 塗工装置および塗工方法 |
-
2003
- 2003-10-17 KR KR1020030072489A patent/KR100648411B1/ko active IP Right Grant
-
2004
- 2004-06-02 TW TW093115770A patent/TWI250897B/zh active
- 2004-06-10 US US10/864,997 patent/US20050082397A1/en not_active Abandoned
- 2004-06-14 CN CNB200410048241XA patent/CN100333839C/zh not_active Expired - Lifetime
- 2004-06-18 JP JP2004181303A patent/JP4002911B2/ja not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4830872A (en) * | 1985-09-03 | 1989-05-16 | Sale Tilney Technology Plc | Electrostatic coating blade and method of applying a thin layer of liquid therewith onto an object |
US5785253A (en) * | 1994-09-09 | 1998-07-28 | Voith Sulzer Papiermaschinen Gmbh | Application unit for the direct or indirect application of a liquid or pasty medium onto a moving material web |
Also Published As
Publication number | Publication date |
---|---|
TWI250897B (en) | 2006-03-11 |
CN1608740A (zh) | 2005-04-27 |
US20050082397A1 (en) | 2005-04-21 |
TW200514622A (en) | 2005-05-01 |
KR20050037078A (ko) | 2005-04-21 |
KR100648411B1 (ko) | 2006-11-24 |
JP2005118770A (ja) | 2005-05-12 |
JP4002911B2 (ja) | 2007-11-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: WEIHAI DIANMEISHI OPTO-MECHATRONICS CO., LTD. Effective date: 20140227 |
|
TR01 | Transfer of patent right |
Effective date of registration: 20140227 Address after: Gyeonggi Do, South Korea Patentee after: DMS Co.,Ltd. Patentee after: WEIHAI DMS OPTICAL ELECTROMECHANICAL CO.,LTD. Address before: Gyeonggi Do, South Korea Patentee before: DMS Co.,Ltd. |
|
TR01 | Transfer of patent right | ||
CP03 | Change of name, title or address |
Address after: 264205 No. 88-1, Bekaert Road, Weihai Economic and Technological Development Zone, Weihai City, Shandong Province Patentee after: WEIHAI DMS OPTICAL ELECTROMECHANICAL Co.,Ltd. Patentee after: DMS Co.,Ltd. Address before: Gyeonggi Do, South Korea Patentee before: DMS Co.,Ltd. Patentee before: WEIHAI DMS OPTICAL ELECTROMECHANICAL Co.,Ltd. |
|
CP03 | Change of name, title or address | ||
CX01 | Expiry of patent term |
Granted publication date: 20070829 |
|
CX01 | Expiry of patent term |