JP2005108709A - プラズマ処理方法及びプラズマ処理装置 - Google Patents

プラズマ処理方法及びプラズマ処理装置 Download PDF

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JP2005108709A
JP2005108709A JP2003342196A JP2003342196A JP2005108709A JP 2005108709 A JP2005108709 A JP 2005108709A JP 2003342196 A JP2003342196 A JP 2003342196A JP 2003342196 A JP2003342196 A JP 2003342196A JP 2005108709 A JP2005108709 A JP 2005108709A
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plasma
electrodes
gas
discharge
generation
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Japanese (ja)
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JP2005108709A5 (cg-RX-API-DMAC7.html
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Tsuyoshi Ono
毅之 大野
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Sekisui Chemical Co Ltd
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Sekisui Chemical Co Ltd
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Priority to JP2003342196A priority Critical patent/JP2005108709A/ja
Publication of JP2005108709A publication Critical patent/JP2005108709A/ja
Publication of JP2005108709A5 publication Critical patent/JP2005108709A5/ja
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JP2003342196A 2003-09-30 2003-09-30 プラズマ処理方法及びプラズマ処理装置 Pending JP2005108709A (ja)

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JP2003342196A JP2005108709A (ja) 2003-09-30 2003-09-30 プラズマ処理方法及びプラズマ処理装置

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JP2003342196A JP2005108709A (ja) 2003-09-30 2003-09-30 プラズマ処理方法及びプラズマ処理装置

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JP2005108709A true JP2005108709A (ja) 2005-04-21
JP2005108709A5 JP2005108709A5 (cg-RX-API-DMAC7.html) 2005-07-14

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JP2003342196A Pending JP2005108709A (ja) 2003-09-30 2003-09-30 プラズマ処理方法及びプラズマ処理装置

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007188690A (ja) * 2006-01-12 2007-07-26 Matsushita Electric Ind Co Ltd 大気圧プラズマ処理方法及び装置
JP2008112923A (ja) * 2006-10-31 2008-05-15 Sekisui Chem Co Ltd プラズマ処理方法および処理装置
JP2008112971A (ja) * 2006-10-06 2008-05-15 Tokyo Electron Ltd 基板処理方法、基板処理装置、プログラムならびに記録媒体
JP2013193353A (ja) * 2012-03-21 2013-09-30 Seiko Epson Corp 画像記録装置、画像記録方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007188690A (ja) * 2006-01-12 2007-07-26 Matsushita Electric Ind Co Ltd 大気圧プラズマ処理方法及び装置
JP2008112971A (ja) * 2006-10-06 2008-05-15 Tokyo Electron Ltd 基板処理方法、基板処理装置、プログラムならびに記録媒体
JP2008112923A (ja) * 2006-10-31 2008-05-15 Sekisui Chem Co Ltd プラズマ処理方法および処理装置
JP2013193353A (ja) * 2012-03-21 2013-09-30 Seiko Epson Corp 画像記録装置、画像記録方法

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