JP2005100526A5 - - Google Patents
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- Publication number
- JP2005100526A5 JP2005100526A5 JP2003332657A JP2003332657A JP2005100526A5 JP 2005100526 A5 JP2005100526 A5 JP 2005100526A5 JP 2003332657 A JP2003332657 A JP 2003332657A JP 2003332657 A JP2003332657 A JP 2003332657A JP 2005100526 A5 JP2005100526 A5 JP 2005100526A5
- Authority
- JP
- Japan
- Prior art keywords
- region
- amorphous
- amorphous region
- concavo
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims 6
- 239000012670 alkaline solution Substances 0.000 claims 3
- 238000000034 method Methods 0.000 claims 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 3
- 239000013078 crystal Substances 0.000 claims 2
- 238000002844 melting Methods 0.000 claims 2
- 230000008018 melting Effects 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 238000010894 electron beam technology Methods 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 239000011241 protective layer Substances 0.000 claims 1
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003332657A JP2005100526A (ja) | 2003-09-25 | 2003-09-25 | デバイスの製造方法及び観察方法 |
| CNA2004100742506A CN1601694A (zh) | 2003-09-25 | 2004-09-03 | 器件的制造方法和观察方法 |
| US10/933,215 US20050106508A1 (en) | 2003-09-25 | 2004-09-03 | Method of fabricating devices and observing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003332657A JP2005100526A (ja) | 2003-09-25 | 2003-09-25 | デバイスの製造方法及び観察方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005100526A JP2005100526A (ja) | 2005-04-14 |
| JP2005100526A5 true JP2005100526A5 (enExample) | 2006-03-02 |
Family
ID=34460887
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003332657A Pending JP2005100526A (ja) | 2003-09-25 | 2003-09-25 | デバイスの製造方法及び観察方法 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US20050106508A1 (enExample) |
| JP (1) | JP2005100526A (enExample) |
| CN (1) | CN1601694A (enExample) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1695780B1 (en) * | 2003-12-09 | 2010-10-20 | Ricoh Company, Ltd. | Structure body and method of producing the structure body, medium for forming structure body, and optical recording medium and method of reproducing the optical recording medium |
| JP4456527B2 (ja) * | 2005-05-20 | 2010-04-28 | 株式会社日立製作所 | 光情報記録媒体、並びにそれを用いた情報記録方法及び情報再生方法 |
| KR100630766B1 (ko) * | 2005-09-05 | 2006-10-04 | 삼성전자주식회사 | 상변화 물질을 사용한 패턴 형성 방법 및 그 재작업 방법 |
| FR2909797B1 (fr) * | 2006-12-08 | 2009-02-13 | Commissariat Energie Atomique | Formation de zones en creux profondes et son utilisation lors de la fabrication d'un support d'enregistrement optique |
| US20080142475A1 (en) * | 2006-12-15 | 2008-06-19 | Knowles Electronics, Llc | Method of creating solid object from a material and apparatus thereof |
| JP4685754B2 (ja) | 2006-12-28 | 2011-05-18 | 株式会社日立製作所 | トラッキング方法 |
| JP4580380B2 (ja) | 2006-12-28 | 2010-11-10 | 株式会社日立製作所 | 光ディスク装置 |
| FR2912538B1 (fr) * | 2007-02-08 | 2009-04-24 | Commissariat Energie Atomique | Formation de zones en creux profondes et son utilisation lors de la fabrication d'un support d'enregistrement optique |
| JP4903081B2 (ja) | 2007-05-17 | 2012-03-21 | 株式会社日立製作所 | 光ディスク媒体及びトラッキング方法 |
| JP5057925B2 (ja) | 2007-10-18 | 2012-10-24 | 株式会社日立製作所 | デジタル情報再生方法 |
| JP2009245505A (ja) * | 2008-03-31 | 2009-10-22 | Pioneer Electronic Corp | 光学情報記録媒体製造用の原盤 |
| JP5194129B2 (ja) * | 2008-10-14 | 2013-05-08 | 旭化成株式会社 | 熱反応型レジスト材料、それを用いた熱リソグラフィ用積層体及びそれらを用いたモールドの製造方法 |
| US9623590B2 (en) * | 2012-01-27 | 2017-04-18 | Asahi Kasei E-Materials Corporation | Fine concavo-convex structure product, heat-reactive resist material for dry etching, mold manufacturing method and mold |
| GB2521417A (en) * | 2013-12-19 | 2015-06-24 | Swisslitho Ag | Multiscale patterning of a sample with apparatus having both thermo-optical lithography capability and thermal scanning probe lithography capability |
| CN114512150B (zh) * | 2020-11-16 | 2025-02-18 | 华为技术有限公司 | 一种光存储介质、光存储介质制备方法以及系统 |
| US11733468B2 (en) * | 2021-12-08 | 2023-08-22 | Viavi Solutions Inc. | Photonic structure using optical heater |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4309225A (en) * | 1979-09-13 | 1982-01-05 | Massachusetts Institute Of Technology | Method of crystallizing amorphous material with a moving energy beam |
| JPH066393B2 (ja) * | 1984-03-07 | 1994-01-26 | 株式会社日立製作所 | 情報の記録・消去方法 |
| US5051340A (en) * | 1989-06-23 | 1991-09-24 | Eastman Kodak Company | Master for optical element replication |
| US6030556A (en) * | 1997-07-08 | 2000-02-29 | Imation Corp. | Optical disc stampers and methods/systems for manufacturing the same |
| KR100284693B1 (ko) * | 1997-12-30 | 2001-03-15 | 윤종용 | 상변화형 디스크의 초기화 방법 |
| DE69931953T2 (de) * | 1998-10-26 | 2006-10-12 | Mitsubishi Kagaku Media Corp., Ltd. | Verfahren zur aufzeichnung und wiedergabe von mehrwertigen digitalen signalen und mehrwertaufzeichnungsmedium des phasenwechseltyps |
| CN1194348C (zh) * | 2000-11-30 | 2005-03-23 | 日本胜利株式会社 | 光记录媒体 |
| JP2002230828A (ja) * | 2001-01-31 | 2002-08-16 | Pioneer Electronic Corp | 情報記録媒体 |
| TW527592B (en) * | 2001-03-19 | 2003-04-11 | Matsushita Electric Industrial Co Ltd | Optical information recording media, and the manufacturing method and record regeneration method of the same |
-
2003
- 2003-09-25 JP JP2003332657A patent/JP2005100526A/ja active Pending
-
2004
- 2004-09-03 US US10/933,215 patent/US20050106508A1/en not_active Abandoned
- 2004-09-03 CN CNA2004100742506A patent/CN1601694A/zh active Pending
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