JP2005071430A - 垂直磁気記録ヘッドの製造方法 - Google Patents
垂直磁気記録ヘッドの製造方法 Download PDFInfo
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- JP2005071430A JP2005071430A JP2003296977A JP2003296977A JP2005071430A JP 2005071430 A JP2005071430 A JP 2005071430A JP 2003296977 A JP2003296977 A JP 2003296977A JP 2003296977 A JP2003296977 A JP 2003296977A JP 2005071430 A JP2005071430 A JP 2005071430A
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3103—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
- Y10T29/49041—Fabricating head structure or component thereof including measuring or testing with significant slider/housing shaping or treating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
- Y10T29/49043—Depositing magnetic layer or coating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
- Y10T29/49043—Depositing magnetic layer or coating
- Y10T29/49046—Depositing magnetic layer or coating with etching or machining of magnetic material
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49048—Machining magnetic material [e.g., grinding, etching, polishing]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49048—Machining magnetic material [e.g., grinding, etching, polishing]
- Y10T29/49052—Machining magnetic material [e.g., grinding, etching, polishing] by etching
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
Abstract
【解決手段】 ドライエッチングに対する削れ方の速度が主磁極層29と第1の非磁性層31とで異なることを利用して、第1の非磁性層31の内側面31b,31bと、主磁極層29の上面29aからなる溝部Gを形成し、溝部Gの上に非磁性材料層32を介して、補助磁極層33を形成する。従って、非磁性材料層32の形成された凹部32aの内部に補助磁極層33と一体に形成され、主磁極層29の方向に延びる凸部33bを容易に形成することができる。
【選択図】図2
Description
(a)磁性材料で主磁極層を形成する工程、
(b)前記主磁極層の両側部及び上部に第1の非磁性層を設ける工程、
(c)前記第1の非磁性層の上面を研磨して平坦面とする工程、
(d)前記主磁極層の上面と前記第1の非磁性層の上面をドライエッチング法によって削り、前記第1の非磁性層の内側面と、前記主磁極層の上面からなる溝部を形成する工程、
(e)前記第1の非磁性層と前記主磁極層の上に非磁性材料層を積層し、前記溝部の上の部分の前記非磁性材料層に凹部を形成する工程と、
(f)前記非磁性材料層の上に補助磁極層を形成し、前記凹部の内部に、前記補助磁極層と一体に形成され前記主磁極層の方向に延びる凸部を形成する工程。
本発明では、前記(a)工程と前記(b)工程の間に、
(g)前記主磁極層の上面、両側面に第2の非磁性層を形成する工程、
を有し、
前記(b)工程において、前記第2の非磁性層の両側部及び上部に第1の非磁性層を設け、
前記(d)工程において、前記第2の非磁性層の上面が前記第1の非磁性層の上面より、下方に位置するように、前記主磁極層の上面と前記第2の非磁性層の上面及び前記第1の非磁性層の上面をドライエッチング法によって削ることが好ましい。
コイル層34の上にはコイル絶縁層35が形成されており、補助磁極層33は絶縁層35上を経て接続部33bに達する。
図2に示されるように、非磁性材料層32には、溝部Gの上で凹部32aが形成されている。また、補助磁極層33の対向面H1a側には主磁極層29の方向に延びる凸部33bが一体に形成されており、凸部33bが凹部32aの内部に位置している。
エッチングガス:中性アルゴン(Ar)
イオンミリングのビーム電圧:400V
イオンミリングのビーム電流:300mA
イオンミリングのビーム傾斜角度θ:基板表面の法線方向に対して45度
第2の非磁性層30を反応性イオンエッチングによって選択的に削ると、図5(c)及び図5(d)に示すように、第2の非磁性層30の前方部の上面30aのみが削られる。その後、イオンミリングによって主磁極層29の前方部29Fの上面29aを削って、図5(a)及び図5(b)に示す状態にすることができる。 図7ないし図11は本発明の第2の実施の形態の垂直磁気記録ヘッドの製造方法を工程別に示したものであるが、各図において(a)図は対向面H1a側から見た部分正面図、(b)図は縦断面図である。なお、図7ないし図11に示した製造方法と図3ないし図6に示した製造方法の違いは第2の非磁性層の形成の有無であり、同じ符号を付した部材の構造及び材料は特に説明のない限り、図3ないし図6に示したものと同じである。
さらに、主磁極層29の両側部、後方部、及び上部に第1絶縁層31を積層する。
28 ヨーク層
29 主磁極層
30 第2の非磁性層
31 第1の非磁性層
32 絶縁性材料層
32a 凹部
33 補助磁極層
33b 凸部
34 コイル層
35 コイル絶縁層
G 溝部
37 持ち上げ層
38 コイル絶縁層
Claims (6)
- 以下の工程を有することを特徴とする垂直磁気記録ヘッドの製造方法。
(a)磁性材料で主磁極層を形成する工程、
(b)前記主磁極層の両側部及び上部に第1の非磁性層を設ける工程、
(c)前記第1の非磁性層の上面を研磨して平坦面とする工程、
(d)前記主磁極層の上面と前記第1の非磁性層の上面をドライエッチング法によって削り、前記第1の非磁性層の内側面と、前記主磁極層の上面からなる溝部を形成する工程、
(e)前記第1の非磁性層と前記主磁極層の上に非磁性材料層を積層し、前記溝部の上の部分の前記非磁性材料層に凹部を形成する工程と、
(f)前記非磁性材料層の上に補助磁極層を形成し、前記凹部の内部に、前記補助磁極層と一体に形成され前記主磁極層の方向に延びる凸部を形成する工程。 - 前記(a)工程と前記(b)工程の間に、
(g)前記主磁極層の上面、両側面に第2の非磁性層を形成する工程、
を有し、
前記(b)工程において、前記第2の非磁性層の両側部及び上部に第1の非磁性層を設け、
前記(d)工程において、前記第2の非磁性層の上面が前記第1の非磁性層の上面より、下方に位置するように、前記主磁極層の上面と前記第2の非磁性層の上面及び前記第1の非磁性層の上面をドライエッチング法によって削る請求項1記載の垂直磁気記録ヘッドの製造方法。 - 前記第1の非磁性層と前記第2の非磁性層を、同一条件下でエッチングしたときの、前記第2の非磁性層のエッチング速度が前記第1の非磁性層のエッチング速度より大きい請求項2記載の垂直磁気記録ヘッドの製造方法。
- 前記第1の非磁性層、前記第2の非磁性層、及び前記主磁極層を、同一条件下でエッチングしたときの、前記第2の非磁性層及び前記主磁極層のエッチング速度が前記第1の非磁性層のエッチング速度より大きい請求項2または3に記載の垂直磁気記録ヘッドの製造方法。
- 前記第1の非磁性層はアルミナ(Al2O3)で形成され、前記第2の非磁性層はTi、W、Cr、Ta、Mo、Au、Pd、Pt、NiCr、NiCu、Al−Si−O、Siの酸化物、Tiの酸化物、Wの酸化物、Crの酸化物、Taの酸化物のいずれか1種または2種以上で形成される請求項2ないし4のいずれかに記載の垂直磁気記録ヘッドの製造方法。
- 前記第1の非磁性層はSiO2またはAl−Si−Oの両方あるいはいずれか一方で形成され、前記第2の非磁性層はW、WO3、Cr、CrOX、Moのいずれか1種または2種以上で形成される請求項2ないし4のいずれかに記載の垂直磁気記録ヘッドの製造方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
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JP2003296977A JP4009234B2 (ja) | 2003-08-21 | 2003-08-21 | 垂直磁気記録ヘッドの製造方法 |
US10/913,200 US7181828B2 (en) | 2003-08-21 | 2004-08-06 | Method for manufacturing perpendicular magnetic recording head |
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JP2003296977A JP4009234B2 (ja) | 2003-08-21 | 2003-08-21 | 垂直磁気記録ヘッドの製造方法 |
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JP2005071430A true JP2005071430A (ja) | 2005-03-17 |
JP4009234B2 JP4009234B2 (ja) | 2007-11-14 |
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JP (1) | JP4009234B2 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007026636A (ja) * | 2005-07-13 | 2007-02-01 | Headway Technologies Inc | 薄膜磁気ヘッド用構造物及びその製造方法並びに薄膜磁気ヘッド |
JP2007294078A (ja) * | 2006-04-24 | 2007-11-08 | Hitachi Global Storage Technologies Netherlands Bv | ノッチ付きトレーリングシールドを有する垂直磁気記録型書き込みヘッド及び製造方法 |
JP2011034662A (ja) * | 2009-07-29 | 2011-02-17 | Seagate Technology Llc | データ記憶システムのための記録ヘッド |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3735328B2 (ja) * | 2002-08-19 | 2006-01-18 | アルプス電気株式会社 | 垂直磁気記録薄膜ヘッドの主磁極の形成方法 |
US20090236632A1 (en) * | 2008-03-19 | 2009-09-24 | Anderson Brent A | Fet having high-k, vt modifying channel and gate extension devoid of high-k and/or vt modifying material, and design structure |
US8320076B1 (en) | 2008-06-26 | 2012-11-27 | Western Digital (Fremont), Llc | Method and system for providing a magnetic recording transducer including an assist pole having surfaces angled with respect to the ABS |
US8233248B1 (en) | 2009-09-16 | 2012-07-31 | Western Digital (Fremont), Llc | Method and system for providing a magnetic recording transducer using a line hard mask |
US8217456B1 (en) | 2011-03-11 | 2012-07-10 | International Business Machines Corporation | Low capacitance hi-K dual work function metal gate body-contacted field effect transistor |
US8871102B2 (en) * | 2011-05-25 | 2014-10-28 | Western Digital (Fremont), Llc | Method and system for fabricating a narrow line structure in a magnetic recording head |
US9034564B1 (en) | 2013-07-26 | 2015-05-19 | Western Digital (Fremont), Llc | Reader fabrication method employing developable bottom anti-reflective coating |
Family Cites Families (14)
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JPS59177376A (ja) * | 1983-03-26 | 1984-10-08 | Fujitsu Ltd | イオンエツチング方法 |
JPH0916907A (ja) | 1995-06-29 | 1997-01-17 | Victor Co Of Japan Ltd | 薄膜磁気ヘッド及びその製造方法 |
US6091582A (en) * | 1997-03-28 | 2000-07-18 | Hitachi, Ltd. | Thin film magnetic recording head with very narrow track width performing high density recording at high driving frequency |
US6081408A (en) | 1997-12-02 | 2000-06-27 | Masushita-Koto Buki Electronics Industries, Ltd. | Magnetoresistive read/write head having reduced write fringing and method for manufacturing same |
JP3363842B2 (ja) * | 1999-07-06 | 2003-01-08 | アルプス電気株式会社 | 薄膜磁気ヘッド及びその製造方法 |
JP3363850B2 (ja) * | 1999-07-06 | 2003-01-08 | アルプス電気株式会社 | 薄膜磁気ヘッド及びその製造方法 |
JP3529678B2 (ja) * | 1999-10-06 | 2004-05-24 | アルプス電気株式会社 | 薄膜磁気ヘッド及びその製造方法 |
JP2002092820A (ja) | 2000-09-20 | 2002-03-29 | Toshiba Corp | 垂直記録用磁気ヘッドおよび磁気ディスク装置 |
US6850390B2 (en) * | 2000-11-10 | 2005-02-01 | Tdk Corporation | Thin-film magnetic head and method of manufacturing same |
JP2002157706A (ja) | 2000-11-20 | 2002-05-31 | Toshiba Corp | 磁気記録ヘッド、磁気記録再生ヘッド、及び磁気記録装置 |
US6776917B2 (en) * | 2001-01-03 | 2004-08-17 | International Business Machines Corporation | Chemical mechanical polishing thickness control in magnetic head fabrication |
JP2003006813A (ja) | 2001-06-20 | 2003-01-10 | Shinka Jitsugyo Kk | 薄膜磁気ヘッドおよびその製造方法 |
US6760966B2 (en) * | 2002-04-30 | 2004-07-13 | Headway Technologies, Inc. | Process of manufacturing a side reading reduced GMR for high track density |
JP3865738B2 (ja) * | 2003-06-18 | 2007-01-10 | Tdk株式会社 | 薄膜磁気ヘッド、ヘッドジンバルアセンブリおよびハードディスク装置 |
-
2003
- 2003-08-21 JP JP2003296977A patent/JP4009234B2/ja not_active Expired - Fee Related
-
2004
- 2004-08-06 US US10/913,200 patent/US7181828B2/en not_active Expired - Fee Related
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007026636A (ja) * | 2005-07-13 | 2007-02-01 | Headway Technologies Inc | 薄膜磁気ヘッド用構造物及びその製造方法並びに薄膜磁気ヘッド |
US7943288B2 (en) | 2005-07-13 | 2011-05-17 | Headway Technologies, Inc. | Thin-film magnetic head structure, method of manufacturing the same, and thin-film magnetic head |
JP4745892B2 (ja) * | 2005-07-13 | 2011-08-10 | ヘッドウェイテクノロジーズ インコーポレイテッド | 薄膜磁気ヘッド用構造物及びその製造方法並びに薄膜磁気ヘッド |
US8169740B2 (en) | 2005-07-13 | 2012-05-01 | Headway Technologies, Inc. | Thin-film magnetic head structure and thin-film magnetic head |
JP2007294078A (ja) * | 2006-04-24 | 2007-11-08 | Hitachi Global Storage Technologies Netherlands Bv | ノッチ付きトレーリングシールドを有する垂直磁気記録型書き込みヘッド及び製造方法 |
JP2011034662A (ja) * | 2009-07-29 | 2011-02-17 | Seagate Technology Llc | データ記憶システムのための記録ヘッド |
US9036298B2 (en) | 2009-07-29 | 2015-05-19 | Seagate Technology Llc | Methods and devices to control write pole height in recording heads |
Also Published As
Publication number | Publication date |
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JP4009234B2 (ja) | 2007-11-14 |
US20050039324A1 (en) | 2005-02-24 |
US7181828B2 (en) | 2007-02-27 |
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