JP2007184022A - 垂直磁気記録ヘッドの主磁極形成方法 - Google Patents
垂直磁気記録ヘッドの主磁極形成方法 Download PDFInfo
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- JP2007184022A JP2007184022A JP2006000236A JP2006000236A JP2007184022A JP 2007184022 A JP2007184022 A JP 2007184022A JP 2006000236 A JP2006000236 A JP 2006000236A JP 2006000236 A JP2006000236 A JP 2006000236A JP 2007184022 A JP2007184022 A JP 2007184022A
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/1278—Structure or manufacture of heads, e.g. inductive specially adapted for magnetisations perpendicular to the surface of the record carrier
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/313—Disposition of layers
- G11B5/3133—Disposition of layers including layers not usually being a part of the electromagnetic transducer structure and providing additional features, e.g. for improving heat radiation, reduction of power dissipation, adaptations for measurement or indication of gap depth or other properties of the structure
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
- Y10T29/49041—Fabricating head structure or component thereof including measuring or testing with significant slider/housing shaping or treating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
- Y10T29/49043—Depositing magnetic layer or coating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
- Y10T29/49043—Depositing magnetic layer or coating
- Y10T29/49046—Depositing magnetic layer or coating with etching or machining of magnetic material
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49048—Machining magnetic material [e.g., grinding, etching, polishing]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49048—Machining magnetic material [e.g., grinding, etching, polishing]
- Y10T29/49052—Machining magnetic material [e.g., grinding, etching, polishing] by etching
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Magnetic Heads (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
Abstract
【解決手段】非磁性絶縁層上に、記録媒体との対向面から見た形状が該非磁性絶縁層側で幅狭の台形形状をなす主磁極層を形成する垂直磁気記録ヘッドの主磁極形成方法であって、先ず、非磁性絶縁層上に非磁性材料からなるメッキ下地膜を形成する。次に、メッキ下地膜上に台形形状の空間を有するレジストを形成し、この台形形状空間内に主磁極層をメッキにより形成した後、レジストを除去する。続いて、台形形状をなす主磁極層の側面をエッチングし、記録トラック幅寸法を規定する。そして、非磁性絶縁層が露出するまでメッキ下地膜をエッチングし、該メッキ下地膜からの跳ね返りを主磁極層の側面に再付着させる。
【選択図】図2
Description
108’ 再付着膜
109 メッキ下地膜
109’ 再付着膜
110 主磁極層
110b ボトム部
110c 側面
113 磁気ギャップ層
150 補助磁極層
β 台形形状空間
F 対向面
H 垂直磁気記録ヘッド
M 記録媒体
Ma ハード膜
Mb ソフト膜
R レジスト層
Tw トラック幅
Claims (7)
- 非磁性絶縁層の上に、記録媒体との対向面から見た形状が該非磁性絶縁層側で幅狭の台形形状をなす主磁極層を形成する垂直磁気記録ヘッドの主磁極形成方法において、
前記非磁性絶縁層の上に、非磁性材料からなるメッキ下地膜を形成する工程と、
このメッキ下地膜の上に、前記台形形状の空間を有するレジストを形成する工程と、
このレジストによって形成された台形形状空間内に、主磁極層をメッキにより形成する工程と、
前記レジストを除去する工程と、
露出した台形形状をなす主磁極層の側面及び前記メッキ下地膜の一部をエッチングし、記録トラック幅寸法を規定する工程と、
前記非磁性絶縁層が露出するまで前記メッキ下地膜をエッチングし、該メッキ下地膜からの跳ね返りを前記主磁極層の側面に再付着させる工程と、
を有することを特徴とする垂直磁気記録ヘッドの主磁極形成方法。 - 請求項1記載の垂直磁気記録ヘッドの主磁極形成方法において、前記メッキ下地膜のエッチングはイオンミリングにより行い、該ミリング角度を5°以上40°以下に制御することで前記メッキ下地膜を前記主磁極層の側面に再付着させる垂直磁気記録ヘッドの主磁極形成方法。
- 請求項1または2記載の垂直磁気記録ヘッドの主磁極形成方法において、前記メッキ下地膜を再付着させる工程の後に、前記非磁性絶縁層をエッチングし、該非磁性絶縁層からの跳ね返りを、前記メッキ下地膜が付着している前記主磁極層の側面に再付着させる工程を有する垂直磁気記録ヘッドの主磁極形成方法。
- 請求項3記載の垂直磁気記録ヘッドの主磁極形成方法において、前記非磁性絶縁層のエッチングはイオンミリングにより行い、該ミリング角度を5°以上40°以下に制御することで前記非磁性絶縁層を前記主磁極層の側面に再付着させる垂直磁気記録ヘッドの主磁極形成方法。
- 非磁性絶縁層の上に、記録媒体との対向面から見た形状が該非磁性絶縁層側で幅狭の台形形状をなす主磁極層を形成する垂直磁気記録ヘッドの主磁極形成方法において、
前記非磁性絶縁層の上に、非磁性材料からなるメッキ下地膜を形成する工程と、
このメッキ下地膜の上に、前記台形形状の空間を有するレジストを形成する工程と、
このレジストによって形成された台形形状空間内に、主磁極層をメッキにより形成する工程と、
前記レジストを除去する工程と、
露出した台形形状をなす主磁極層の側面及び前記メッキ下地膜をエッチングし、記録トラック幅寸法を規定する工程と、
前記非磁性絶縁層をエッチングし、該非磁性絶縁層からの跳ね返りを前記主磁極層及び前記メッキ下地膜の側面に再付着させる工程と、
を有することを特徴とする垂直磁気記録ヘッドの主磁極形成方法。 - 請求項5記載の垂直磁気記録ヘッドの主磁極形成方法において、前記非磁性絶縁層のエッチングはイオンミリングにより行い、該ミリング角度を5°以上40°以下に制御することで前記非磁性絶縁層を前記主磁極層及び前記メッキ下地膜の側面に再付着させる垂直磁気記録ヘッドの主磁極形成方法。
- 請求項1ないし6のいずれか1項に記載の垂直磁気記録ヘッドの主磁極形成方法において、前記メッキ下地膜は、NiP、Au、NiW、NiMo、NiPd、NiCr、Pd、Cr、Cu、Ti及びTiNから選ばれる1種、または2種以上の非磁性材料により形成する垂直磁気記録ヘッドの主磁極形成方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006000236A JP2007184022A (ja) | 2006-01-04 | 2006-01-04 | 垂直磁気記録ヘッドの主磁極形成方法 |
US11/617,443 US7497009B2 (en) | 2006-01-04 | 2006-12-28 | Main pole forming method of perpendicular magnetic recording head |
Applications Claiming Priority (1)
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JP2006000236A JP2007184022A (ja) | 2006-01-04 | 2006-01-04 | 垂直磁気記録ヘッドの主磁極形成方法 |
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JP2007184022A true JP2007184022A (ja) | 2007-07-19 |
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JP2006000236A Pending JP2007184022A (ja) | 2006-01-04 | 2006-01-04 | 垂直磁気記録ヘッドの主磁極形成方法 |
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US (1) | US7497009B2 (ja) |
JP (1) | JP2007184022A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011023101A (ja) * | 2009-07-13 | 2011-02-03 | Seagate Technology Llc | トランスデューサおよびトランスデューサの製造方法 |
US8568908B2 (en) | 2006-09-15 | 2013-10-29 | Tdk Corporation | Method for manufacturing magnetic film and magnetic film |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
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KR100634540B1 (ko) * | 2005-03-24 | 2006-10-13 | 삼성전자주식회사 | 자기 기록 헤드 및 그 제조방법 |
JP2008226399A (ja) * | 2007-03-15 | 2008-09-25 | Tdk Corp | 垂直磁気記録ヘッド及びその製造方法 |
US8171618B1 (en) | 2009-06-17 | 2012-05-08 | Western Digital (Fremont), Llc | Tunable pole trim processes for fabricating trapezoidal perpendicular magnetic recording (PMR) write poles |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH06251334A (ja) | 1993-03-01 | 1994-09-09 | Matsushita Electric Ind Co Ltd | 浮動型薄膜磁気ヘッドの製造方法 |
US5438747A (en) | 1994-03-09 | 1995-08-08 | International Business Machines Corporation | Method of making a thin film merged MR head with aligned pole tips |
JPH08167131A (ja) | 1994-12-14 | 1996-06-25 | Hitachi Ltd | 薄膜磁気ヘッドの浮上面レールの形成方法並びに薄膜磁気ヘッド及び磁気ディスク装置 |
JP3593312B2 (ja) * | 2000-12-26 | 2004-11-24 | アルプス電気株式会社 | 垂直磁気記録ヘッドおよびその製造方法 |
JP3866512B2 (ja) | 2000-12-26 | 2007-01-10 | アルプス電気株式会社 | 垂直磁気記録ヘッドの製造方法 |
JP2003263705A (ja) | 2002-03-08 | 2003-09-19 | Hitachi Ltd | 垂直記録用磁気ヘッドおよびそれを搭載した磁気ディスク装置 |
JP3735328B2 (ja) | 2002-08-19 | 2006-01-18 | アルプス電気株式会社 | 垂直磁気記録薄膜ヘッドの主磁極の形成方法 |
JP4032030B2 (ja) | 2004-02-20 | 2008-01-16 | アルプス電気株式会社 | 磁気ヘッドの製造方法 |
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2006
- 2006-01-04 JP JP2006000236A patent/JP2007184022A/ja active Pending
- 2006-12-28 US US11/617,443 patent/US7497009B2/en not_active Expired - Fee Related
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8568908B2 (en) | 2006-09-15 | 2013-10-29 | Tdk Corporation | Method for manufacturing magnetic film and magnetic film |
JP2011023101A (ja) * | 2009-07-13 | 2011-02-03 | Seagate Technology Llc | トランスデューサおよびトランスデューサの製造方法 |
JP2014238911A (ja) * | 2009-07-13 | 2014-12-18 | シーゲイト テクノロジー エルエルシー | トランスデューサおよびトランスデューサの製造方法 |
US9058823B2 (en) | 2009-07-13 | 2015-06-16 | Seagate Technology Llc | Protected transducer for dead layer reduction |
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US7497009B2 (en) | 2009-03-03 |
US20070151095A1 (en) | 2007-07-05 |
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