JP2005055798A5 - - Google Patents

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Publication number
JP2005055798A5
JP2005055798A5 JP2003288567A JP2003288567A JP2005055798A5 JP 2005055798 A5 JP2005055798 A5 JP 2005055798A5 JP 2003288567 A JP2003288567 A JP 2003288567A JP 2003288567 A JP2003288567 A JP 2003288567A JP 2005055798 A5 JP2005055798 A5 JP 2005055798A5
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JP
Japan
Prior art keywords
optical
substrate
optical member
exposure apparatus
member according
Prior art date
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Granted
Application number
JP2003288567A
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English (en)
Japanese (ja)
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JP4336545B2 (ja
JP2005055798A (ja
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Priority to JP2003288567A priority Critical patent/JP4336545B2/ja
Priority claimed from JP2003288567A external-priority patent/JP4336545B2/ja
Publication of JP2005055798A publication Critical patent/JP2005055798A/ja
Publication of JP2005055798A5 publication Critical patent/JP2005055798A5/ja
Application granted granted Critical
Publication of JP4336545B2 publication Critical patent/JP4336545B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2003288567A 2003-08-07 2003-08-07 光学部材、当該光学部材を有する照明装置及び露光装置 Expired - Fee Related JP4336545B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003288567A JP4336545B2 (ja) 2003-08-07 2003-08-07 光学部材、当該光学部材を有する照明装置及び露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003288567A JP4336545B2 (ja) 2003-08-07 2003-08-07 光学部材、当該光学部材を有する照明装置及び露光装置

Publications (3)

Publication Number Publication Date
JP2005055798A JP2005055798A (ja) 2005-03-03
JP2005055798A5 true JP2005055798A5 (enExample) 2006-09-07
JP4336545B2 JP4336545B2 (ja) 2009-09-30

Family

ID=34367179

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003288567A Expired - Fee Related JP4336545B2 (ja) 2003-08-07 2003-08-07 光学部材、当該光学部材を有する照明装置及び露光装置

Country Status (1)

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JP (1) JP4336545B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4760198B2 (ja) * 2005-08-01 2011-08-31 ソニー株式会社 露光用マスク、露光用マスクの設計方法および露光用マスクの設計プログラム
JP2007279458A (ja) * 2006-04-07 2007-10-25 Miraial Kk サブ波長格子光学素子
JP4384259B2 (ja) 2007-07-23 2009-12-16 パナソニック株式会社 保護膜付きレンズ及びその製造方法
JP2014197166A (ja) * 2013-03-07 2014-10-16 セイコーエプソン株式会社 光学素子、光学素子の製造方法およびプロジェクター

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0241613Y2 (enExample) * 1979-02-01 1990-11-06
JPS60232552A (ja) * 1984-05-02 1985-11-19 Canon Inc 照明光学系
US4709066A (en) * 1985-07-15 1987-11-24 Fused Kontacts Of Chicago Acrylic silicate compositions and methods and highly oxygen-permeable polyacrylates made therefrom
JPS62118379A (ja) * 1985-11-19 1987-05-29 Fujitsu Ltd ホログラムの作成方法
JPH07104563B2 (ja) * 1986-09-24 1995-11-13 株式会社ニコン 露光装置用照明光学装置
JPH0451201A (ja) * 1990-06-19 1992-02-19 Canon Inc 透過型回折格子及び該回折格子を用いたエンコーダ
US5417743A (en) * 1994-01-21 1995-05-23 W. L. Gore & Associates, Inc. Self-adhesive vent filter and adsorbent assembly with a diffusion tube
JP2873573B2 (ja) * 1997-01-13 1999-03-24 協和電機化学株式会社 プロジェクションテレビ用スクリーン板
JP2000147227A (ja) * 1998-11-04 2000-05-26 Canon Inc 回折光学素子及びそれを用いた光学系
JP2000274532A (ja) * 1999-03-25 2000-10-03 Canon Inc シールド方法及び保持方法
JP3335134B2 (ja) * 1999-03-25 2002-10-15 キヤノン株式会社 光学素子
JP2002268147A (ja) * 2001-03-07 2002-09-18 Toppan Printing Co Ltd 透過型スクリーンおよび画像表示装置
JP2002025933A (ja) * 2001-04-04 2002-01-25 Sumitomo Heavy Ind Ltd ビームホモジナイザ及び半導体薄膜作製方法

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