JP2005055798A5 - - Google Patents
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- JP2005055798A5 JP2005055798A5 JP2003288567A JP2003288567A JP2005055798A5 JP 2005055798 A5 JP2005055798 A5 JP 2005055798A5 JP 2003288567 A JP2003288567 A JP 2003288567A JP 2003288567 A JP2003288567 A JP 2003288567A JP 2005055798 A5 JP2005055798 A5 JP 2005055798A5
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- JP
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- Prior art keywords
- optical
- substrate
- optical member
- exposure apparatus
- member according
- Prior art date
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Claims (14)
前記光束を透過する透過部を有し、前記基板を収納する保護部材とを有し、
前記保護部材は、前記基板と共同して前記光学素子部が形成された面を内包する空間を形成することを特徴とする光学部材。 A substrate on which an optical element portion having an optical effect on an incident light beam is directly formed;
They have a transmission unit for transmitting the light beams, have a protective member for accommodating the substrate,
The protective member forms a space including a surface on which the optical element portion is formed in cooperation with the substrate .
両端に位置する前記基板が前記複数の光学素子部を対向させて配置されていることを特徴とする請求項１記載の光学部材。 The optical member has a plurality of the substrates,
The optical member according to claim 1, wherein the substrates positioned at both ends are arranged with the plurality of optical element portions facing each other.
前記光束に対して光軸と垂直な面内にある第１の方向にのみ屈折作用を有する第１の光学素子部を一面に直接形成した第１の基板と、
前記光束に対して前記光軸と垂直な面内にあり前記第１の方向と直交する第２の方向にのみ屈折作用を有する第２の光学素子部を一面に直接形成した第２の基板とを有することを特徴とする請求項１記載の光学部材。 The optical member has a plurality of the substrates, and the plurality of substrates are:
A first substrate in which a first optical element portion having a refractive action only in a first direction lying in a plane perpendicular to the optical axis with respect to the luminous flux is directly formed on one surface;
A second substrate in which a second optical element portion that is in a plane perpendicular to the optical axis with respect to the light beam and has a refractive action only in a second direction orthogonal to the first direction is directly formed on one surface; The optical member according to claim 1, comprising:
前記光束を用いて被照明面を照明する照明光学系とを有し、
前記照明光学系は、請求項１乃至７のうちいずれか一項記載の光学部材を含むことを特徴とする照明装置。 A light source that emits a luminous flux;
An illumination optical system that illuminates the surface to be illuminated using the luminous flux,
The illumination optical system includes the optical member according to any one of claims 1 to 7 .
前記照明光学系により照明されたレチクル及び／又はマスクに形成されたパターンを被処理体に投影する投影光学系とを有することを特徴とする露光装置。 An illumination optical system including an optical member according to any one of claims 1 to 7 , while illuminating a surface to be illuminated with a light beam emitted from a light source;
An exposure apparatus comprising: a projection optical system that projects a pattern formed on a reticle and / or mask illuminated by the illumination optical system onto an object to be processed.
露光された前記被処理体を現像するステップとを有することを特徴とするデバイス製造方法。 Exposing the object to be processed using the exposure apparatus according to any one of claims 9 to 13 ,
And developing the exposed object to be processed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003288567A JP4336545B2 (en) | 2003-08-07 | 2003-08-07 | Optical member, illumination apparatus and exposure apparatus having the optical member |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003288567A JP4336545B2 (en) | 2003-08-07 | 2003-08-07 | Optical member, illumination apparatus and exposure apparatus having the optical member |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005055798A JP2005055798A (en) | 2005-03-03 |
| JP2005055798A5 true JP2005055798A5 (en) | 2006-09-07 |
| JP4336545B2 JP4336545B2 (en) | 2009-09-30 |
Family
ID=34367179
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003288567A Expired - Fee Related JP4336545B2 (en) | 2003-08-07 | 2003-08-07 | Optical member, illumination apparatus and exposure apparatus having the optical member |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4336545B2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4760198B2 (en) * | 2005-08-01 | 2011-08-31 | ソニー株式会社 | Exposure mask, exposure mask design method, and exposure mask design program |
| JP2007279458A (en) * | 2006-04-07 | 2007-10-25 | Miraial Kk | Sub-wavelength grating optical element |
| JP4384259B2 (en) | 2007-07-23 | 2009-12-16 | パナソニック株式会社 | Lens with protective film and method for manufacturing the same |
| JP2014197166A (en) * | 2013-03-07 | 2014-10-16 | セイコーエプソン株式会社 | Optical element, method for manufacturing optical element, and projector |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0241613Y2 (en) * | 1979-02-01 | 1990-11-06 | ||
| JPS60232552A (en) * | 1984-05-02 | 1985-11-19 | Canon Inc | Lighting optical system |
| US4709066A (en) * | 1985-07-15 | 1987-11-24 | Fused Kontacts Of Chicago | Acrylic silicate compositions and methods and highly oxygen-permeable polyacrylates made therefrom |
| JPS62118379A (en) * | 1985-11-19 | 1987-05-29 | Fujitsu Ltd | Formation of hologram |
| JPH07104563B2 (en) * | 1986-09-24 | 1995-11-13 | 株式会社ニコン | Illumination optical device for exposure equipment |
| JPH0451201A (en) * | 1990-06-19 | 1992-02-19 | Canon Inc | Transmission type diffraction grating and encoder formed by using this diffraction grating |
| US5417743A (en) * | 1994-01-21 | 1995-05-23 | W. L. Gore & Associates, Inc. | Self-adhesive vent filter and adsorbent assembly with a diffusion tube |
| JP2873573B2 (en) * | 1997-01-13 | 1999-03-24 | 協和電機化学株式会社 | Screen plate for projection television |
| JP2000147227A (en) * | 1998-11-04 | 2000-05-26 | Canon Inc | Diffraction optical element and optical system using same |
| JP2000274532A (en) * | 1999-03-25 | 2000-10-03 | Canon Inc | Shielding method and holding method |
| JP3335134B2 (en) * | 1999-03-25 | 2002-10-15 | キヤノン株式会社 | Optical element |
| JP2002268147A (en) * | 2001-03-07 | 2002-09-18 | Toppan Printing Co Ltd | Translucent type screen and image display device |
| JP2002025933A (en) * | 2001-04-04 | 2002-01-25 | Sumitomo Heavy Ind Ltd | Beam homogenizer and semiconductor thin film generating method |
-
2003
- 2003-08-07 JP JP2003288567A patent/JP4336545B2/en not_active Expired - Fee Related
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