JP2005030506A - サックバックバルブ - Google Patents
サックバックバルブ Download PDFInfo
- Publication number
- JP2005030506A JP2005030506A JP2003271323A JP2003271323A JP2005030506A JP 2005030506 A JP2005030506 A JP 2005030506A JP 2003271323 A JP2003271323 A JP 2003271323A JP 2003271323 A JP2003271323 A JP 2003271323A JP 2005030506 A JP2005030506 A JP 2005030506A
- Authority
- JP
- Japan
- Prior art keywords
- piston
- valve
- suck back
- integrally
- cylinder chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 claims abstract description 37
- 238000009434 installation Methods 0.000 abstract description 7
- 238000009826 distribution Methods 0.000 abstract description 2
- 239000007788 liquid Substances 0.000 description 27
- 239000011248 coating agent Substances 0.000 description 23
- 238000000576 coating method Methods 0.000 description 23
- 239000004065 semiconductor Substances 0.000 description 13
- 238000001514 detection method Methods 0.000 description 12
- 230000003028 elevating effect Effects 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 5
- 238000012856 packing Methods 0.000 description 4
- 238000004891 communication Methods 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K23/00—Valves for preventing drip from nozzles
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/32—Details
- F16K1/34—Cutting-off parts, e.g. valve members, seats
- F16K1/36—Valve members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/32—Details
- F16K1/34—Cutting-off parts, e.g. valve members, seats
- F16K1/42—Valve seats
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/02—Construction of housing; Use of materials therefor of lift valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
- F16K31/1225—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston with a plurality of pistons
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Fluid-Driven Valves (AREA)
- Details Of Reciprocating Pumps (AREA)
- Coating Apparatus (AREA)
Abstract
【解決手段】第1シリンダ室60内に供給される圧力流体の作用下に第1ピストン48と一体的に弁部材50を変位させることにより、流体通路34を開閉するオン/オフ弁機構26と、流通室96が内部に形成された変形自在な吸引部材92を有し、第2シリンダ室80に供給される圧力流体の作用下に第2ピストン74と一体的に前記吸引部材92を変位させて流体通路34内の圧力流体を吸引するサックバック機構28とを備え、前記オン/オフ弁機構26と前記サックバック機構28とは、同軸状に一体的に組み付けられて設けられる。
【選択図】図1
Description
第1パイロットポートを介して第1シリンダ室内に供給される圧力流体の作用下に第1ピストンと一体的に弁部材を変位させることにより、前記流体通路を開閉するオン/オフ弁機構と、
流通室が内部に形成された変形自在な吸引部材を有し、第2パイロットポートを介して第2シリンダ室に供給される圧力流体の作用下に第2ピストンと一体的に前記吸引部材を変位させて流体通路内の圧力流体を吸引するサックバック機構と、
を備え、
前記オン/オフ弁機構と前記サックバック機構とは、同軸状に一体的に組み付けられて設けられることを特徴とする。
26…オン/オフ弁機構 28…サックバック機構
30…弁駆動部 32a、32b…ポート
34…流体通路 48、74…ピストン
48a…拡径部 48b…筒状部
48c…環状段部 50…弁部材
50a…円筒部 50b…当接部
50c…薄肉部 50d…挟持部
58…貫通孔 60、80…シリンダ室
62、82…パイロットポート 66…着座部
70、78…コイルスプリング 74a、74b…ロッド部
74c…大径部 92…吸引部材
94…保護リング 96…流通室
Claims (2)
- 一端部に形成された第1ポートと他端部に形成された第2ポートとを連通させる流体通路が設けられた本体部と、
第1パイロットポートを介して第1シリンダ室内に供給される圧力流体の作用下に第1ピストンと一体的に弁部材を変位させることにより、前記流体通路を開閉するオン/オフ弁機構と、
流通室が内部に形成された変形自在な吸引部材を有し、第2パイロットポートを介して第2シリンダ室に供給される圧力流体の作用下に第2ピストンと一体的に前記吸引部材を変位させて流体通路内の圧力流体を吸引するサックバック機構と、
を備え、
前記オン/オフ弁機構と前記サックバック機構とは、同軸状に一体的に組み付けられて設けられることを特徴とするサックバックバルブ。 - 請求項1記載のサックバックバルブにおいて、
前記第1ピストンには軸線方向に沿って延在する貫通孔が形成され、前記貫通孔には第2ピストンの一部が内装され、第1シリンダ室内に供給される圧力流体の作用下に第1ピストンおよび第2ピストンが一体的に上昇し、一方、第2シリンダ室内に供給される圧力流体の作用下に第2ピストンのみが上昇するように設けられることを特徴とするサックバックバルブ。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003271323A JP4035728B2 (ja) | 2003-07-07 | 2003-07-07 | サックバックバルブ |
TW093119384A TWI249011B (en) | 2003-07-07 | 2004-06-30 | Suck back valve |
US10/882,228 US7143956B2 (en) | 2003-07-07 | 2004-07-02 | Suck back valve |
DE102004032273.2A DE102004032273B4 (de) | 2003-07-07 | 2004-07-02 | Rücksaugventil |
KR1020040052712A KR100552137B1 (ko) | 2003-07-07 | 2004-07-07 | 흡인 밸브 |
CNB2004100637694A CN1320299C (zh) | 2003-07-07 | 2004-07-07 | 回吸阀 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003271323A JP4035728B2 (ja) | 2003-07-07 | 2003-07-07 | サックバックバルブ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005030506A true JP2005030506A (ja) | 2005-02-03 |
JP4035728B2 JP4035728B2 (ja) | 2008-01-23 |
Family
ID=33562648
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003271323A Expired - Lifetime JP4035728B2 (ja) | 2003-07-07 | 2003-07-07 | サックバックバルブ |
Country Status (6)
Country | Link |
---|---|
US (1) | US7143956B2 (ja) |
JP (1) | JP4035728B2 (ja) |
KR (1) | KR100552137B1 (ja) |
CN (1) | CN1320299C (ja) |
DE (1) | DE102004032273B4 (ja) |
TW (1) | TWI249011B (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2019217494A (ja) * | 2018-06-21 | 2019-12-26 | ズス・マイクロテック・リソグラフィ・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツングSuss MicroTec Lithography GmbH | コーティング用分配ノズル |
Families Citing this family (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006010037A (ja) * | 2004-06-29 | 2006-01-12 | Smc Corp | サックバックバルブ |
JP2006010038A (ja) * | 2004-06-29 | 2006-01-12 | Smc Corp | サックバックバルブ |
US7677527B2 (en) * | 2005-03-04 | 2010-03-16 | Parker-Hannifin Corporation | Dual position pilot operated valve assembly |
US7703744B2 (en) * | 2007-03-03 | 2010-04-27 | Freudenberg-Nok General Partnership | Core push-in seal |
JP5009107B2 (ja) * | 2007-09-12 | 2012-08-22 | サーパス工業株式会社 | サックバックバルブ |
JP5301805B2 (ja) * | 2007-10-17 | 2013-09-25 | サーパス工業株式会社 | サックバックバルブシステム及びその閉弁動作制御方法 |
DE102008028772A1 (de) | 2008-06-17 | 2009-12-24 | Hansen, Bernd, Dipl.-Ing. | Vorrichtung zum Befüllen von Behältnissen |
US8186370B2 (en) * | 2008-10-15 | 2012-05-29 | Freudenberg-Nok General Partnership | Solenoid plunger core seal |
CN102470282B (zh) | 2009-09-30 | 2013-02-13 | Ckd株式会社 | 液体汽化系统 |
US9145978B2 (en) | 2009-11-23 | 2015-09-29 | Parker Hannifin Corporation | Adjustable fail-safe suction stop valve |
TWI448630B (zh) * | 2010-06-30 | 2014-08-11 | Kayaba Industry Co Ltd | Decay valve |
IT1401635B1 (it) * | 2010-08-04 | 2013-07-26 | Uster Di Pellin Mario & C S N C | Valvola a membrana. |
JP5810101B2 (ja) | 2011-01-19 | 2015-11-11 | Ckd株式会社 | 液体気化器 |
DE102011101978B3 (de) * | 2011-05-19 | 2012-11-08 | Eisenmann Ag | Ventil |
KR101892758B1 (ko) | 2011-09-30 | 2018-10-04 | 시케이디 가부시키가이샤 | 액체 제어 장치 |
JP5989944B2 (ja) | 2011-09-30 | 2016-09-07 | Ckd株式会社 | 液体制御装置 |
JP5642760B2 (ja) * | 2011-12-02 | 2014-12-17 | Ckd株式会社 | 流体制御弁 |
JP5973178B2 (ja) * | 2012-02-01 | 2016-08-23 | Ckd株式会社 | 液体制御装置 |
EP2672155B1 (en) * | 2012-06-07 | 2015-03-25 | Alfa Laval Corporate AB | Actuator for a valve and a valve comprising such actuator |
JP5919115B2 (ja) | 2012-07-12 | 2016-05-18 | Ckd株式会社 | 液体制御装置、及び液体制御装置に適用される網状体組立体 |
CN102913634B (zh) * | 2012-10-31 | 2014-05-14 | 海门市油威力液压工业有限责任公司 | 大流量数字双闭环二通插装式比例节流阀 |
JP6749316B2 (ja) | 2014-09-09 | 2020-09-02 | プロテウス・インダストリーズ・インコーポレーテッド | 冷却液引き戻しのためのシステムおよび方法 |
US9694374B2 (en) | 2014-09-19 | 2017-07-04 | Dab-O-Matic Holdings Company | Suck-back liquid dispensing valve and valve assembly |
WO2016044761A1 (en) * | 2014-09-19 | 2016-03-24 | Dab-O-Matic Holdings Company | Improved suck-back liquid dispensing valve and valve assembly |
JP6384246B2 (ja) * | 2014-10-02 | 2018-09-05 | 株式会社Ihi | 空圧作動バルブ |
NO342848B1 (en) * | 2015-04-27 | 2018-08-20 | Aker Solutions As | A fail safe hydraulic actuator |
CN105123661A (zh) * | 2015-10-08 | 2015-12-09 | 上海曼孚机电控制工程有限公司 | 防滴阀 |
DE102017122006A1 (de) | 2017-09-22 | 2019-03-28 | Gemü Gebr. Müller Apparatebau Gmbh & Co. Kommanditgesellschaft | Anordnung mit einer Ventileinheit, einer Rücksaugeinheit und einem Ventilkörper |
JP7300710B2 (ja) * | 2019-05-10 | 2023-06-30 | サーパス工業株式会社 | サックバックバルブ |
DE102022121353B4 (de) | 2022-08-24 | 2024-03-28 | Dr. Ing. H.C. F. Porsche Aktiengesellschaft | Injektionsanordnung zur Zuführung von viskosem Füllmaterial sowie Verfahren zur Injektion |
DE102022121354A1 (de) | 2022-08-24 | 2024-02-29 | Dr. Ing. H.C. F. Porsche Aktiengesellschaft | Injektionsanordnung zur Zuführung von viskosem Füllmaterial sowie Verfahren zur Injektion |
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JP3940853B2 (ja) | 1997-03-11 | 2007-07-04 | Smc株式会社 | サックバックバルブ |
JP4035666B2 (ja) | 1997-03-14 | 2008-01-23 | Smc株式会社 | サックバックバルブ |
JP4035667B2 (ja) | 1997-03-18 | 2008-01-23 | Smc株式会社 | サックバックバルブ |
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JP3940854B2 (ja) | 1997-03-25 | 2007-07-04 | Smc株式会社 | サックバックバルブ |
JP3952321B2 (ja) | 1997-04-07 | 2007-08-01 | Smc株式会社 | サックバックバルブ |
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JP3997535B2 (ja) | 1998-08-31 | 2007-10-24 | Smc株式会社 | サックバックバルブ |
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JP2002139161A (ja) * | 2000-11-06 | 2002-05-17 | Smc Corp | 二方弁 |
JP3825342B2 (ja) | 2002-03-06 | 2006-09-27 | Smc株式会社 | サックバックバルブ |
-
2003
- 2003-07-07 JP JP2003271323A patent/JP4035728B2/ja not_active Expired - Lifetime
-
2004
- 2004-06-30 TW TW093119384A patent/TWI249011B/zh not_active IP Right Cessation
- 2004-07-02 DE DE102004032273.2A patent/DE102004032273B4/de not_active Expired - Lifetime
- 2004-07-02 US US10/882,228 patent/US7143956B2/en not_active Expired - Lifetime
- 2004-07-07 CN CNB2004100637694A patent/CN1320299C/zh not_active Expired - Lifetime
- 2004-07-07 KR KR1020040052712A patent/KR100552137B1/ko active IP Right Grant
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2019217494A (ja) * | 2018-06-21 | 2019-12-26 | ズス・マイクロテック・リソグラフィ・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツングSuss MicroTec Lithography GmbH | コーティング用分配ノズル |
Also Published As
Publication number | Publication date |
---|---|
US20050006609A1 (en) | 2005-01-13 |
CN1320299C (zh) | 2007-06-06 |
US7143956B2 (en) | 2006-12-05 |
DE102004032273B4 (de) | 2015-09-24 |
CN1576671A (zh) | 2005-02-09 |
KR100552137B1 (ko) | 2006-02-14 |
TWI249011B (en) | 2006-02-11 |
DE102004032273A1 (de) | 2005-02-24 |
KR20050006072A (ko) | 2005-01-15 |
TW200506255A (en) | 2005-02-16 |
JP4035728B2 (ja) | 2008-01-23 |
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