JP2004531711A5 - - Google Patents

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Publication number
JP2004531711A5
JP2004531711A5 JP2002577538A JP2002577538A JP2004531711A5 JP 2004531711 A5 JP2004531711 A5 JP 2004531711A5 JP 2002577538 A JP2002577538 A JP 2002577538A JP 2002577538 A JP2002577538 A JP 2002577538A JP 2004531711 A5 JP2004531711 A5 JP 2004531711A5
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JP
Japan
Prior art keywords
hermetic sealing
sealing member
measurement method
wall portions
substrate
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JP2002577538A
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English (en)
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JP4209194B2 (ja
JP2004531711A (ja
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Priority claimed from PCT/IB2002/000754 external-priority patent/WO2002079757A2/en
Publication of JP2004531711A publication Critical patent/JP2004531711A/ja
Publication of JP2004531711A5 publication Critical patent/JP2004531711A5/ja
Application granted granted Critical
Publication of JP4209194B2 publication Critical patent/JP4209194B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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基板１を、封止部材４を設けた蓋３上に上下逆に配置する。封止を良好なものとするために、銅重り１０をアセンブリの頂部に配置し、このアセンブリ全体を加熱板１１上で１００℃で１５分間加熱する。基板が銅重りに貼りつくのを防止するために、テフロン（登録商標）のスペーサを一時的に挿入することができる。上述した構成は、単なる一例であり、使用する材料に応じて異なるものとすることができることは明らかである。

Claims (1)

  1. 請求項１又は２に記載の測定方法において、前記ハーメチック封止を、少なくとも２つの壁部を有するハーメチック封止部材により行うようにする測定方法。
JP2002577538A 2001-03-29 2002-03-13 浸透率の測定及び検査方法並びに測定及び検査装置 Expired - Fee Related JP4209194B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP01201229 2001-03-29
EP02075202 2002-01-17
PCT/IB2002/000754 WO2002079757A2 (en) 2001-03-29 2002-03-13 Method and device for measuring a permeation rate

Publications (3)

Publication Number Publication Date
JP2004531711A JP2004531711A (ja) 2004-10-14
JP2004531711A5 true JP2004531711A5 (ja) 2005-06-09
JP4209194B2 JP4209194B2 (ja) 2009-01-14

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ID=26076870

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002577538A Expired - Fee Related JP4209194B2 (ja) 2001-03-29 2002-03-13 浸透率の測定及び検査方法並びに測定及び検査装置

Country Status (8)

Country Link
US (2) US6993956B2 (ja)
EP (1) EP1373861A2 (ja)
JP (1) JP4209194B2 (ja)
KR (1) KR100859818B1 (ja)
CN (1) CN1242250C (ja)
AU (1) AU2002237478A1 (ja)
TW (1) TWI229733B (ja)
WO (1) WO2002079757A2 (ja)

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