JP2004527972A5 - - Google Patents
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- Publication number
- JP2004527972A5 JP2004527972A5 JP2002591547A JP2002591547A JP2004527972A5 JP 2004527972 A5 JP2004527972 A5 JP 2004527972A5 JP 2002591547 A JP2002591547 A JP 2002591547A JP 2002591547 A JP2002591547 A JP 2002591547A JP 2004527972 A5 JP2004527972 A5 JP 2004527972A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- ion beam
- thickness
- natural frequency
- resonance circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 51
- 238000000034 method Methods 0.000 claims description 50
- 238000005530 etching Methods 0.000 claims description 11
- 238000009826 distribution Methods 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 6
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 4
- 239000003990 capacitor Substances 0.000 claims description 4
- 229910052786 argon Inorganic materials 0.000 claims description 2
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 description 12
- 239000002184 metal Substances 0.000 description 12
- 238000004519 manufacturing process Methods 0.000 description 10
- 238000010586 diagram Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 239000012528 membrane Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000002848 electrochemical method Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000009897 systematic effect Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/EP2001/005889 WO2002095085A1 (de) | 2001-05-22 | 2001-05-22 | Frequenzabgleich für bulk-acoustic-wave resonatoren durch lokales ionenstrahlätzen |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007041493A Division JP2007209000A (ja) | 2007-02-21 | 2007-02-21 | 所定の層の厚さ特性を有する層の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2004527972A JP2004527972A (ja) | 2004-09-09 |
| JP2004527972A5 true JP2004527972A5 (enExample) | 2006-10-12 |
Family
ID=8164429
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002591547A Pending JP2004527972A (ja) | 2001-05-22 | 2001-05-22 | 所定の層の厚さ特性を有する層の製造方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20040212459A1 (enExample) |
| EP (2) | EP1390559B1 (enExample) |
| JP (1) | JP2004527972A (enExample) |
| KR (1) | KR20040005977A (enExample) |
| DE (2) | DE50112976D1 (enExample) |
| WO (1) | WO2002095085A1 (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102004054895B4 (de) * | 2004-11-12 | 2007-04-19 | Infineon Technologies Ag | Dünnschicht-BAW-Filter sowie Verfahren zur Herstellung eines Dünnschicht-BAW-Filters |
| JP2008098528A (ja) * | 2006-10-13 | 2008-04-24 | Toshiba Corp | 半導体装置の製造方法 |
| US7535324B2 (en) * | 2007-06-15 | 2009-05-19 | Avago Technologies Wireless Ip, Pte. Ltd. | Piezoelectric resonator structure and method for manufacturing a coupled resonator device |
| FR2941878B1 (fr) * | 2009-02-10 | 2011-05-06 | Quertech Ingenierie | Procede de traitement par un faisceau d'ions d'une couche metallique deposee sur un substrat |
| US8479363B2 (en) * | 2010-05-11 | 2013-07-09 | Hao Zhang | Methods for wafer level trimming of acoustically coupled resonator filter |
| JP6719178B2 (ja) * | 2015-05-22 | 2020-07-08 | エスアイアイ・クリスタルテクノロジー株式会社 | 圧電振動片の製造方法及び圧電振動子の製造方法 |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2877338A (en) * | 1954-10-22 | 1959-03-10 | James Knights Company | Method of adjusting the operating frequency of sealed piezoelectric crystals |
| US3699334A (en) * | 1969-06-16 | 1972-10-17 | Kollsman Instr Corp | Apparatus using a beam of positive ions for controlled erosion of surfaces |
| FR2354617A1 (fr) * | 1976-06-08 | 1978-01-06 | Electro Resistance | Procede pour la fabrication de resistances electriques a partir de feuilles ou de films metalliques et resistances obtenues |
| JPS58106750A (ja) * | 1981-12-18 | 1983-06-25 | Toshiba Corp | フオ−カスイオンビ−ム加工方法 |
| JPS6042832A (ja) * | 1983-08-18 | 1985-03-07 | Matsushita Electric Ind Co Ltd | イオンビ−ム装置 |
| JPS61137327A (ja) * | 1984-12-10 | 1986-06-25 | Nec Corp | 層間絶縁膜のエツチング方法 |
| CA1252581A (en) * | 1985-05-28 | 1989-04-11 | Yoshinobu Aoyagi | Electron beam-excited ion beam source |
| JP2713923B2 (ja) * | 1987-10-07 | 1998-02-16 | 株式会社日立製作所 | 集束イオンビームを用いたデバイス加工方法 |
| JPH04196610A (ja) * | 1990-11-26 | 1992-07-16 | Seiko Epson Corp | 圧電振動子の周波数調整方法 |
| US5266529A (en) * | 1991-10-21 | 1993-11-30 | Trw Inc. | Focused ion beam for thin film resistor trim on aluminum nitride substrates |
| JPH0773834A (ja) * | 1993-08-31 | 1995-03-17 | Nippon Steel Corp | 透過電子顕微鏡用薄膜試料作製方法 |
| US5876860A (en) * | 1997-12-09 | 1999-03-02 | N.V. Interturbine | Thermal barrier coating ceramic structure |
| JP3473538B2 (ja) * | 1999-05-14 | 2003-12-08 | 株式会社村田製作所 | 圧電部品の周波数調整装置及び周波数調整方法 |
| US6529311B1 (en) * | 1999-10-28 | 2003-03-04 | The Trustees Of Boston University | MEMS-based spatial-light modulator with integrated electronics |
| US6307447B1 (en) * | 1999-11-01 | 2001-10-23 | Agere Systems Guardian Corp. | Tuning mechanical resonators for electrical filter |
| JP4902088B2 (ja) * | 2000-07-10 | 2012-03-21 | ティーイーエル エピオン インク． | ガスクラスターイオンビーム処理による薄膜を改良するためのシステムおよび方法 |
| US6456173B1 (en) * | 2001-02-15 | 2002-09-24 | Nokia Mobile Phones Ltd. | Method and system for wafer-level tuning of bulk acoustic wave resonators and filters |
| US6456011B1 (en) * | 2001-02-23 | 2002-09-24 | Front Range Fakel, Inc. | Magnetic field for small closed-drift ion source |
| US6874211B2 (en) * | 2001-03-05 | 2005-04-05 | Agilent Technologies, Inc. | Method for producing thin film bulk acoustic resonators (FBARs) with different frequencies on the same substrate by subtracting method and apparatus embodying the method |
| US6441702B1 (en) * | 2001-04-27 | 2002-08-27 | Nokia Mobile Phones Ltd. | Method and system for wafer-level tuning of bulk acoustic wave resonators and filters |
-
2001
- 2001-05-22 DE DE50112976T patent/DE50112976D1/de not_active Expired - Lifetime
- 2001-05-22 JP JP2002591547A patent/JP2004527972A/ja active Pending
- 2001-05-22 KR KR10-2003-7015186A patent/KR20040005977A/ko not_active Ceased
- 2001-05-22 EP EP01962685A patent/EP1390559B1/de not_active Expired - Lifetime
- 2001-05-22 EP EP07008531A patent/EP1816233B1/de not_active Expired - Lifetime
- 2001-05-22 US US10/478,751 patent/US20040212459A1/en not_active Abandoned
- 2001-05-22 WO PCT/EP2001/005889 patent/WO2002095085A1/de not_active Ceased
- 2001-05-22 DE DE50114591T patent/DE50114591D1/de not_active Expired - Lifetime
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