JP2004522302A5 - - Google Patents

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Publication number
JP2004522302A5
JP2004522302A5 JP2002584378A JP2002584378A JP2004522302A5 JP 2004522302 A5 JP2004522302 A5 JP 2004522302A5 JP 2002584378 A JP2002584378 A JP 2002584378A JP 2002584378 A JP2002584378 A JP 2002584378A JP 2004522302 A5 JP2004522302 A5 JP 2004522302A5
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JP
Japan
Prior art keywords
oxygen
hydrogen
process gas
combustion chamber
enriched
Prior art date
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Granted
Application number
JP2002584378A
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English (en)
Japanese (ja)
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JP2004522302A (ja
JP4276845B2 (ja
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Publication date
Priority claimed from DE10119741A external-priority patent/DE10119741B4/de
Application filed filed Critical
Publication of JP2004522302A publication Critical patent/JP2004522302A/ja
Publication of JP2004522302A5 publication Critical patent/JP2004522302A5/ja
Application granted granted Critical
Publication of JP4276845B2 publication Critical patent/JP4276845B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2002584378A 2001-04-23 2002-04-19 基板を処理するための方法及び装置 Expired - Fee Related JP4276845B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10119741A DE10119741B4 (de) 2001-04-23 2001-04-23 Verfahren und Vorrichtung zum Behandeln von Halbleitersubstraten
PCT/EP2002/004345 WO2002086958A1 (de) 2001-04-23 2002-04-19 Verfahren und vorrichtung zum erzeugen von prozessgasen

Publications (3)

Publication Number Publication Date
JP2004522302A JP2004522302A (ja) 2004-07-22
JP2004522302A5 true JP2004522302A5 (https=) 2006-01-05
JP4276845B2 JP4276845B2 (ja) 2009-06-10

Family

ID=7682338

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002584378A Expired - Fee Related JP4276845B2 (ja) 2001-04-23 2002-04-19 基板を処理するための方法及び装置

Country Status (7)

Country Link
US (1) US7144826B2 (https=)
EP (1) EP1382063A1 (https=)
JP (1) JP4276845B2 (https=)
KR (1) KR100700240B1 (https=)
DE (1) DE10119741B4 (https=)
TW (1) TW588419B (https=)
WO (1) WO2002086958A1 (https=)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
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KR100966086B1 (ko) * 2005-03-08 2010-06-28 가부시키가이샤 히다치 고쿠사이 덴키 반도체장치의 제조 방법 및 기판처리장치
JP4453021B2 (ja) * 2005-04-01 2010-04-21 セイコーエプソン株式会社 半導体装置の製造方法及び半導体製造装置
GB0613044D0 (en) * 2006-06-30 2006-08-09 Boc Group Plc Gas combustion apparatus
US20080257719A1 (en) * 2007-04-21 2008-10-23 Ted Suratt Apparatus And Method For Making Flammable Gas
US9698439B2 (en) 2008-02-19 2017-07-04 Proton Power, Inc. Cellulosic biomass processing for hydrogen extraction
US8303676B1 (en) 2008-02-19 2012-11-06 Proton Power, Inc. Conversion of C-O-H compounds into hydrogen for power or heat generation
US9023243B2 (en) 2012-08-27 2015-05-05 Proton Power, Inc. Methods, systems, and devices for synthesis gas recapture
US10005961B2 (en) 2012-08-28 2018-06-26 Proton Power, Inc. Methods, systems, and devices for continuous liquid fuel production from biomass
CA2884860C (en) 2012-09-18 2021-04-20 Proton Power, Inc. C-o-h compound processing for hydrogen or liquid fuel production
US10563128B2 (en) 2014-01-10 2020-02-18 Proton Power, Inc. Methods for aerosol capture
US20150307784A1 (en) 2014-03-05 2015-10-29 Proton Power, Inc. Continuous liquid fuel production methods, systems, and devices
US9890332B2 (en) 2015-03-08 2018-02-13 Proton Power, Inc. Biochar products and production
CN107154354B (zh) 2016-03-03 2020-12-11 上海新昇半导体科技有限公司 晶圆热处理的方法
CN112413589B (zh) * 2020-11-04 2023-04-14 北京北方华创微电子装备有限公司 半导体工艺设备的点火装置及半导体工艺设备

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DE3143050A1 (de) * 1981-10-30 1983-05-05 Varta Batterie Ag, 3000 Hannover Verfahren zur druckgesteuerten h(pfeil abwaerts)2(pfeil abwaerts)/o(pfeil abwaerts)2(pfeil abwaerts)-rekombination
DE3729113A1 (de) * 1987-09-01 1989-03-09 Fraunhofer Ges Forschung Verfahren zur druckgesteuerten katalytischen verbrennung von brennbaren gasen in einem oxidationsreaktor
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