JPS6367084B2 - - Google Patents

Info

Publication number
JPS6367084B2
JPS6367084B2 JP1076083A JP1076083A JPS6367084B2 JP S6367084 B2 JPS6367084 B2 JP S6367084B2 JP 1076083 A JP1076083 A JP 1076083A JP 1076083 A JP1076083 A JP 1076083A JP S6367084 B2 JPS6367084 B2 JP S6367084B2
Authority
JP
Japan
Prior art keywords
gas
combustion
inert gas
furnace
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1076083A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59137705A (ja
Inventor
Shinpei Makino
Tetsuo Muro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chugai Ro Co Ltd
Original Assignee
Chugai Ro Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chugai Ro Co Ltd filed Critical Chugai Ro Co Ltd
Priority to JP1076083A priority Critical patent/JPS59137705A/ja
Publication of JPS59137705A publication Critical patent/JPS59137705A/ja
Publication of JPS6367084B2 publication Critical patent/JPS6367084B2/ja
Granted legal-status Critical Current

Links

JP1076083A 1983-01-25 1983-01-25 不活性ガス製造装置 Granted JPS59137705A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1076083A JPS59137705A (ja) 1983-01-25 1983-01-25 不活性ガス製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1076083A JPS59137705A (ja) 1983-01-25 1983-01-25 不活性ガス製造装置

Publications (2)

Publication Number Publication Date
JPS59137705A JPS59137705A (ja) 1984-08-07
JPS6367084B2 true JPS6367084B2 (https=) 1988-12-23

Family

ID=11759280

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1076083A Granted JPS59137705A (ja) 1983-01-25 1983-01-25 不活性ガス製造装置

Country Status (1)

Country Link
JP (1) JPS59137705A (https=)

Also Published As

Publication number Publication date
JPS59137705A (ja) 1984-08-07

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